JPS6299685A - Piezo pump - Google Patents

Abstract

PURPOSE:To permit suction and discharge of fluid with a simple construction, by applying voltage to both piezoelectric ceramic plates fixed to the outer surfaces of both vibration plates, and alternately vibrating the vibration plates in the directions where the opposed surfaces are moved away and approached to increase and decrease a volume in a pump chamber. CONSTITUTION:When an electrode rod is connected to an A.C. power source, and a positive voltage is applied to both piezoelectric ceramic plate 15 fixed to the outer surfaces of both vibration plates 4, both the ceramic plates 15 are radially outwardly distorted, and accordingly both the vibration plates 4 are outwardly expanded and flexed. Conversely, when a negative voltage is applied, both the piezoelectric ceramic plates 15 are radially inwardly distorted, and both the vibration plates 4 are inwardly contracted and flexed. In this manner, the positive and negative voltage is alternately applied to the piezoelectric ceramic plates 15, 15 to thereby alternately flex both the vibration plates 4 in the directions where the opposed surfaces are moved away and approached. As a result, the capacity of a pump 10 may be increased and decreased. Thus, a fluid is sucked from a suction port 12, and is discharged from a discharge port 13 with a simple construction to exhibit the performance of a piezo pump.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention forms a pump chamber between a pair of diaphragms, vibrates both diaphragms with a piezoelectric ceramic plate that is distorted by applying a voltage, and generates a fluid. This invention relates to a piezo pump that sucks in and discharges.

2. Description of the Related Art A conventionally known piezo pump has a pair of diaphragms attached to both ends of a hole cut through the pump body to form a pump chamber between the two diaphragms, and the pump body is connected to a fluid communicating with the pump chamber. In addition to providing an inlet and an outlet, a piezoelectric ceramic plate that causes distortion when a voltage is applied is pasted on the outer surface of each of the two diaphragms, and a voltage is applied to the two piezoelectric ceramic plates to connect the two diaphragms to the corresponding surface. The fluid sucked into the pump chamber from the suction port is discharged from the discharge port by vibrating the pump chambers alternately in the direction of increasing and approaching each other, thereby alternately increasing and decreasing the volume of the pump chamber.

Problems to be Solved by the Invention Incidentally, in the conventional piezo pump as described above, the diaphragm is formed separately from the pump body, and the diaphragm formed separately is inserted into the hole in the pump body. Since the pump chamber is inverted from the original shape, it is necessary to insert a seal between the vibrator and the pump body to ensure the airtightness of the pump chamber, making the structure complicated. Not only will it become;
There was also a problem that it took time to assemble.

Means for Solving the Problems"-2 In order to eliminate the problem, the piezo pump of the present invention has a piezo pump of the present invention, in which a pair of frames each having a diaphragm attached thereto is joined, and between the two diaphragms there is a A pump chamber is formed that communicates with the outside through the formed suction port and discharge port, and piezoelectric ceramic plates that are distorted by the application of engineering pressure are fixed to the outer surfaces of the two diaphragms. By applying a voltage to the ceramic plate and vibrating both the vibrating plates alternately in a direction in which the corresponding surfaces move away from each other and in a direction in which the corresponding surfaces approach each other, the volume of the pump chamber is alternately increased and decreased. The fluid sucked into the chamber is discharged from the discharge port.

Functions and Effects The present invention has the above-mentioned configuration, and when a voltage is applied to the piezoelectric ceramic plate, the five diaphragms alternately widen and narrow the corresponding interval, and the fluid in the pump chamber formed between the two diaphragms increases. Fluid is sucked into the pump chamber from the suction port and discharged from the discharge port by increasing and decreasing the volume alternately, and the diaphragm that forms the pump chamber is integrated into a pair of frames that are joined to each other. Since it is stretched over the pump, there is no need to install a seal to ensure the airtightness of the pump chamber, which simplifies the structure and allows for easy assembly by simply joining a pair of frames. .

Embodiment Hereinafter, embodiments of the present invention will be explained based on the accompanying drawings. 6 In the first embodiment shown in FIGS. 1 and 2, 1 is a pump body, and a pair of frames 2. Each frame 2 is made of synthetic resin and formed into an annular shape, and within this frame 2, a thin film is placed at a certain depth from one side, which is the joint surface 3. A shaped diaphragm 4 is integrally formed, and a small groove 5.5 with a semicircular cross section whose bottom surface reaches the diaphragm 4 is bored on both sides of the joint surface 3 sandwiching the center of the frame 2. , on the outer periphery of the part of the frame 2 that has a diameter of 5.5 mm, there are 2 stepped cylinders with a reduced diameter at the tip.
The joint parts 6, 6 having a split shape are formed in a protruding manner, and each joint part 6 is
A semicircular cross section 1147 communicating with the small groove 5 and having a larger diameter than the small groove 5 is bored in the joint surface of the pair of frames 2.2 to join the joint surfaces 3.3 of the pair of frames 2.2. By fixing them with adhesive, a pump body l is formed as shown in FIG. ,
Through holes 11.11 are formed on both sides of the pump chamber 10, and grooves 7.7 and 7.7 form a fluid inlet 12 on one side and an outlet 13 on the other side.

On the outer surface of each diaphragm 4.4, a piezoelectric ceramic plate 15.15, which generates distortion when a voltage is applied, is attached by welding electrode foil to both sides of the piezoelectric ceramic plate 15.15.
A pair of electrode rods (not shown) are implanted in the pump body 1, and the inner electrode foil of each piezoelectric ceramic plate 15 is connected to one electrode rod, and the outer electrode foil is connected to the other electrode with a lead wire. , a cover plate 16.1 that protects the piezoelectric ceramic plate 15
6 is attached, and the suction port 12 and the discharge port 1
A check valve 17, 17 is attached to each of the valves 3 and 3.

