JPS60174074A - Vibration wave motor - Google Patents
Vibration wave motorInfo
- Publication number
- JPS60174074A JPS60174074A JP59014905A JP1490584A JPS60174074A JP S60174074 A JPS60174074 A JP S60174074A JP 59014905 A JP59014905 A JP 59014905A JP 1490584 A JP1490584 A JP 1490584A JP S60174074 A JPS60174074 A JP S60174074A
- Authority
- JP
- Japan
- Prior art keywords
- vibration wave
- vibration
- vibrating body
- wave motor
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000000750 progressive effect Effects 0.000 claims description 10
- 239000000463 material Substances 0.000 abstract description 4
- 239000000126 substance Substances 0.000 abstract description 3
- 229910000737 Duralumin Inorganic materials 0.000 abstract description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052751 metal Inorganic materials 0.000 abstract description 2
- 239000002184 metal Substances 0.000 abstract description 2
- 239000004033 plastic Substances 0.000 abstract description 2
- 229910001220 stainless steel Inorganic materials 0.000 abstract description 2
- 239000010935 stainless steel Substances 0.000 abstract description 2
- 229910052719 titanium Inorganic materials 0.000 abstract description 2
- 239000010936 titanium Substances 0.000 abstract description 2
- 239000013013 elastic material Substances 0.000 description 7
- 238000005452 bending Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 239000007788 liquid Substances 0.000 description 4
- 239000011148 porous material Substances 0.000 description 4
- 230000007935 neutral effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
- H02N2/163—Motors with ring stator
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は進行性振動波により移動体を摩擦駆動する、振
動波モータの移動体の構造に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a structure of a moving body of a vibration wave motor that frictionally drives the moving body by progressive vibration waves.
最近実用化されつつある、進行性振動波によって駆動す
る振動波モータの実施例の概略図が第1図に示しである
。同図で、lは電歪素子で例えばPZT (チタン酸ジ
ルコン鉛)で、2は振動体で弾性物質からなり、電歪素
子lを接着しである。FIG. 1 shows a schematic diagram of an embodiment of a vibration wave motor driven by progressive vibration waves, which has recently been put into practical use. In the figure, 1 is an electrostrictive element made of, for example, PZT (lead zirconium titanate), and 2 is a vibrating body made of an elastic material, to which the electrostrictive element 1 is bonded.
振動体2は電歪素子lと共にステータ(不図示)側に保
持されている。3は移動体で振動体2に対し押圧接触さ
れていてロータを形成する。電歪素子lは複数個接着さ
れておりそのうちの一部の群に対し、他の群は振や波の
波長λの3波長分だけずれたピッチで配置される0群内
での各電歪素子は局波長のピッチで、側隣り合うものの
極性i遂になるように配置されている。The vibrating body 2 and the electrostrictive element 1 are held on the stator (not shown) side. Reference numeral 3 denotes a moving body which is pressed into contact with the vibrating body 2 and forms a rotor. A plurality of electrostrictive elements l are glued together, and each electrostrictive element within the 0 group is arranged at a pitch shifted by three wavelengths of vibration and wave wavelength λ for some groups and for other groups. The elements are arranged at a pitch of the local wavelength so that the polarities of adjacent elements are i.
このような構成の振動波モータで一つの群電歪素子にV
。SinωTの交流電圧を印加し、もう一方の群の電歪
素子にvoCO8ωTの交流電圧を印加、する、従って
各電歪素子は相隣り合うものどうし極性が逆向きで二つ
の群どうし90°位相のずれた交流電圧が印加されて振
動をする。この振動が伝えられて振動体2は電歪素子l
の配置ピッチに従って曲げ振動をする。振動体2が一つ
おきの電歪素子の位置で出っ張ると、他の一つおきの電
歪素子の位置が引っ込む、一方、前記の如く電歪素子の
一群は他の一群に対し、%波長ずれた位置にあるため曲
げ振動が進行する。交流電圧が印加されている間、次々
と振動が励起されて、進行性曲げ振動波となって振動体
2を伝わってゆく。In a vibration wave motor with such a configuration, V is applied to one group electrostrictive element.
