JPS6264276A - Driving device - Google Patents
Driving deviceInfo
- Publication number
- JPS6264276A JPS6264276A JP60201514A JP20151485A JPS6264276A JP S6264276 A JPS6264276 A JP S6264276A JP 60201514 A JP60201514 A JP 60201514A JP 20151485 A JP20151485 A JP 20151485A JP S6264276 A JPS6264276 A JP S6264276A
- Authority
- JP
- Japan
- Prior art keywords
- end member
- driven
- drive
- piezoelectric
- driven body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims abstract description 12
- 238000006073 displacement reaction Methods 0.000 abstract description 15
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 229910001315 Tool steel Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 229910000897 Babbitt (metal) Inorganic materials 0.000 description 1
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005524 ceramic coating Methods 0.000 description 1
- VNTLIPZTSJSULJ-UHFFFAOYSA-N chromium molybdenum Chemical compound [Cr].[Mo] VNTLIPZTSJSULJ-UHFFFAOYSA-N 0.000 description 1
- 230000004313 glare Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/002—Driving devices, e.g. vibrators using only longitudinal or radial modes
- H02N2/0025—Driving devices, e.g. vibrators using only longitudinal or radial modes using combined longitudinal modes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
Landscapes
- Control Of Position Or Direction (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、圧１ｔｌｆ４子の微小振動を利用して被駆動
体を摩擦駆動する駆動装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a drive device that frictionally drives a driven body using minute vibrations of a pressure 1tlf4 element.
被ｌ東動体を圧電駆動ユニットによって摩擦駆動する駆
動装置としては１、例えば特開昭５７−７８３７８号公
報に示されるように、圧電振動子（超音波振動子）の振
動を、被駆動体面（動体面）に対し所定の角度をもった
振動片に伝え、接触する被駆動体を一方向に摩擦駆動す
るものがある。この例では、摺動部分の材質としては、
耐摩耗性の観点から、振動片には硬度の大きい炭素工具
鋼を採用し、被駆動体面には硬度の小さい軸受メタルを
採用している。ここで、圧電振動子の振動片のユニット
を圧電駆動ユニットと呼び、さらに振動片先端部を駆動
端部材と呼ぶことにする。As a drive device for frictionally driving a moving object using a piezoelectric drive unit, for example, as shown in Japanese Patent Application Laid-Open No. 57-78378, the vibration of a piezoelectric vibrator (ultrasonic vibrator) is transferred to the surface of the driven object ( There is one that transmits the vibration to a vibrating piece that is at a predetermined angle with respect to the surface of the moving body, and frictionally drives the driven body that comes into contact with it in one direction. In this example, the material of the sliding part is:
From the viewpoint of wear resistance, carbon tool steel with high hardness is used for the vibrating piece, and bearing metal with low hardness is used for the driven body surface. Here, the unit of the vibrating element of the piezoelectric vibrator will be referred to as a piezoelectric drive unit, and the tip of the vibrating element will be referred to as a driving end member.
上記の従来例では、ｇｌ！動端部端部材て硬度の大きい
材質を用い、被駆動体面として硬度の小さい材質を用い
ているので、例えば起動・停止時や過大な負荷がかった
ときに被駆動体面の一部が損傷し、この傷を起因して円
滑な動作が困難になる問題があった。In the above conventional example, gl! Since the end member of the moving end is made of a material with high hardness and the driven body surface is made of a material with low hardness, a part of the driven body surface may be damaged, for example, when starting/stopping or when an excessive load is applied. There was a problem in that smooth operation was difficult due to these scratches.
本発明は上述の事柄にもとづいてなされたもので、被駆
動体表面の損傷を防ぎ１円滑な動作を維持できる圧電形
の駆動装置を提供することを目的とする。The present invention has been made based on the above-mentioned problems, and an object of the present invention is to provide a piezoelectric drive device that can prevent damage to the surface of a driven body and maintain smooth operation.
本発明の上記の目的は、圧電素子を含む圧電駆動ユニッ
ト先端の駆動端部材を、被駆動体表面の硬度より小さい
硬度を有する材質で構成することにより達成される。The above object of the present invention is achieved by constructing the drive end member at the tip of the piezoelectric drive unit including the piezoelectric element from a material having a hardness smaller than the hardness of the surface of the driven body.
駆動端部材は被駆動体表面の硬度より小さい硬度に設定
されているので、駆動端部材は被駆動体表面を傷付ける
ことなく、被駆動体を接触摩擦駆動させる。Since the drive end member is set to have a hardness smaller than the hardness of the surface of the driven body, the drive end member drives the driven body by contact friction without damaging the surface of the driven body.
