JPS61123508U - - Google Patents
Info
- Publication number
- JPS61123508U JPS61123508U JP787885U JP787885U JPS61123508U JP S61123508 U JPS61123508 U JP S61123508U JP 787885 U JP787885 U JP 787885U JP 787885 U JP787885 U JP 787885U JP S61123508 U JPS61123508 U JP S61123508U
- Authority
- JP
- Japan
- Prior art keywords
- target
- rotating body
- holding mechanism
- resistive film
- rotating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 2
Landscapes
- Physical Vapour Deposition (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP787885U JPS61123508U (da) | 1985-01-22 | 1985-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP787885U JPS61123508U (da) | 1985-01-22 | 1985-01-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61123508U true JPS61123508U (da) | 1986-08-04 |
Family
ID=30486638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP787885U Pending JPS61123508U (da) | 1985-01-22 | 1985-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61123508U (da) |
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1985
- 1985-01-22 JP JP787885U patent/JPS61123508U/ja active Pending