. An AC voltage of SinωT is applied, and an AC voltage of voCO8ωT is applied to the electrostrictive elements of the other group. Therefore, the polarities of each electrostrictive element are opposite to that of the adjacent ones, and the two groups have a 90° phase difference. A deviated AC voltage is applied, causing vibration. This vibration is transmitted and the vibrating body 2 becomes an electrostrictive element l.
bending vibration according to the arrangement pitch. When the vibrating body 2 protrudes at the position of every other electrostrictive element, the position of every other electrostrictive element retracts. On the other hand, as mentioned above, one group of electrostrictive elements has a wavelength of % relative to the other group. Bending vibration progresses due to the shifted position. While the alternating current voltage is applied, vibrations are excited one after another and propagate through the vibrating body 2 as progressive bending vibration waves.
このときの波の進行状態が第2図(a) (b) (c
) (d)に示しである。いま、進行性曲げ振動波が矢
示X1方向に進むとする。0を最旧状態に於ける振動体
の中心面とすると振動状態では鎖線示の状態となり、こ
の中立面6は曲げによる応力が拮抗している。中立面6
と直交する断面71についてみると、これら二面の交線
5Iでは応力がかからず上下振動しているだけである。The progress state of the wave at this time is shown in Figure 2 (a) (b) (c
) It is shown in (d). Now, assume that the progressive bending vibration wave advances in the direction of arrow X1. If 0 is the center plane of the vibrating body in its oldest state, then in the vibrating state it is in the state shown by the chain line, and the stress due to bending is balanced on this neutral plane 6. neutral plane 6
When looking at the cross section 71 perpendicular to , no stress is applied to the intersection line 5I of these two surfaces, and only vertical vibration occurs.
同時に断面71は交線5Iを中心として左右の振−り子
振動している。At the same time, the cross section 71 is pendulum-oscillating left and right about the intersection line 5I.
断面72又は73についても同じように交線52又は5
3を中心として左右の振り子振動する。Similarly for the cross section 72 or 73, the intersection line 52 or 5
The pendulum oscillates left and right with 3 as the center.
同図(a)に示す状態では断面7Iと振動体2の移動体
3例の表面との交線上の点P1は左右振動の右死点とな
っており上方向運動だけしている。In the state shown in FIG. 4A, a point P1 on the intersection line between the cross section 7I and the surface of the three moving bodies of the vibrating body 2 is the right dead center of left-right vibration, and the vibrating body 2 is only moving upward.
この振り子振動は交線51・52又は53が波の正側で
は(中心面0の上側にあるとき)左方向(波の進行方向
X、と逆方向)の応力が加わり、波の負側(同じく下側
にあδとさ)右方向の応力が加わる。即ち同図(a)に
於て、交線52と断面72が前者のときの状態で、点P
2は矢示方向の応力が加わる。交線53と断面73が後
者のとdの状態で、点P3は矢示方向の応力が加わる。In this pendulum vibration, when the intersection line 51, 52 or 53 is on the positive side of the wave (when it is above the center plane 0), stress is applied in the left direction (opposite to the wave traveling direction X), and on the negative side of the wave ( Similarly, stress in the right direction is applied to the lower side. That is, in the same figure (a), when the intersection line 52 and the cross section 72 are in the former state, the point P
2, stress is applied in the direction of the arrow. When the intersection line 53 and the cross section 73 are in the latter state d, a stress is applied to the point P3 in the direction of the arrow.
