JPS626937B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a slightly tilted rotary table for polishing the other surface of a plate-like workpiece with respect to a reference surface into a wedge or concave/convex shape.

A conventional device of this kind is constructed as shown in Fig. 1, where A is a stationary tilting system for machining concave and convex shapes, B is a rotary drive system, C is a tilting rotation system for machining wedge shapes, and D is a rotary tilting system for machining wedge shapes. is an indexing system, and 1 is a workpiece.

The stationary inclined plate 2 is fastened to a support plate 3 by a support shaft 4 that can be rotated and tilted, and the receiving plate 3 is placed and fixed on a surface plate 5. The surface plate 5 includes a fixed wedge 6, a movable wedge 7 that can slide on the fixed wedge 6, and a screw support protrusion 8.
A push screw 9 for the movable wedge 7 and a return spring 10 are attached, and when the push screw 9 is screwed in, the movable wedge 7 is pushed in and the stationary inclined plate 2 is moved against the support plate 3. It tilts while rotating around 4, and when the push screw 9 is loosened, the return spring 1
The movable wedge 7 is pushed back by an elastic force of 0, and the stationary inclined plate 2 returns to its original inclination.

Reference numeral 11 denotes a worm wheel, in which a shaft 11' protruding from the bottom is rotatably fitted into a shaft hole provided in the stationary inclined plate 2 and a thrust bearing 12, and a worm wheel 13 is driven and rotated by a driving source. can rotate independently of the stationary tilting system A.

The tilting rotation system C has the same structure as the stationary tilting system A, and includes a tilting plate 14, a receiving plate 15, and a tilting plate support shaft 1.
6, fixed wedge 17, movable wedge 18, screw support protrusion 1
9, a push screw 20, and a return spring 21, and is fixed by a surface plate 22 to a worm wheel 11 that can rotate independently of the stationary tilting system A.

Reference numeral 23 denotes a rotary index workpiece stand with a scale on its outer periphery, which holds the workpiece 1 on its upper surface, and a shaft 23' protruding from its lower surface is rotatably fitted into a bearing portion of the inclined plate 14. The inclined plate 1 can be rotated at any rotation position.
4, the projecting shaft 23' can be fixed by pressing the protruding shaft 23' with a screw inserted from the side surface of the inclined plate.

With this device, the height of the center of rotation changes each time the amount of inclination is adjusted, so the depth of cut must be set each time, and the grinding force is carried by two points: the moving wedge and the spindle. The rigidity is low, and in order to precisely adjust especially small inclinations, increasing the distance between the moving wedge and the support shaft will further reduce the rigidity.
There were drawbacks such as difficulty in obtaining the shape accuracy of the machined surface.

The present invention uses a large-area sliding bearing as the inclination adjustment system in order to achieve high rigidity, which is an important factor for ensuring the shape accuracy of the machined surface. The present invention will be explained in detail below with reference to the drawings.

FIG. 2 shows an embodiment of the present invention, in which 40 is a bearing, 40a is an installation surface, 40b is a first thrust receiving surface, 40c is a radial receiving surface, 41 is a worm wheel, and 41a and 41b are worm wheels 41
41c, 41d are protruding shafts, 42 is a worm, 43, 44 are nuts, 4
5 is a rotating surface plate, 46 is a nut, and 47 is a rotating bearing, the outer periphery of which is a lower disc-shaped spur gear. 47a is an installation surface, 47b is a third thrust receiving surface, 47c is a radial receiving surface, and 48 is a receiving plate, the outer periphery of which is an upper disc-shaped spur gear. 48a and 48b are surfaces of the receiving plate 48, 48c is a protruding shaft, 48d is a vacuum suction hole, 49 is a rotating index disk for holding a workpiece, 49a is a lower part of the disk for holding a workpiece, 49b is a pin hole, 50 is a nut, 51 is a bolt, 52 is a shaft, 53 is a small spur gear, 53a is a bevel gear, 54 is an idler bevel gear, 55 is a small spur gear, 55a is a bevel gear, 56 is an index pin, 57
is made of porous ceramics, 58 and 59 are double vacuum suction tubes, and 60 is an O-ring.

A bearing 40 that has a first thrust bearing surface 40b that is inclined with respect to the installation surface 40a and has a radial bearing surface 40c that is perpendicular to the first thrust bearing surface 40b.
There is a worm wheel 41 on top, and the angle formed by both surfaces 41a and 41b of this worm wheel 41 is the angle between the first thrust receiving surface 40 and the installation surface 40a.
A convex shaft 41 having the same inclination as the angle formed by b and perpendicular to both surfaces 41a and 41b, respectively.
c, 41d, the worm wheel 41 meshes with a worm 42 driven and rotated by a drive source,
Moreover, the protruding shaft 41c of this worm wheel 41 is
It is fastened to the bearing 40 with nuts 43 and 44 so as to be rotatable. A rotating surface plate 45 is attached to the other protruding shaft 41d of the worm wheel 41, and the rotating surface plate 4
5 is fastened to the worm wheel 41 with a nut 46 so as to be rotatable with the surface 41b of the worm wheel 41 serving as a second thrust receiving surface.

