JPS6270677A - Piezoelectric pump - Google Patents

Piezoelectric pump

Info

Publication number
JPS6270677A
JPS6270677A JP21074985A JP21074985A JPS6270677A JP S6270677 A JPS6270677 A JP S6270677A JP 21074985 A JP21074985 A JP 21074985A JP 21074985 A JP21074985 A JP 21074985A JP S6270677 A JPS6270677 A JP S6270677A
Authority
JP
Japan
Prior art keywords
fluid
piezoelectric plates
tank chamber
piezoelectric
discharge port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21074985A
Other languages
Japanese (ja)
Inventor
Nobuyuki Miyata
宮田 信幸
Masashi Yanagawa
正史 柳川
Tetsuya Iwashita
哲也 岩下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CKD Controls Ltd
Original Assignee
CKD Controls Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CKD Controls Ltd filed Critical CKD Controls Ltd
Priority to JP21074985A priority Critical patent/JPS6270677A/en
Publication of JPS6270677A publication Critical patent/JPS6270677A/en
Pending legal-status Critical Current

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  • Reciprocating Pumps (AREA)

Abstract

PURPOSE:To increase a rate of volume flow of a fluid by arranging two piezoelectric plates in such a way that the space between them where they face each other is made wider as they go starting from the inlet port side toward the outlet port side. CONSTITUTION:A pair of piezoelectric plates 11 is provided on the upper and lower sides of a fluid passage in a pump main body 1, and a tank chamber 10 is formed between both of the piezoelectric plates 11. And each of these piezoelectric plates 11 is arranged in such a way that the space between them where they face each other is made wider gradually as they go from the inlet port (2) side toward the outlet port (3) side. As this configuration allows the component of a force to the direction of the outlet port 3 which is produced when these piezoelectric plates 11 are deflected inward, to act on a fluid so as to enable a discharging flow rate to be increased for increasing the rate of volume flow of a pump.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、電圧の印加により撓みを生ずる電圧板の振動
を利用して流体を吸入して吐出するピエゾポンプに関す
る。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a piezo pump that sucks in and discharges fluid by utilizing the vibration of a voltage plate that is deflected by the application of voltage.

従来の技術及び発明が解決しようとする問題点ピエゾポ
ンプ1よ、ポンプ本体に透設した孔の両開放端部に、電
圧の印加により撓みを生ずる一対の圧電板を張設して、
両圧電板の間にタンク室を形成するとともに、このタン
ク室の中心を挟む両側に流体の吸入口と吐出口を設け、
両圧電板を対応面が互いに離間する方向と接近する方向
に交互に撓ませてタンク室の容積を交互に増減させるこ
とによって、吸入口からタンク室内に吸入した流体を吐
出口から吐出するようになっているが、従来のものは、
一対の圧電板が互いに平行に張設されていることから、
流体がタンク室内を流れる際に、圧電板との間で大きな
摩擦抵抗を生じ、また、圧電板が流体の流れの方向に対
して直角方向に振動するために、流体を吐出口側に向け
て押圧する力が十分に得られず、従って流体の吐出流量
を十分に大きくすることが困難であって、その改善が望
まれていた。
Problems to be Solved by the Prior Art and the Invention In the piezo pump 1, a pair of piezoelectric plates that are deflected by voltage application are stretched across both open ends of a hole formed in the pump body.
A tank chamber is formed between both piezoelectric plates, and a fluid inlet and outlet are provided on both sides of the center of the tank chamber.
By alternately bending both piezoelectric plates in the direction in which the corresponding surfaces move away from each other and in the direction in which they approach each other, the volume of the tank chamber is alternately increased and decreased, so that the fluid sucked into the tank chamber from the suction port is discharged from the discharge port. However, the conventional one is
Since a pair of piezoelectric plates are stretched parallel to each other,
When the fluid flows inside the tank chamber, a large frictional resistance is generated between it and the piezoelectric plate, and the piezoelectric plate vibrates perpendicularly to the direction of the fluid flow, so the fluid is directed toward the discharge port. It is difficult to obtain a sufficient pressing force and therefore it is difficult to sufficiently increase the discharge flow rate of the fluid, and an improvement has been desired.