波が進行し、 (b)に示すように波の正側に交線51
がくると点PIは左方向の運動をすると同時に上方向の
運動をする。(c)で点PIは上下振動の上死点で左方
向の運動だけする。(d)で点P1は左方向の運動と下
方向運動をする。さらに波が進行し、右方向と下方向の
運動、右方向と上方向の運動を経て(a)の状態に戻る
。この一連の運動を合成すると点P1は回転楕円運動を
しておりその回転半径は、振動体2の中立面6から移動
体側表面までの長さをtとすると、tの関数となる。一
方、移動体3は振動体2に加圧接触しており、同図(C
)に示すように、振動体2上の点PIの回転楕円運動が
移動体3をx2方向に摩擦駆動する。As the wave progresses, the intersection line 51 is on the positive side of the wave as shown in (b).
When the point PI comes, it moves to the left and at the same time moves upward. In (c), point PI only moves to the left at the top dead center of the vertical vibration. In (d), point P1 moves leftward and downward. The wave further advances, moving rightward and downward, moving rightward and upward, and then returning to state (a). When this series of movements is combined, the point P1 moves in a spheroid, and the radius of rotation thereof is a function of t, where t is the length from the neutral plane 6 of the vibrating body 2 to the moving body side surface. On the other hand, the moving body 3 is in pressurized contact with the vibrating body 2, and the moving body 3 is in pressure contact with the vibrating body 2.
), the spheroidal motion of the point PI on the vibrating body 2 frictionally drives the movable body 3 in the x2 direction.
点P2・P3及びその他振動体2上の全ての点が点PL
と同じように移動体3を摩擦駆動する。Points P2 and P3 and all other points on the vibrating body 2 are points PL
The movable body 3 is frictionally driven in the same way.
このようにして駆動される振動波モータでは、騒音、駆
動効率、耐久性などの面で充分に満足できるものができ
ているとはいえない。Vibration wave motors driven in this manner cannot be said to be fully satisfactory in terms of noise, drive efficiency, durability, etc.
本発明はこのキラな事態に鑑みなさ、れたもので、移動
体の構造を改良する9とトより、騒音がなく、駆動効率
が向上し、耐久性の良い振動波モータを提供することを
目的とするもので委る。The present invention was developed in view of this unfortunate situation, and aims to provide a vibration wave motor that is noiseless, has improved driving efficiency, and has good durability by improving the structure of a moving body. Depend on the purpose.
この目的を達成するため本発明は、電歪素子に周波、電
圧を印加し、該電歪素子に接合した振動体に生ずる進行
性振動波によって、該振動体と接触する移動体を駆動す
る振動波モータに於て、該移動体が弾性変形して、該振
動体の進行性振動波の頂稜近傍に接触することを特徴と
する振動波モータである。To achieve this object, the present invention applies a frequency and a voltage to an electrostrictive element, and uses progressive vibration waves generated in a vibrating body connected to the electrostrictive element to generate vibrations that drive a moving body in contact with the vibrating body. The vibration wave motor is characterized in that the movable body is elastically deformed and comes into contact with the vibrating body near the top of a progressive vibration wave.
以下図面に示された実施例を詳細に説明し上記本発明の
構成を明らかにする。The embodiments shown in the drawings will be described in detail below to clarify the structure of the present invention.
第3図は本発明を適用する振動波モータの実施例の要部
を示すものである。同、図に於て、3aは移動体3の一
部で、振動体2と摩擦接触する薄い弾性板で比較的硬く
、耐摩耗性のある材料、例えばステンレス、チタン、ジ
ュラルミンなどである。3bは弾性物質で、比較的軟ら
かい例えばゴムなどである。3cは移動体3の構造体で
金属、プラスチックなどで形成される。FIG. 3 shows the main part of an embodiment of a vibration wave motor to which the present invention is applied. In the figure, 3a is a part of the movable body 3, which is a thin elastic plate that comes into frictional contact with the vibrating body 2, and is made of a relatively hard and wear-resistant material such as stainless steel, titanium, duralumin, etc. 3b is an elastic material, such as a relatively soft material such as rubber. Reference numeral 3c denotes a structure of the moving body 3, which is made of metal, plastic, or the like.