The rotation bearing 47 has a third thrust bearing surface 47b that is inclined with respect to the installation surface 47a, and a radial bearing surface 47c that is perpendicular to the third thrust bearing surface 47b.
A rotating bearing having a plurality of bolts 51
The worm wheel 41 is fastened to the rotary surface plate 45 by means of a worm wheel 41, and can be rotated using the upper surface 41b of the worm wheel 41 as a third thrust receiving surface.The outer periphery of the rotary bearing 47 is shaped like a gear with straight teeth.

A receiving plate 48 is provided on this rotary bearing 47 with the surface 47b as a third thrust receiving surface, and both sides 4 of the receiving plate 48 are
The angle formed by 8a and 48b has the same inclination as the angle formed by the third thrust receiving surface 47b with respect to the installation surface 47a, and has a protruding axis 48c perpendicular to the surface 48a of the receiving plate 48. is the radial receiving surface 47
c, and the outer periphery of the receiving plate 48 is also in the shape of a gear with straight teeth, the same as the rotating bearing 47, and the rotating bearing 47,
The gear portion of the receiving plate 48 has the same tooth profile, number of teeth, and dimensions, and is fastened with a nut 50 so that the rotary bearing 47 and the receiving plate 48 can rotate freely with respect to each other.

A rotationally indexed workpiece holding disk 49 is mounted on the receiving plate 48 with its lower surface 49a and the upper surface 48b of the receiving plate 48.
48b and 49a are placed in contact with each other, and 48b and 49a can slide against each other, but there is a vacuum suction hole 4 on the surface 48b.
8d are uniformly arranged, and can attract and fix 49a through the vacuum suction tube 59.

A pin hole 49b is formed at one point on the outer circumference of the rotary indexing workpiece holding disc 49, and when the indexing pin 56 provided at a fixed position is pushed out, the indexing pin 56 is inserted into the pin hole 49b. ,, If necessary, the position of the rotationally indexed workpiece holding disk 49 in the rotational direction is determined.

In the drawing, a porous ceramic 57 whose outer periphery is sealed is integrated into the rotating index workpiece holding disk 49, and a vacuum suction tube 58
The workpiece 1 is held by vacuum suction through.

There are two spur gears 53 and 55 whose shaft systems are approximately parallel to the central rotation axis of the laminate table system 40, 41, 45, 47, 48, and 49, and the spur gear 5
The inner facing portions of gears 3 and 55 are bevel gears 53a and 55b, which transmit rotation in the opposite direction to gear 55 having the same shape as gear 53 via bevel gear 54 as an idler. The gear trains 53, 54, and 55 have a double shaft structure that can slide on the shaft 52.

The position of the shaft 52 is set so that the gears 53 and 55 mesh with gears formed on the outer periphery of the rotary bearing 47 and the receiving plate 48. Therefore, in the axial sliding of the gear trains 53, 54, 55, at the sliding upper end, the gear 53 and the gear of the receiving plate 48 mesh, and the gear 55 and the outer peripheral gear of the rotary bearing 47 mesh. Further, at the lower end of the slide, the upper half of the gear 53 and the lower part of the gear of the receiving plate 48 engage with each other, as shown in FIG.
The lower half of and the upper part of the gear of the rotation bearing 47 engage,
The receiving plate 48 and the rotation bearing 47 are rotated according to the rotation of the gear 53.
rotates in an apparently integrated manner.

FIG. 3 is a structural model diagram of the laminate table system out of the entire structure shown in FIG. 2, and the numbers for each member shown in the figure correspond to the respective members in FIG. 2. In FIG. 3, mutually slidable joints between the laminated members are indicated by double lines.

That is, as the worm 42 rotates, the upper part of the worm wheel 41 can rotate with respect to the bearing 40, and depending on the rotation angle of the worm wheel 41, the upper part of the worm wheel 41, that is, the upper surface of the workpiece 1 as the final purpose, can be rotated with respect to the bearing 40. The angle of inclination of the plane with respect to the horizontal plane can be changed.

In this state, that is, with the top surface of the workpiece slightly tilted, as shown in FIG. The upper part of the rotary surface plate 45 rotates relative to the worm wheel 41 about the rotary shaft. This is the 5th item described below.
This is the state shown in FIG.