以下本発明の実施例を図面を参照して説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第１図は本発明の駆動装置の一実施例を一部断面図で示
すもの゛で、この図において、一対の圧電素子１及び２
の変位方向（図中の矢印で示す）が被駆動体３の被駆動
面に対しそれぞれ±４５°の角度を成すようにベース４
上に固定されている。FIG. 1 shows a partially sectional view of an embodiment of the drive device of the present invention. In this figure, a pair of piezoelectric elements 1 and 2 are shown.
The base 4 is moved so that the direction of displacement (indicated by arrows in the figure) forms an angle of ±45° with respect to the driven surface of the driven body 3.
Fixed on top.
圧電素子１及び圧電素子２の変位は、変位合成部５によ
って合成される。上記変位合成部５は、例えば第１図に
示すように、ジヨイント部として弾性ヒンジを用いた一
対の平行リンクを直交配置した構造となっており、上記
平行リンクのそれぞれの一端と前記圧電素子］、２及び
前記ベース４は接着またはボルト締め等の固定手段によ
って固着されている。前記変位合成部５の先端に設けら
れた接触駆動部材（駆動端部材）６はネジ７等の固定手
段によって交換可能なように前記変位合成部５に固定さ
れている。この実施例では、駆動端部材６の下端にネジ
を切り、変位合成部５の中心からボルト締めする構造と
なっている。駆動端部材６の材質としては、多少の摩耗
によって硬度や摩擦係数が変化しないように均質な耐摩
耗性材料たとえば鋳鉄、炭素工具鋼あるいは超硬合金等
を用いる。それぞれの材料のビッカース硬度Ｈｖ（眩／
ｒｒｔｎ” ） ハ、劫鉄（Ｈｖ＝２００−３００）
炭素工具ｆＡ （Ｈｖ ＝５００−８５０）−超硬合金
（Ｈｖ ＝ １３００〜１７００） テある。ソレニ対
シテ、駆動端部材６によって摩擦駆動される被駆動体３
の被駆動面の材質としては、駆動端部材６の材質により
硬度の大きい材質、たとえばクロムモリブデン鋼の表面
窒化処理（Ｈｖ ＝ ８００〜１２００） 、あるいは
炭素工具鋼または超硬合金のセラミックコーティング処
理（Ｔ ｉ Ｎ、 ＡＱｚＯ３，Ｔ ｉ Ｃなどのコー
ティングによる表面硬度（Ｈｖ ＝ ２１００〜３２０
０） 。The displacements of the piezoelectric elements 1 and 2 are combined by a displacement combining section 5. As shown in FIG. 1, for example, the displacement combining section 5 has a structure in which a pair of parallel links using elastic hinges as joints are orthogonally arranged, and one end of each of the parallel links and the piezoelectric element] , 2 and the base 4 are fixed by a fixing means such as adhesive or bolting. A contact drive member (drive end member) 6 provided at the tip of the displacement combining section 5 is fixed to the displacement combining section 5 by fixing means such as screws 7 so as to be replaceable. In this embodiment, a screw is cut in the lower end of the drive end member 6, and a bolt is tightened from the center of the displacement combining portion 5. As the material of the drive end member 6, a homogeneous wear-resistant material such as cast iron, carbon tool steel, cemented carbide, etc. is used so that the hardness and friction coefficient do not change due to slight wear. Vickers hardness Hv (glare/
rrtn”) Ha, Kōtetsu (Hv=200-300)
Carbon tool fA (Hv = 500-850) - cemented carbide (Hv = 1300-1700). The driven body 3 is frictionally driven by the driving end member 6.
Depending on the material of the drive end member 6, the material of the driven surface of the drive end member 6 may be a hard material such as chromium molybdenum steel surface nitrided (Hv = 800 to 1200), or carbon tool steel or cemented carbide treated with a ceramic coating (Hv = 800 to 1200). Surface hardness (Hv = 2100-320
0).
あるいはセラミックス単一材料〔アルミナＡＱｚＯａ（
Ｈｖ 〜１６００） 、窒化ケイ素５ｉｓＮ４（Ｈｖ
＝ １８００） 。Or ceramic single material [alumina AQzOa (
Hv ~1600), silicon nitride 5isN4 (Hv
= 1800).
炭化ケイ素Ｓ ｉ Ｃ（Ｈｖ ＝ ２５００）など〕を
用いる。silicon carbide S i C (Hv = 2500), etc.).