本発明は、このような要求に基づいて完成されたもので
あって、タンク室内を流れる流体の速度を高めて、吐出
流量を増大させるのを目的とするものである。
The present invention was completed based on such a request, and an object of the present invention is to increase the velocity of the fluid flowing inside the tank chamber and increase the discharge flow rate.

間層点を解決するための手段 上記目的を達成するために、本発明のピエゾポンプは、
ポンプ本体に透設した孔の両開放端部に。
Means for solving the interlayer point In order to achieve the above object, the piezo pump of the present invention has the following features:
At both open ends of the hole drilled through the pump body.

電圧の印加により撓みを生ずる一対の圧電板を張設して
、該衝圧電板の間にタンク室を形成するとともに、該タ
ンク室の中心を挟む両側に流体の吸入口と吐出口を設け
、前記衝圧電板を対応面が互いに離間する方向と接近す
る方向に交互に撓ませて前記タンク室の容積を交互に増
減させることによって、前記吸入口から前記タンク室内
に吸入した流体を前記吐出口から吐出するようにしたピ
エゾポンプにおいて、前記衝圧電板を、前記吸入口側か
ら前記吐出口側に向って次第に対応間隔が広くなる斜め
姿勢で対設した構成としたものである。
A pair of piezoelectric plates that are deflected by the application of a voltage are stretched to form a tank chamber between the pressure plates, and a fluid inlet and outlet are provided on both sides of the tank chamber, sandwiching the center of the pressure plate. The fluid sucked into the tank chamber from the suction port is discharged from the discharge port by alternately bending the piezoelectric plate in a direction in which the corresponding surfaces move away from each other and in a direction in which the corresponding surfaces approach each other to alternately increase and decrease the volume of the tank chamber. In such a piezo pump, the impulse electric plates are arranged diagonally opposite each other in such a manner that the corresponding spacing gradually increases from the suction port side to the discharge port side.

作用及び効果 本発明は上記の構成になり、電圧の印加によリ一対の圧
電板が対応面の間隔を拡げたり狭めたりするのを交互に
繰り返して、タンク室内の流体容積の増減が交互に繰り
返されることによって、流体が吸入口からタンク室内に
吸入されて吐出口から吐出されるのであって、一対の圧
電板の対応間隔が、吸入口側から吐出口側に向って次第
に広くなっていることから、流体がタンク室を流れる際
に圧電板との間に生ずる摩擦抵抗が小さくなり、また、
圧電板の振動方向が流体の流れの方向に対して斜めとな
って、圧電板の振動時に流体を吐出口側に向けて押圧す
る分力を得ることができ、従って、タンク室内を流れる
流体の速度を増速することができて、流体の吐出流量を
増大させることができる効果を奏する。
Functions and Effects The present invention has the above-described configuration, and the pair of piezoelectric plates alternately widens and narrows the distance between the corresponding surfaces by applying a voltage, thereby alternately increasing and decreasing the fluid volume in the tank chamber. By repeating this process, fluid is sucked into the tank chamber from the suction port and discharged from the discharge port, and the corresponding interval between the pair of piezoelectric plates gradually becomes wider from the suction port side to the discharge port side. Therefore, the frictional resistance that occurs between the fluid and the piezoelectric plate when it flows through the tank chamber is reduced, and
The direction of vibration of the piezoelectric plate is oblique to the direction of fluid flow, and when the piezoelectric plate vibrates, it is possible to obtain a component force that presses the fluid toward the discharge port. The speed can be increased and the discharge flow rate of the fluid can be increased.

実施例 以下1本発明の一実施例を添付図面に基づいて説明する
Embodiment One embodiment of the present invention will be described below with reference to the accompanying drawings.

