JPS6270169U - - Google Patents
Info
- Publication number
- JPS6270169U JPS6270169U JP16312485U JP16312485U JPS6270169U JP S6270169 U JPS6270169 U JP S6270169U JP 16312485 U JP16312485 U JP 16312485U JP 16312485 U JP16312485 U JP 16312485U JP S6270169 U JPS6270169 U JP S6270169U
- Authority
- JP
- Japan
- Prior art keywords
- film
- shutter
- vacuum processing
- winding
- winding shafts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004804 winding Methods 0.000 claims description 4
- 239000000470 constituent Substances 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 238000000992 sputter etching Methods 0.000 claims 1
Landscapes
- ing And Chemical Polishing (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16312485U JPS6270169U (da) | 1985-10-24 | 1985-10-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16312485U JPS6270169U (da) | 1985-10-24 | 1985-10-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6270169U true JPS6270169U (da) | 1987-05-02 |
Family
ID=31091030
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16312485U Pending JPS6270169U (da) | 1985-10-24 | 1985-10-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6270169U (da) |
-
1985
- 1985-10-24 JP JP16312485U patent/JPS6270169U/ja active Pending