JPS61178667U - - Google Patents

Info

Publication number
JPS61178667U
JPS61178667U JP1985061342U JP6134285U JPS61178667U JP S61178667 U JPS61178667 U JP S61178667U JP 1985061342 U JP1985061342 U JP 1985061342U JP 6134285 U JP6134285 U JP 6134285U JP S61178667 U JPS61178667 U JP S61178667U
Authority
JP
Japan
Prior art keywords
supply
grinding fluid
recovery
path
passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1985061342U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6317649Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985061342U priority Critical patent/JPS6317649Y2/ja
Publication of JPS61178667U publication Critical patent/JPS61178667U/ja
Application granted granted Critical
Publication of JPS6317649Y2 publication Critical patent/JPS6317649Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
JP1985061342U 1985-04-24 1985-04-24 Expired JPS6317649Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985061342U JPS6317649Y2 (enrdf_load_stackoverflow) 1985-04-24 1985-04-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985061342U JPS6317649Y2 (enrdf_load_stackoverflow) 1985-04-24 1985-04-24

Publications (2)

Publication Number Publication Date
JPS61178667U true JPS61178667U (enrdf_load_stackoverflow) 1986-11-07
JPS6317649Y2 JPS6317649Y2 (enrdf_load_stackoverflow) 1988-05-18

Family

ID=30589531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985061342U Expired JPS6317649Y2 (enrdf_load_stackoverflow) 1985-04-24 1985-04-24

Country Status (1)

Country Link
JP (1) JPS6317649Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000071173A (ja) * 1998-08-18 2000-03-07 Air Liquide Electronics Syst 基板の機械研磨のための研磨懸濁液を送り出す装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000071173A (ja) * 1998-08-18 2000-03-07 Air Liquide Electronics Syst 基板の機械研磨のための研磨懸濁液を送り出す装置

Also Published As

Publication number Publication date
JPS6317649Y2 (enrdf_load_stackoverflow) 1988-05-18

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