JPS627010U - - Google Patents

Info

Publication number
JPS627010U
JPS627010U JP9855785U JP9855785U JPS627010U JP S627010 U JPS627010 U JP S627010U JP 9855785 U JP9855785 U JP 9855785U JP 9855785 U JP9855785 U JP 9855785U JP S627010 U JPS627010 U JP S627010U
Authority
JP
Japan
Prior art keywords
flatness
measured
sensor
measuring device
optical head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9855785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9855785U priority Critical patent/JPS627010U/ja
Publication of JPS627010U publication Critical patent/JPS627010U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP9855785U 1985-06-28 1985-06-28 Pending JPS627010U ( )

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9855785U JPS627010U ( ) 1985-06-28 1985-06-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9855785U JPS627010U ( ) 1985-06-28 1985-06-28

Publications (1)

Publication Number Publication Date
JPS627010U true JPS627010U ( ) 1987-01-16

Family

ID=30966600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9855785U Pending JPS627010U ( ) 1985-06-28 1985-06-28

Country Status (1)

Country Link
JP (1) JPS627010U ( )

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5596406A (en) * 1979-01-19 1980-07-22 Hitachi Ltd Device for determining roughness of surface
JPS5744807A (en) * 1980-08-29 1982-03-13 Hitachi Ltd Flatness measuring apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5596406A (en) * 1979-01-19 1980-07-22 Hitachi Ltd Device for determining roughness of surface
JPS5744807A (en) * 1980-08-29 1982-03-13 Hitachi Ltd Flatness measuring apparatus

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