The present embodiment has the above-described structure, and when the electrode rod is connected to an AC power source and a positive voltage is applied to the piezoelectric ceramic plates 15 and 15, both piezoelectric ceramic plates 15 undergo strain that tends to extend in the radial direction. occurs, and as a result, both diaphragms 4 swell outward and bend. Conversely, when a negative voltage is applied, both piezoelectric ceramic plates I5 are strained to contract in the radial direction, causing both vibrations. The plate 4 is bent inward and the piezoelectric ceramic temporary 15
．． By alternately applying positive and negative voltages to 15,
When both diaphragms 4.4 are deflected alternately in a direction in which their corresponding surfaces move away from each other and in a direction in which they approach each other, and when both diaphragms 4.4 are deflected in a direction in which they are spaced apart from each other and the volume of the pump chamber 10 increases, the suction port The check valve 17 of No. 12 opens and the check valve 17 of the discharge port 13 closes, fluid is sucked into the pump chamber Lo from the suction port I2, and both diaphragms 4.4 are bent in the direction toward each other, causing the pump chamber Lo to close. When the volume of the pump chamber 10 decreases, the check valve 17 of the discharge port 13 opens, the check valve 17 of the suction port 12 closes, and the fluid in the pump chamber 10 is discharged from the discharge port 13. Since the diaphragm 4.4 constituting the pump chamber 10 is integrally stretched between the pair of frames 2.2 that are joined to each other, there is a risk of fluid leaking from the pump chamber 10 even if no seals are used. There is no.

3 to 5 show a second embodiment of the present invention, in which a ring-shaped frame 22 with a diaphragm 24 integrally stretched over one side is formed by press-molding a thin metal plate. A semi-cylindrical joint part 26.26 whose base part is tapered to be equal to the thickness of the frame 22 is connected to the outer periphery of both sides sandwiching the center.

The joint surface 23 of the pair of frames 22, 22 having such a shape
．． 23 are joined together and fixed by spora 1 to welding, the pump main body 21 shown in FIG. 26.26 forms an inlet port 32, and the other joint 26.26 forms a discharge port 33. On the outer surface of the surface diaphragm 24.24, surface markings are formed on both sides, similar to those in the first embodiment. Piezoelectric ceramic plate 1 with electrode foil welded to it
5.15 is attached via an insulating thin plate, and
Check valves 17.17 are attached to the suction port 32 and the discharge port 33, and when an alternating current voltage is applied to both piezoelectric ceramic plates 15.15, the surface vibration plates 24.24 widen or narrow the corresponding interval. By repeating this, the volume of the pump chamber 30 is alternately increased and decreased, so that the fluid flows into the suction port 3.
The diaphragm 24 is sucked into the pump chamber 30 and discharged from the discharge port, as in the first embodiment.
Since it is integrally extended to the frame 22, there is no need for a seal to prevent leakage of the pump chamber 30.

6 to 8 show a modification of the second embodiment, in particular a modification of the joint structure of the frame 22, 22, and FIG.
A flange 35 is formed on both frames 22 and the joint surface 23 of the joint part 26, and the flange 35.35 is overlapped and spot welded to join the frames 22.22.
The figure shows a wide tsuba 36 protruding from the joining surface 23 of one frame 22 and a narrow tsuba 37 protruding from the joining surface 23 of the other frame 22, and by overlapping both tsuba 36 and 37, the wide tsuba 36 is made narrower. The frames 22 and 22 are joined together by bending the collar 37 on one side and pinching it from both sides, and FIG. A fitting part 38 that fits into the inner peripheral surface of the frame 22 and the joint part 26
The frames 22 and 22 are connected by connecting the fitting part 38 to the inside of the other frame 22 and the joint part 26, and spot welding the fitting parts, respectively.
Other structures, functions, and effects are the same as those of the second embodiment.

[Brief explanation of drawings]

FIG. 1 is a perspective view of the divided state of the frame of the first embodiment of the present invention;
Fig. 2 is a sectional view of the combined state, Fig. 3 is a perspective view of the divided state of the frame of the second embodiment, Fig. 4 is a sectional view of the combined state, and Fig. 5 is taken along line XX in Fig. 4. The enlarged line cross-sectional views, FIGS. 6 to 8, are cross-sectional views of modifications of the second embodiment. 2.22: Frame 4.24: Vibration plate lo: Pump chamber 1
2.32: Suction port 13.33: Discharge port 15: Piezoelectric ceramic plate Applicant CKD Controls Co., Ltd. Agent
Patent Attorney Hiroshi Noguchi 3rd time

Claims (1)

[Claims] A pair of frames with diaphragms stretched together are joined to form a pump chamber that communicates with the outside through an inlet and a discharge port formed in the frame between the two diaphragms, and the two diaphragms A piezoelectric ceramic plate that causes distortion when a voltage is applied is fixed to each outer surface of the diaphragm, and by applying a voltage to both piezoelectric ceramic plates, the two diaphragms are moved alternately in the direction in which the corresponding surfaces move away from each other and in the direction in which they approach each other. A piezo pump characterized in that the fluid sucked into the pump chamber from the suction port is discharged from the discharge port by vibrating the pump chamber to alternately increase and decrease the volume of the pump chamber.