なお、圧電素子１，２及びベース４及び変位合成部５及
び駆動端部７から成るユニットを圧電駆動ユニット８と
呼ぶ。この圧電駆動ユニット８はケーシング９上に設置
され、第１図では省略したが押付は手段によって圧電駆
動ユニット８を被駆動体３に対して所定の力で押付ける
構造になっている。Note that a unit consisting of the piezoelectric elements 1 and 2, the base 4, the displacement combining section 5, and the drive end section 7 is referred to as a piezoelectric drive unit 8. This piezoelectric drive unit 8 is installed on a casing 9, and has a structure in which the piezoelectric drive unit 8 is pressed against the driven body 3 with a predetermined force by pressing means, although not shown in FIG.
次に、上述した本発明の装置の一実施例の動作を説明す
る。Next, the operation of one embodiment of the above-mentioned apparatus of the present invention will be explained.
圧電素子１及び圧電素子２に所定の位相差の高周波電圧
を印加すると、それぞれの圧電素子１゜２上端の変位は
、変位合成部５を介して、互いに干渉することなく駆動
端部材６に伝えられ、ｇ膜端ｖＸ６を円運動あるいは楕
円運動させる。それによって、駆動端部材６に接触する
被駆動体３を一方向に連続して駆動するものである。When a high frequency voltage with a predetermined phase difference is applied to the piezoelectric elements 1 and 2, the displacement of the upper end of each piezoelectric element 1.2 is transmitted to the drive end member 6 via the displacement combining section 5 without interfering with each other. and causes the g-membrane end vX6 to move in a circular or elliptical motion. Thereby, the driven body 3 in contact with the driving end member 6 is continuously driven in one direction.
なお、圧電素子１及び２に印加する高周波電圧の位相差
を逆にすれば、もちろん被駆動体３を逆方向に駆動する
ことができる。Note that, of course, by reversing the phase difference between the high-frequency voltages applied to the piezoelectric elements 1 and 2, the driven body 3 can be driven in the opposite direction.
ところが、起動時及び停止時あるいは過大な負荷がかか
った時には、駆動端部材６が振動しながら被駆動体３の
面の同一場所にある程度の時間接触し続けることになる
ため、駆動端部材６の硬度が被駆動体３の表面硬度より
大きいと、被駆γｂ体３の表面のその場所に傷を残し、
これが起因してその後の円滑な動作ができなくおそれが
ある。この実施例では、１駆動端部材６の硬度を被駆動
体３の表面硬度より小さくすることによって、上記の゛
ような場合にも被ｒｇＡ動体３の表面を傷付けることな
く円滑な動作を維持することができる。なお、駆動端部
材６の摩耗は避けられないが、一定動作時間毎に駆動端
部材６のみを交換すればよい。However, when starting and stopping or when an excessive load is applied, the drive end member 6 vibrates and continues to contact the same place on the surface of the driven body 3 for a certain period of time, so that the drive end member 6 If the hardness is greater than the surface hardness of the driven body 3, a scratch will be left on the surface of the driven γb body 3,
Due to this, there is a possibility that smooth operation thereafter may not be possible. In this embodiment, by making the hardness of the first drive end member 6 smaller than the surface hardness of the driven body 3, smooth operation can be maintained without damaging the surface of the driven body 3 even in the above case. be able to. Although wear of the drive end member 6 is unavoidable, it is sufficient to replace only the drive end member 6 at regular intervals of operation.
第２図および第３図は、本発明の駆動装置の他実施例を
示すもので、これらの図において第１図ど同符合のもの
は同一部分または相当する部分である。この実施例では
、駆動端部材６を互いに直交した複数のネジ７で変位合
成部５を取り付けている起め、さらに強固に駆動端部材
６を変位合成部５に固定することができる。2 and 3 show other embodiments of the drive device of the present invention, and in these figures, the same reference numerals as in FIG. 1 are the same or corresponding parts. In this embodiment, the displacement combining section 5 is attached to the driving end member 6 with a plurality of screws 7 perpendicular to each other, and the driving end member 6 can be more firmly fixed to the displacement combining section 5.
第４図および第５図は、本発明に用いられる駆動端部材
６の形状に関する他の実施例を示すもので、この実施例
では、駆動端部材６が被駆動体３面に接触する部分の形
状を、たる形表面形状とすることにより、被駆動体３面
に対する圧電駆動ユニットの設置誤差があった場合でも
、接触部を駆動端部材６のほぼ中央に位置させることが
できるため、駆動端部材６の摩耗がほぼ中心部から始ま
り、偏摩耗を防ぐとともに、駆動端部材６の片当たりに
よる圧電駆動ユニットの振動に対する影響を少なくする
ことができる。4 and 5 show other embodiments regarding the shape of the drive end member 6 used in the present invention. In this embodiment, the portion of the drive end member 6 that contacts the surface of the driven body 3 is By making the shape a barrel-shaped surface, even if there is an installation error of the piezoelectric drive unit with respect to the 3 surfaces of the driven object, the contact part can be located approximately at the center of the drive end member 6, so that the drive end Wear of the member 6 starts almost from the center, and uneven wear can be prevented, and the influence of vibration of the piezoelectric drive unit due to uneven contact of the drive end member 6 can be reduced.