移動体3は振動体2に対し加圧接触していて、振動体2
の進行性振動波が生ずると、接触弾性板3aは弾性物質
3bと共に弾性変形しながら、その振動波の頂稜近傍の
形になじんで接触する。The moving body 3 is in pressure contact with the vibrating body 2, and the vibrating body 2
When a progressive vibration wave is generated, the contact elastic plate 3a is elastically deformed together with the elastic substance 3b and comes into contact with the shape of the vibration wave near the top edge.
従っ、て、移動体3と振動体2の接触面積が大きくなっ
て、摩擦駆動効率が良くなる。このとき、接触弾性板3
aは硬いので、変形しながらも振動波の頂稜近傍より深
い位置で接触するほどは変形しない。従って、振動波の
底部の歪力(第2図参照)による逆方向の摩擦駆動を受
けることがないから、駆動力の相殺もない。移動体3の
変形は弾性変形であるから、振動体2との接触域を過る
と、直ちにもとの平板状に戻る。Therefore, the contact area between the movable body 3 and the vibrating body 2 is increased, and the friction drive efficiency is improved. At this time, the contact elastic plate 3
Since a is hard, even though it deforms, it does not deform to the extent that it makes contact at a position deeper than the vicinity of the apex of the vibration wave. Therefore, since it is not subjected to frictional drive in the opposite direction due to the distortion force at the bottom of the vibration wave (see FIG. 2), there is no cancellation of the driving force. Since the deformation of the movable body 3 is elastic deformation, it immediately returns to its original flat shape after passing through the contact area with the vibrating body 2.
移動体3の弾性物質3bは振動の1#撃吸収をするダッ
シュポットの役割もする。振動波の振幅が変動したとき
に起る移動体3の跳上りを抑えることがでざる、従って
、回転むらや騒音が起りにくくなり、出力が低下しない
。The elastic material 3b of the moving body 3 also serves as a dashpot that absorbs 1# of vibration. It is not possible to suppress the jump of the moving body 3 that occurs when the amplitude of the vibration wave fluctuates, so uneven rotation and noise are less likely to occur, and the output does not decrease.
なお、接触弾性板3aはメッキ、スパッタリング、イオ
ン注入などにより表面処理Iして、耐摩耗性を向上させ
たり、摩擦係数を増加させたりすることができる。また
1弾性物質3bはゴム以外にスポンジなどの多孔質材料
でもよく、さらに多孔質材料に油などの液体を含浸させ
てもよい、このようにすると、ダッシュポットの効果は
さらに大きくなる。緩衝材となる弾性物質3bはゴム、
多孔質材の積層構造としてもよい、これらの場合に、振
動波の周波数拳振幅、振動体2に対する移動体3の接触
圧力などの諸条件を考慮して、弾性物質3bのバネ定数
争減衰係数を設計する。Note that the contact elastic plate 3a can be surface-treated by plating, sputtering, ion implantation, etc. to improve wear resistance and increase the coefficient of friction. In addition, the elastic material 3b may be made of a porous material such as a sponge other than rubber, and the porous material may be impregnated with a liquid such as oil. If this is done, the effect of the dashpot will be even greater. The elastic material 3b serving as a cushioning material is rubber,
A laminated structure of porous materials may also be used. In these cases, the spring constant and damping coefficient of the elastic material 3b are determined by taking into consideration various conditions such as the frequency and amplitude of the vibration wave, and the contact pressure of the moving body 3 with respect to the vibrating body 2. design.
第4図に示すように、ある程度弾性率の高い移動体の構
造体3Cにそれより弾性率の低い物質3bを振動波の振
幅或はそれ以下の厚さに貼り合せても、同じような効果
が得られる。As shown in Fig. 4, even if a material 3b with a lower elastic modulus is attached to the moving body structure 3C, which has a somewhat higher elastic modulus, to a thickness that is equal to or less than the amplitude of the vibration wave, the same effect can be obtained. is obtained.
以上説明したように、本発明によれば騒音がなく、駆動
効率が向上し、m久性の良い振動波モータを得ることが
できる。As described above, according to the present invention, it is possible to obtain a vibration wave motor that is free from noise, has improved driving efficiency, and has good durability.