図において、1は、平面略正方形を成す合成樹脂製のポ
ンプ本体であって、その対応する2つの側面に、流体の
吸入口2と吐出口3が形成されているとともに、ポンプ
本体lの上面と下面に、夫々円形孔4.4が穿設され、
これらの円形孔4.4は、第3図に示すように、夫々そ
の中心線が傾いて、深さが吸入口2側から吐出口3側に
向って次第に浅くなった斜め姿勢で対称的に形成されて
おり、この両回形孔4.4の間の仕切壁5に、第2図に
示すように、吸入口2側から吐出口3側に向って次第に
幅が広くなった流通路6が透設され、この流通路6の一
端部と他端部が、夫々通孔7.8を介して吸入口2と吐
出口3に連通され、吸入口2と吐出口3内に、夫々逆止
弁9.9が装着されている。
In the figure, reference numeral 1 denotes a pump body made of synthetic resin and having a substantially square plan view, and a fluid inlet 2 and a discharge outlet 3 are formed on two corresponding sides thereof, and the upper surface of the pump body l. and a circular hole 4.4 is bored in the lower surface, respectively.
As shown in Fig. 3, these circular holes 4.4 are arranged symmetrically in an oblique position with their respective center lines inclined and the depth gradually becoming shallower from the suction port 2 side to the discharge port 3 side. As shown in FIG. 2, in the partition wall 5 between both circular holes 4.4, there is a flow passage 6 whose width gradually increases from the suction port 2 side to the discharge port 3 side. One end and the other end of this flow passage 6 are communicated with the suction port 2 and the discharge port 3 through the through hole 7.8, respectively, and the inlet port 2 and the discharge port 3 are provided with a reverse A stop valve 9.9 is installed.

前記した仕切壁5の上下両側には、一対の圧電板11.
11が張設され、衝圧電板11.11の間にタンク室1
0が形成されており、この圧電板11は、電圧を印加す
ることにより体積が変化するセラミック板12の上下両
面に電極被膜を溶着し、これを振動板14の一面に接着
して固着したものであって、この圧電板11の振動板1
4の外周にゴム製のシールリング15が嵌着され、衝圧
電板11の振動板14.14同士が互いに向き、合う姿
勢を取って、両シールリング15.15が円形孔4,4
内に緊密に嵌入されて仕切壁5に当てられ、第3図に示
すように、衝圧電板11.11が吸入口2側から吐出口
3側に向って次第に対応間隔が広くなった斜め姿勢を取
っている。
A pair of piezoelectric plates 11.
11 is stretched, and the tank chamber 1 is placed between the impact electric plates 11 and 11.
0 is formed, and this piezoelectric plate 11 is made by welding electrode coatings to both the upper and lower surfaces of a ceramic plate 12 whose volume changes when a voltage is applied, and then bonding and fixing this to one surface of the diaphragm 14. The diaphragm 1 of this piezoelectric plate 11
A rubber seal ring 15 is fitted on the outer periphery of the pressure plate 11, and the diaphragms 14.14 of the impact electric plate 11 face each other and assume a mating posture, so that both the seal rings 15.15 fit into the circular holes 4, 4.
As shown in FIG. 3, the impulse electric plates 11 and 11 are placed in an oblique position in which the corresponding interval gradually increases from the suction port 2 side to the discharge port 3 side. is taking.

そして、ポンプ本体lの取付部17を貫通して植設した
一対の電極棒18.18の一方の電極棒18に、各圧電
板11の振動板14.14が、また、他方の電極棒18
に、各圧電板11の外側の電極被膜が夫々リード線で接
続され、さらに、各シールリング15の外側にリング形
の抑圧体20.2・0が当てられ、電極棒18を植設し
た取付部17の上下両面に、リード線との接続部分を保
護するカバー21.2Iを被着したのち、ポンプ本体1
の上下両面に蓋板22.22が当てられて、その四隅を
ボルト23及びナツト24で締め付けることによって固
定されている。
The diaphragm 14.14 of each piezoelectric plate 11 is attached to one electrode rod 18 of a pair of electrode rods 18.18 implanted through the mounting portion 17 of the pump body l, and the other electrode rod 18
Then, the electrode coatings on the outside of each piezoelectric plate 11 are connected with respective lead wires, and furthermore, a ring-shaped suppressor 20.2.0 is applied to the outside of each seal ring 15, and an electrode rod 18 is installed. After covering the upper and lower surfaces of the part 17 with covers 21.2I that protect the connection parts with the lead wires, the pump body 1
Cover plates 22 and 22 are applied to both the upper and lower sides of the cover plate, and are fixed by tightening the four corners with bolts 23 and nuts 24.

次に、本実施例の作動を説明する。Next, the operation of this embodiment will be explained.

