JPS6271511U - - Google Patents
Info
- Publication number
- JPS6271511U JPS6271511U JP16313585U JP16313585U JPS6271511U JP S6271511 U JPS6271511 U JP S6271511U JP 16313585 U JP16313585 U JP 16313585U JP 16313585 U JP16313585 U JP 16313585U JP S6271511 U JPS6271511 U JP S6271511U
- Authority
- JP
- Japan
- Prior art keywords
- scanning
- light
- measured
- detecting
- receiving elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005856 abnormality Effects 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Mechanical Optical Scanning Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16313585U JPS6271511U (fr) | 1985-10-24 | 1985-10-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16313585U JPS6271511U (fr) | 1985-10-24 | 1985-10-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6271511U true JPS6271511U (fr) | 1987-05-07 |
Family
ID=31091052
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16313585U Pending JPS6271511U (fr) | 1985-10-24 | 1985-10-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6271511U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0735512A (ja) * | 1993-07-23 | 1995-02-07 | Mitsutoyo Corp | 光学式寸法測定装置 |
-
1985
- 1985-10-24 JP JP16313585U patent/JPS6271511U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0735512A (ja) * | 1993-07-23 | 1995-02-07 | Mitsutoyo Corp | 光学式寸法測定装置 |
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