JPS6272125U - - Google Patents
Info
- Publication number
- JPS6272125U JPS6272125U JP16315585U JP16315585U JPS6272125U JP S6272125 U JPS6272125 U JP S6272125U JP 16315585 U JP16315585 U JP 16315585U JP 16315585 U JP16315585 U JP 16315585U JP S6272125 U JPS6272125 U JP S6272125U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- raw material
- switching valve
- lines
- valve devices
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000011084 recovery Methods 0.000 claims description 6
- 238000000746 purification Methods 0.000 claims description 4
- 230000008929 regeneration Effects 0.000 claims description 4
- 238000011069 regeneration method Methods 0.000 claims description 4
- 239000000945 filler Substances 0.000 claims description 3
- 238000007670 refining Methods 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims 4
- 239000012535 impurity Substances 0.000 claims 1
Landscapes
- Separation Of Gases By Adsorption (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Hydrogen, Water And Hydrids (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985163155U JPH038345Y2 (enrdf_load_stackoverflow) | 1985-10-24 | 1985-10-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985163155U JPH038345Y2 (enrdf_load_stackoverflow) | 1985-10-24 | 1985-10-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6272125U true JPS6272125U (enrdf_load_stackoverflow) | 1987-05-08 |
| JPH038345Y2 JPH038345Y2 (enrdf_load_stackoverflow) | 1991-02-28 |
Family
ID=31091091
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985163155U Expired JPH038345Y2 (enrdf_load_stackoverflow) | 1985-10-24 | 1985-10-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH038345Y2 (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010235398A (ja) * | 2009-03-31 | 2010-10-21 | Taiyo Nippon Sanso Corp | 超高純度窒素ガスの製造方法及び製造装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5541300U (enrdf_load_stackoverflow) * | 1979-09-04 | 1980-03-17 |
-
1985
- 1985-10-24 JP JP1985163155U patent/JPH038345Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5541300U (enrdf_load_stackoverflow) * | 1979-09-04 | 1980-03-17 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010235398A (ja) * | 2009-03-31 | 2010-10-21 | Taiyo Nippon Sanso Corp | 超高純度窒素ガスの製造方法及び製造装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH038345Y2 (enrdf_load_stackoverflow) | 1991-02-28 |