JPS6265142U - - Google Patents
Info
- Publication number
- JPS6265142U JPS6265142U JP15579285U JP15579285U JPS6265142U JP S6265142 U JPS6265142 U JP S6265142U JP 15579285 U JP15579285 U JP 15579285U JP 15579285 U JP15579285 U JP 15579285U JP S6265142 U JPS6265142 U JP S6265142U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- receiving
- vacuum chuck
- jig
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Feeding Of Workpieces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985155792U JPH0248202Y2 (un) | 1985-10-14 | 1985-10-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985155792U JPH0248202Y2 (un) | 1985-10-14 | 1985-10-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6265142U true JPS6265142U (un) | 1987-04-22 |
| JPH0248202Y2 JPH0248202Y2 (un) | 1990-12-18 |
Family
ID=31076813
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985155792U Expired JPH0248202Y2 (un) | 1985-10-14 | 1985-10-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0248202Y2 (un) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06188304A (ja) * | 1992-12-17 | 1994-07-08 | Furukawa Electric Co Ltd:The | リングフレーム自動洗浄装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58129638U (ja) * | 1982-02-24 | 1983-09-02 | 富士通株式会社 | ウエハ支持機構 |
| JPS5994353A (ja) * | 1982-11-19 | 1984-05-31 | Toshiba Corp | 半導体ウエハ保持装置 |
-
1985
- 1985-10-14 JP JP1985155792U patent/JPH0248202Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58129638U (ja) * | 1982-02-24 | 1983-09-02 | 富士通株式会社 | ウエハ支持機構 |
| JPS5994353A (ja) * | 1982-11-19 | 1984-05-31 | Toshiba Corp | 半導体ウエハ保持装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06188304A (ja) * | 1992-12-17 | 1994-07-08 | Furukawa Electric Co Ltd:The | リングフレーム自動洗浄装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0248202Y2 (un) | 1990-12-18 |