On the other hand, even if the rotary bearing 47 and the receiving plate 48 are slightly rotated with respect to each other with the upper surface of the worm wheel 41 set horizontally, the upper surface of the workpiece 1 is tilted with respect to the horizontal plane. However, the rotating bearing 47 and the receiving plate 4
After rotating 8 and setting a certain tilt,
When the rotary bearing 47 and the receiving plate 48 are simultaneously engaged with the gear 53 and rotated, the inclined shaft revolves around the original vertical axis.

Incidentally, the inclination angles 40 and 41 and 47 and 48 in Fig. 3 are shown in an emphasized manner; in reality, as shown in the examples below, the inclinations are slight, so this may cause problems in the meshing relationship of the gears and worms. Problems such as rotation of the shaft with respect to the radial bearing surface of the member are within an acceptable range.

Based on the model shown in FIG. 3, its function will be explained again with reference to FIG. 2.

That is, a case will be described in which the other surface of a plate-shaped workpiece is polished into a wedge shape with respect to the reference surface using the slightly tilted rotary table of the present invention.

By driving the worm 42, the inclined surface 4 of the bearing 40
Rotate the worm wheel 41 until the maximum value of the angle formed by 0a and 40b matches the minimum value of the angle formed by both surfaces 41a and 41b of the worm wheel 41,
Make the surface 41b horizontal (parallel to the grindstone scanning line). Next, when the gear 53 is raised, the gear 55 whose positional relationship is fixed is also raised, and the gear 55 and the gear 53 mesh with the rotary bearing 47 and the receiving plate 48, respectively. When the shaft 52 is driven in this state, the gear 53 and the gear 55 begin to rotate in opposite directions, and accordingly, the rotary bearing 47 and the receiving plate 48 rotate in opposite directions. At this time, after rotating both of them until the inclination angle of the upper surface of the workpiece 1 with respect to the horizontal plane reaches a certain set angle α, when the gear train consisting of 53, 53a, 54, 55a, and 55 is lowered, the gear 53 engages with both the rotary bearing 47 and the receiving plate 48, and the rotational positional relationship between the rotary bearing 47 and the receiving plate 48 is fixed.

Next, the indexing pin 56 is inserted into the pin hole 49b of the rotary index workpiece holding disk 49, the vacuum suction from the vacuum suction tube 59 is released, and the lower part 49a of the workpiece holding disk is released. The gear 53 is rotated to align the high position of the inclined surface 48b with the position of the workpiece 1 to be deeply polished, and at the same time, the indexing pin 56 is removed. is vacuum-adsorbed by a vacuum hole 48d formed in the receiving plate 48, and the rotational positional relationship of the workpiece holding disk 49 with respect to the receiving plate 48 is fixed.

As shown in FIG. 4, the grinding wheel 61 is rotated, and the part above the rotary surface plate 45 is continuously rotated by the gear 53 shown in FIG. 2, and the grinding wheel is scanned linearly. The part of object 1 that should be deeply polished is always rotated in the highest state,
The entire surface is polished to a depth corresponding to the slope of the top surface of 48.

Holding the sample on the workpiece holding disk 49 and fixing the workpiece holding disk 49 on the receiving plate 48 are as follows:
Methods other than vacuum adsorption, such as the use of adhesives or magnetic force, mechanical methods such as screwing, or combinations thereof, may also be used.

In addition, when polishing the other surface of the workpiece 1 with respect to the reference surface into a convex shape, the surface 48 of the receiving plate 48
b is kept horizontal, the worm wheel 41 is rotated by driving the worm 42, and the relationship between the installation surface of the bearing 40 and the surface 41b of the worm wheel 41 is set at a predetermined inclination (for example, an inclination angle α). As shown in FIG. 5, if the grinding wheel 61 is rotated and the part above the rotary surface plate 45 is continuously rotated by the gear 53, the grinding wheel 61 is scanned linearly from the center of the workpiece 1 toward the outer circumference. The outside of the workpiece 1 is the highest, and since it rotates, the entire outer periphery of the workpiece 1 is polished to the deepest depth and the center is the shallowest, geometrically meeting the standard of the workpiece 1. It is polished into a conical shape (actually, it is approximately a convex spherical surface because the polishing part of the whetstone is widened) with an apex angle of nearly 180° to the bottom surface.

When polishing into a concave shape, the same operation as in the case of convex shape processing is performed, as shown in FIG.
1 is scanned from the outer periphery of the workpiece 1 toward the center, the grindstone is stopped, and the grindstone is moved upward away from the surface of the workpiece 1 to complete the process.

In addition, in the state shown in FIG. 4 where the worm wheel 41 is inclined with respect to the plane, and with respect to the installation surface,
The center of the unevenness can be made eccentric from the center of the substrate by combining the state shown in FIG. It can also be processed into shapes.