電極棒18.18を交流電源に接続し、各圧電板11の
セラミック板12に正の電圧が印加されると、セラミッ
ク板12は歪みが生じて径方向に伸びようとし、ここに
セラミック板12の外側の面が自由に伸長し得るのに対
して、内側の面が電極被膜を介して振動板14に固着さ
れて拘束されていることから、セラミック板12が外側
に膨らんで、これに伴って圧電板11全体が外側に膨ら
んで撓み、逆に、セラミック板12に負の電圧が印加さ
れると、セラミック板12は逆の歪みが生じて径方向に
縮もうとし、上記と同様にセラミック板12の内側の面
が拘束されていることから。
When the electrode rods 18.18 are connected to an AC power source and a positive voltage is applied to the ceramic plate 12 of each piezoelectric plate 11, the ceramic plate 12 is distorted and tends to expand in the radial direction, and the ceramic plate 12 While the outer surface of the ceramic plate 12 can freely expand, the inner surface is fixed to and restrained by the diaphragm 14 via the electrode coating, causing the ceramic plate 12 to bulge outward. When a negative voltage is applied to the ceramic plate 12, the piezoelectric plate 11 as a whole swells outward and bends.Conversely, when a negative voltage is applied to the ceramic plate 12, the ceramic plate 12 is distorted in the opposite direction and tends to contract in the radial direction. This is because the inner surface of the plate 12 is constrained.

セラミック板12が内側に凹んで圧電板11全体が内側
に撓み、セラミック板12.12に正負の電圧が交互に
印加されることによって1両圧電板11.11が、対応
面が互いに離間する方向と接近する方向に交互に撓み、
両圧電板11.11が互いに離間する方向に撓んでタン
ク室10の容積が増加したときに、吸入口2の逆止弁9
が開くとともに吐出口3の逆止弁9が閉じて、吸入口2
からタンク室10の流通路6に流体が吸入され1両圧電
板11.11が互いに接近する方向に撓んでタンク室I
Oの容積が減少したときに、吐出口3の逆止弁9が開く
とともに吸入口2の逆止弁9が閉じて、流通路6内の流
体が吐出口3から吐出されるのであって、一対の圧電板
11.11の対応間隔が、吸入口2側から吐出口3側に
向って次第に広くなっているから、流体が両圧電板11
の間を流れる際に、圧電板11との間で生ずる摩擦抵抗
が小さく、また、流体を吐出すべく両圧電板1工が内側
に撓んだときに、流体を吐出口3側へ押圧する分力が得
られ、従って、流体の速度が増速されて吐出流量が増大
する。
The ceramic plate 12 is recessed inward, the entire piezoelectric plate 11 is bent inward, and positive and negative voltages are applied alternately to the ceramic plate 12.12, so that both piezoelectric plates 11.11 move in a direction in which their corresponding surfaces are separated from each other. flexing alternately in the direction of approaching
When both piezoelectric plates 11 and 11 are bent in the direction away from each other and the volume of the tank chamber 10 is increased, the check valve 9 of the suction port 2
opens, the check valve 9 of the discharge port 3 closes, and the suction port 2
The fluid is sucked into the flow passage 6 of the tank chamber 10 from the tank chamber 10, and the two piezoelectric plates 11 and 11 are bent in the direction toward each other, and the tank chamber I
When the volume of O decreases, the check valve 9 of the discharge port 3 opens and the check valve 9 of the suction port 2 closes, and the fluid in the flow path 6 is discharged from the discharge port 3. Since the corresponding interval between the pair of piezoelectric plates 11.11 gradually becomes wider from the suction port 2 side to the discharge port 3 side, the fluid flows between both piezoelectric plates 11 and 11.
The frictional resistance generated between the piezoelectric plate 11 and the piezoelectric plate 11 is small when the fluid flows between them, and when both piezoelectric plates 1 bend inward to discharge the fluid, the fluid is pushed toward the discharge port 3 side. A force component is obtained, thus increasing the velocity of the fluid and increasing the discharge flow rate.

なお、上記実施例では、圧電板11が片側で2゜5°ず
つ傾いて交角が5°で対応しており、かかる交角を有し
ていれば、上記した流体の増速効果が得られることが確
認されているが、より以上の増速効果を期するためには
1両圧電板11の交角を10°程度とするのが望ましい
In addition, in the above embodiment, the piezoelectric plate 11 is tilted by 2° to 5° on one side so that the intersection angle is 5°, and if it has such an intersection angle, the above-mentioned fluid speed increasing effect can be obtained. However, in order to achieve a greater speed-increasing effect, it is desirable that the intersection angle between the two piezoelectric plates 11 be approximately 10°.