以上詳述したように、本発明によれば、圧電形の駆動装
置の被駆動体表面の損傷を防ぐことができるので、円滑
な動作を維持することができる。As described in detail above, according to the present invention, damage to the surface of the driven body of the piezoelectric drive device can be prevented, so that smooth operation can be maintained.
第１図は本発明の駆動装置の一実施例を一部断面にて示
す正面図、第２図は本発明の駆動装置の他の実施例を一
部断面にて示す正面図、第３図はその平面図、第４図は
本発明の装置を構成する駆動端部材の他の実施例を示す
正面図、第５図は第４図の■−Ｖ線矢視図である。
１．２・・・圧電素子、３・・・被駆動体、４・・・ベ
ース、５・・・変位合成部、６・・・駆動端部材、７・
・・ネジ、８・・・圧電駆動ユニット、９・・・ケーシ
ング。 、、−’）ｆ′ 。FIG. 1 is a partially cross-sectional front view of one embodiment of the drive device of the present invention, FIG. 2 is a partially cross-sectional front view of another embodiment of the drive device of the present invention, and FIG. is a plan view thereof, FIG. 4 is a front view showing another embodiment of the drive end member constituting the device of the present invention, and FIG. 5 is a view taken along the line -V in FIG. 4. 1.2... Piezoelectric element, 3... Driven body, 4... Base, 5... Displacement synthesis section, 6... Drive end member, 7...
...Screw, 8...Piezoelectric drive unit, 9...Casing. ,,-')f'.
Claims (1)
材を被駆動体を摩擦接触させて被駆動体を駆動する駆動
装置において、前記駆動端部材は、被駆動体表面の硬度
より小さい硬度を有する材料で構成したことを特徴とす
る駆動装置。 ２、特許請求の範囲第１項記載の駆動装置において、前
記駆動端部材はネジ等の固定手段により圧電駆動ユニッ
トに、変換可能に取付けたことを特徴とする駆動装置。 ３、特許請求の範囲第１項または第２項記載の駆動装置
において、前記駆動端部材はその被駆動体面に接触する
部分の形状を、たる形表面形状としたことを特徴とする
駆動装置。[Scope of Claims] 1. In a drive device that drives a driven object by bringing a driving end member at the tip of a piezoelectric drive unit including a piezoelectric element into frictional contact with the driven object, the driving end member A drive device characterized in that it is constructed of a material having a hardness smaller than that of . 2. The drive device according to claim 1, wherein the drive end member is convertably attached to the piezoelectric drive unit by fixing means such as screws. 3. The drive device according to claim 1 or 2, wherein the drive end member has a barrel-shaped surface at a portion thereof that contacts the surface of the driven body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60201514A JPS6264276A (en) | 1985-09-13 | 1985-09-13 | Driving device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60201514A JPS6264276A (en) | 1985-09-13 | 1985-09-13 | Driving device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6264276A true JPS6264276A (en) | 1987-03-23 |
Family
ID=16442305
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60201514A Pending JPS6264276A (en) | 1985-09-13 | 1985-09-13 | Driving device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6264276A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5563465A (en) * | 1993-04-14 | 1996-10-08 | Hitachi, Ltd. | Actuator |
| US6139952A (en) * | 1998-01-21 | 2000-10-31 | Teijin Limited | Biaxially oriented polyester film for a membrane switch |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006230711A (en) * | 2005-02-24 | 2006-09-07 | Sankyo Kk | Game machine |
| JP2010063802A (en) * | 2008-09-12 | 2010-03-25 | Sankyo Co Ltd | Game machine |
| JP2012187179A (en) * | 2011-03-09 | 2012-10-04 | Daito Giken:Kk | Game machine |
-
1985
- 1985-09-13 JP JP60201514A patent/JPS6264276A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006230711A (en) * | 2005-02-24 | 2006-09-07 | Sankyo Kk | Game machine |
| JP2010063802A (en) * | 2008-09-12 | 2010-03-25 | Sankyo Co Ltd | Game machine |
| JP2012187179A (en) * | 2011-03-09 | 2012-10-04 | Daito Giken:Kk | Game machine |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5563465A (en) * | 1993-04-14 | 1996-10-08 | Hitachi, Ltd. | Actuator |
| US6139952A (en) * | 1998-01-21 | 2000-10-31 | Teijin Limited | Biaxially oriented polyester film for a membrane switch |
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