JPS6275371A - Mcp荷電粒子計数装置 - Google Patents
Mcp荷電粒子計数装置Info
- Publication number
- JPS6275371A JPS6275371A JP21696285A JP21696285A JPS6275371A JP S6275371 A JPS6275371 A JP S6275371A JP 21696285 A JP21696285 A JP 21696285A JP 21696285 A JP21696285 A JP 21696285A JP S6275371 A JPS6275371 A JP S6275371A
- Authority
- JP
- Japan
- Prior art keywords
- output signal
- output
- bias voltage
- signal
- counter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measurement Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21696285A JPS6275371A (ja) | 1985-09-30 | 1985-09-30 | Mcp荷電粒子計数装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21696285A JPS6275371A (ja) | 1985-09-30 | 1985-09-30 | Mcp荷電粒子計数装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6275371A true JPS6275371A (ja) | 1987-04-07 |
| JPH0518389B2 JPH0518389B2 (enExample) | 1993-03-11 |
Family
ID=16696644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21696285A Granted JPS6275371A (ja) | 1985-09-30 | 1985-09-30 | Mcp荷電粒子計数装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6275371A (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6466587A (en) * | 1987-09-08 | 1989-03-13 | Shimadzu Corp | Peak selector |
| JPH0266842A (ja) * | 1988-08-31 | 1990-03-06 | Jeol Ltd | 荷電粒子検出器用電源装置 |
| JP2014511598A (ja) * | 2011-02-16 | 2014-05-15 | パウル・シェラー・インスティトゥート | 改善されたカウンタ構造を備えている単一光子計数検出器システム |
| US20230123152A1 (en) * | 2018-06-08 | 2023-04-20 | Asml Netherlands B.V. | Semiconductor charged particle detector for microscopy |
-
1985
- 1985-09-30 JP JP21696285A patent/JPS6275371A/ja active Granted
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6466587A (en) * | 1987-09-08 | 1989-03-13 | Shimadzu Corp | Peak selector |
| JPH0266842A (ja) * | 1988-08-31 | 1990-03-06 | Jeol Ltd | 荷電粒子検出器用電源装置 |
| JP2014511598A (ja) * | 2011-02-16 | 2014-05-15 | パウル・シェラー・インスティトゥート | 改善されたカウンタ構造を備えている単一光子計数検出器システム |
| US9121955B2 (en) | 2011-02-16 | 2015-09-01 | Paul Scherrer Institut | Single photon counting detector system having improved counter architecture |
| US20230123152A1 (en) * | 2018-06-08 | 2023-04-20 | Asml Netherlands B.V. | Semiconductor charged particle detector for microscopy |
| US12205792B2 (en) * | 2018-06-08 | 2025-01-21 | Asml Netherlands B.V. | Semiconductor charged particle detector for microscopy |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0518389B2 (enExample) | 1993-03-11 |
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