また、上記実施例では、タンク室lO内に仕切壁5が設
けられてタンク室10の容積が小さくなっているから、
ポンプの起動後タンク室10内に流体が充填される時間
が少なくて済んで定常の吐出を行なうまでの立上り時間
が短縮され、また、流体が流通路6に沿って真直に流れ
るから、タンク室10内で流体の渦流が生じてエアー溜
りができるのが防止されて、流体がばらつきの小さいは
1・1一定の流量で吐出され、しかも、流通路6自身も
吸入口2側から吐出口3側に向って次第に幅広となって
いるから、流通路6の側面との間に生ずる摩擦抵抗が小
さく抑えられる。
Further, in the above embodiment, since the partition wall 5 is provided in the tank chamber 10 and the volume of the tank chamber 10 is reduced,
After the pump is started, it takes less time for the tank chamber 10 to be filled with fluid, which shortens the start-up time until steady discharge occurs.Furthermore, since the fluid flows straight along the flow path 6, the tank chamber 10 is filled with fluid. This prevents the formation of air pockets due to swirling of the fluid within the fluid flow path 10, and the fluid is discharged at a constant flow rate of 1.1 with small variations. Since it gradually becomes wider toward the side, the frictional resistance generated between it and the side surface of the flow path 6 can be kept small.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例に係るポンプ本体の一部切欠
斜視図、第2図はその平面図、第3図は本実施例のピエ
ゾポンプの断面図である。
FIG. 1 is a partially cutaway perspective view of a pump body according to an embodiment of the present invention, FIG. 2 is a plan view thereof, and FIG. 3 is a sectional view of the piezo pump of this embodiment.

Claims (1)

【特許請求の範囲】[Claims] ポンプ本体に透設した孔の両開放端部に、電圧の印加に
より撓みを生ずる一対の圧電板を張設して、該両圧電板
の間にタンク室を形成するとともに、該タンク室の中心
を挟む両側に流体の吸入口と吐出口を設け、前記両圧電
板を対応面が互いに離間する方向と接近する方向に交互
に撓ませて前記タンク室の容積を交互に増減させること
によつて、前記吸入口から前記タンク室内に吸入した流
体を前記吐出口から吐出するようにしたピエゾポンプに
おいて、前記両圧電板を、前記吸入口側から前記吐出口
側に向つて次第に対応間隔が広くなる斜め姿勢で対設し
たことを特徴とするピエゾポンプ
A pair of piezoelectric plates that are deflected by applying a voltage are stretched over both open ends of a hole made through the pump body, and a tank chamber is formed between the two piezoelectric plates, and the center of the tank chamber is sandwiched between the two piezoelectric plates. A fluid suction port and a fluid discharge port are provided on both sides, and the volume of the tank chamber is alternately increased or decreased by alternately bending both the piezoelectric plates in a direction in which the corresponding surfaces move away from each other and in a direction in which the corresponding surfaces approach each other. In the piezo pump, the fluid sucked into the tank chamber from the suction port is discharged from the discharge port, in which both piezoelectric plates are placed in an oblique position such that the corresponding spacing gradually increases from the suction port side to the discharge port side. A piezo pump characterized by being installed oppositely.
JP21074985A 1985-09-24 1985-09-24 Piezoelectric pump Pending JPS6270677A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21074985A JPS6270677A (en) 1985-09-24 1985-09-24 Piezoelectric pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21074985A JPS6270677A (en) 1985-09-24 1985-09-24 Piezoelectric pump

Publications (1)

Publication Number Publication Date
JPS6270677A true JPS6270677A (en) 1987-04-01

Family

ID=16594486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21074985A Pending JPS6270677A (en) 1985-09-24 1985-09-24 Piezoelectric pump

Country Status (1)

Country Link
JP (1) JPS6270677A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006090155A (en) * 2004-09-21 2006-04-06 Fuji Xerox Co Ltd Micro pump
WO2020246232A1 (en) * 2019-06-03 2020-12-10 ソニー株式会社 Fluid control device and electronic apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006090155A (en) * 2004-09-21 2006-04-06 Fuji Xerox Co Ltd Micro pump
WO2020246232A1 (en) * 2019-06-03 2020-12-10 ソニー株式会社 Fluid control device and electronic apparatus

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