JPS6268229U - - Google Patents
Info
- Publication number
- JPS6268229U JPS6268229U JP16011885U JP16011885U JPS6268229U JP S6268229 U JPS6268229 U JP S6268229U JP 16011885 U JP16011885 U JP 16011885U JP 16011885 U JP16011885 U JP 16011885U JP S6268229 U JPS6268229 U JP S6268229U
- Authority
- JP
- Japan
- Prior art keywords
- melt
- holder
- spacer
- substrate holder
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 125000006850 spacer group Chemical group 0.000 claims description 4
- 239000000155 melt Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 239000007791 liquid phase Substances 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Description
図は本考案の一実施例を示す断面図である。
１……基板ホルダ、２……基板、３……凹部、
４……スペーサ、５……メルト収納部、６……小
孔、７……メルトホルダ、８……メルト溜、９…
…重り（流入手段）、１０……メルト。
４……スペーサ、５……メルト収納部、６……小
孔、７……メルトホルダ、８……メルト溜、９…
…重り（流入手段）、１０……メルト。
Claims (1)
- 一主面に基板載置用の凹部が形成された基板ホ
ルダ、該基板ホルダの一主面上に上記基板ホルダ
と相対的に摺動可能に配され、天面に小孔を有す
るメルト収納部が形成されたスペーサ、該スペー
サ上に上記スペーサと相対的に摺動可能に配され
上下方向に貫通するメルト溜を有するメルトホル
ダ、上記メルト溜より上記メルト収納部に強制的
にメルトを流入せしめる流入手段を備えたことを
特徴とする液相成長装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16011885U JPS6268229U (ja) | 1985-10-18 | 1985-10-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16011885U JPS6268229U (ja) | 1985-10-18 | 1985-10-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6268229U true JPS6268229U (ja) | 1987-04-28 |
Family
ID=31085197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16011885U Pending JPS6268229U (ja) | 1985-10-18 | 1985-10-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6268229U (ja) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52111375A (en) * | 1976-03-16 | 1977-09-19 | Mitsubishi Electric Corp | Production of semi-conductor crystal |
| JPS54152862A (en) * | 1978-05-23 | 1979-12-01 | Sharp Corp | Semiconductor producing device |
-
1985
- 1985-10-18 JP JP16011885U patent/JPS6268229U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52111375A (en) * | 1976-03-16 | 1977-09-19 | Mitsubishi Electric Corp | Production of semi-conductor crystal |
| JPS54152862A (en) * | 1978-05-23 | 1979-12-01 | Sharp Corp | Semiconductor producing device |