JPS6276534U - - Google Patents

Info

Publication number

JPS6276534U

JPS6276534U JP16878185U JP16878185U JPS6276534U JP S6276534 U JPS6276534 U JP S6276534U JP 16878185 U JP16878185 U JP 16878185U JP 16878185 U JP16878185 U JP 16878185U JP S6276534 U JPS6276534 U JP S6276534U

Authority

JP

Japan

Prior art keywords

chemical solution

opening

closing lid

semiconductor device

solution tank

Prior art date

1985-11-01

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000126 substance Substances 0.000 claims description 5
• 239000004065 semiconductor Substances 0.000 claims 3
• 238000004519 manufacturing process Methods 0.000 claims 2
• 239000000758 substrate Substances 0.000 claims 1
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• 238000012993 chemical processing Methods 0.000 description 1
• 238000001816 cooling Methods 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1

Cited By (1)