In reality, the inclination of each inclined disk (4 points) was set to 15μ.
m/80mm, a wedge shape of up to 30μm/80mm and a convex/concave shape of 15μm/80mm can be obtained with good reproducibility. Of course, parallel surfaces are also obtained.

As explained above, the micro-tilt rotary table of the present invention has a structure in which two tilted discs are stacked so that the sliding/tilt adjusting portion can be in contact with each other over a large area, so it is easy to configure and compact. , high rigidity,
As is clear from the model shown in FIG. 3, the bearing 40, the worm wheel 41, and the rotary bearing 4
Since it is composed of two disc-shaped rotating wedges consisting of the receiving plate 7 and the receiving plate 48, it has the advantage that the height fluctuation of the center of rotation is small.

[Brief explanation of the drawing]

Figure 1 is a side sectional view of a conventional tilting rotary table.
Fig. 2 is a diagram showing an embodiment of the present invention, Fig. 3 is a structural model diagram of a stationary tilting table and a rotary tilting table, Fig. 4 is a diagram showing a wedge grinding situation, and Fig. 5 is a diagram showing a convex surface grinding situation. FIG. 6 is a diagram showing a concave surface grinding situation. 1... Workpiece, 40... Bearing, 40a... Installation surface, 40b... First thrust bearing surface, 40c...
Radial bearing surface, 41...Wall wheel, 41
b...Second thrust receiving surface, 41c, 41d...
Projected shaft, 42... Worm, 43, 44... Nut, 45... Rotating surface plate, 46... Nut, 47...
...Rotating bearing (disc-shaped spur gear), 47a... Installation surface, 47b... Third thrust bearing surface, 47c... Radial bearing surface, 48... Reception plate (disc-shaped spur gear), 4
8a, 48b... face of receiving plate, 48c... protruding shaft, 4
8d...Vacuum suction hole, 49...Disc for holding the indexed workpiece, 49a...Lower part of the disc for holding the workpiece, 49b...Pin hole, 50...Nut, 51...
...Bolt, 52...Shaft, 53...Small spur gear, 5
3a...Bevel gear, 54...Bevel gear for idler, 5
5...Small spur gear, 55a...Bevel gear, 56...
Index pin, 57...porous ceramics,
58, 59...Vacuum suction tube, 60...O ring,
61...Grinding whetstone.

Claims (1)

[Scope of Claims] 1. It has an installation fixing surface, a first thrust receiving surface having a plane slightly tilted with respect to the installation fixing surface, and a radial receiving surface perpendicular to the first thrust receiving surface. A worm having a shaft on the first thrust bearing surface of the bearing, the inclination angle of both end surfaces being the same as the inclination angle of the first thrust bearing surface of the bearing, and a shaft protruding perpendicularly from the both end surfaces. The wheel is arranged so that the bearing and the worm wheel can rotate relative to each other, and the outer periphery of the worm wheel is engaged with the worm, and the rotation of the worm wheel changes the inclination angle of one end surface of the worm wheel. from a minimum of zero to a maximum of twice the inclination angle of the first thrust receiving surface with respect to the installation fixed surface,
There is a stationary/variable tilting table comprising the bearing, a worm wheel, and a worm whose inclination can be adjusted; Two disc spur gears that are not parallel to each other, have a constant and equal inclination angle, and can rotate relative to each other are stacked on top of each other, and when they are rotated, the inclination angle changes from a minimum of zero to a maximum of a circle. The two disc spur gears, whose inclination angle can be adjusted up to twice the inclination angle of the upper and lower surfaces of one of the disc spur gears, are arranged coaxially with respect to the worm wheel, and with the upper surface of the worm wheel facing the worm wheel. The two thrust receiving surfaces are rotatably fastened to the worm wheel, and this is used as a rotating/variable tilting table configured on a stationary/variable tilting table, and the workpiece is held on this rotating/variable tilting table. A rotary disk is mounted thereon, and is configured to be indexable to any angular position with respect to the rotary/variable tilt table, and has a rotation axis substantially parallel to the central axis of the two disk-top spur gears. Two small spur gears with the same diameter and gears each have a double axis of rotation, and bevel gears are formed on mutually opposing sides of the two small spur gears. A gear in which an idler bevel gear meshed perpendicularly to the bevel gear is mounted, and the two small spur gears are formed to rotate in reverse directions when one gear of the two small spur gears is rotated. The shafts of the rows are arranged to be movable in the axial direction, and when the shafts are moved, at one end in the axial direction, two small spur gears and the two disc spur gears of the gear train are respectively moved. individually meshing with one small spur gear of the two small spur gears of the gear train at the other end in the axial direction;
A micro-incline rotary table characterized in that the spur gears on the two overlapping discs are configured to mesh together at the same time.