なお、本発明は実施例に示した回転型の振動波モータ以
外に、リニア型の振動波モータに対しても適用し得るも
のである。It should be noted that the present invention can be applied not only to the rotary type vibration wave motor shown in the embodiments but also to a linear type vibration wave motor.
第1図は振動波モータの主要部の概略図、第2図は振動
波モータの駆動原理を説明する図、第3図は本発明を適
用する振動波モータの実施例の要部概略図、第4図は他
の実施例の要部概略図である。
1は電歪素子、2は振動体、3は移動体、3aは接触弾
性板、3bは弾性物質、3Cは移動体の構造体である。
第2図
第1図
第3図
第4図
(1抛)手続補装置
昭和60年 3月29日
昭和59年 特 許 願第 14905号2、発明の名
称
振動波モータ
3、補正をする者
事件との関係 特許出願人
名 称 (100)キャノン株式会社
4、代理人
東京都渋谷区代々木二丁目1.1番12号木村ビルディ
ング
5、補正の対象 明細書「特許請求の範囲」・「発明の
詳細な説明」の欄。
(2)明細書5頁12行−13行を下記の通り補正する
。
記
動体が液体を含浸させた弾性体によって支持されている
ことを特徴とする振動波モー(3)同 6頁下から2行
「役割もする。」を下記の通り補正する。
記
役割をするため多孔質材料(例えばスポンジ)に油等の
液体を含浸させる。液体を含浸させるとダッシュポット
の効果は極めて大きくなる。
(0同 7頁6〜8行「また1弾性物質3b・・・・・
・含浸させてもよい、」を削除する。
2、特許請求の範囲
(1)電歪素子に周波電圧を印加し、該電歪素子に接合
した振動体に生ずる進行性振動波によって、該振動体と
接触する移動体を駆動する振動波モータに於て、
該移動体が させた にょっ −
持’Sin工」2る、ことを特徴とする振動波モータ。FIG. 1 is a schematic diagram of the main parts of a vibration wave motor, FIG. 2 is a diagram explaining the driving principle of the vibration wave motor, and FIG. 3 is a schematic diagram of the main parts of an embodiment of a vibration wave motor to which the present invention is applied. FIG. 4 is a schematic diagram of main parts of another embodiment. 1 is an electrostrictive element, 2 is a vibrating body, 3 is a moving body, 3a is a contact elastic plate, 3b is an elastic material, and 3C is a structure of the moving body. Figure 2 Figure 1 Figure 3 Figure 4 (1) Procedure auxiliary device March 29, 1985 Patent application No. 14905 2, Title of invention Vibration wave motor 3, Case of person making amendment Relationship with Patent Applicant Name (100) Canon Co., Ltd. 4, Agent Kimura Building 5, 1-12 Yoyogi 2-chome, Shibuya-ku, Tokyo Subject of amendment Specification “Claims” / “Details of the invention "Explanation" column. (2) Lines 12-13 of page 5 of the specification shall be amended as follows. Vibration wave mode characterized in that the recording body is supported by an elastic body impregnated with liquid (3) The second line from the bottom of page 6, ``It also plays a role.'' is amended as follows. A porous material (such as a sponge) is impregnated with a liquid such as oil to serve as a recorder. Dashpots become extremely effective when impregnated with liquid. (0 same page 7 lines 6-8 “Also 1 elastic substance 3b...
・Delete "It may be impregnated." 2. Claims (1) A vibration wave motor that applies a frequency voltage to an electrostrictive element and drives a moving body in contact with the vibrating body using progressive vibration waves generated in a vibrating body joined to the electrostrictive element. 2. A vibration wave motor characterized in that the movable body has a vibration wave caused by the vibration.
Claims (1)
した振動体に生ずる進行性振動波によって、該振動体と
接触する移動体を駆動する振動波モータに於て。 該移動体が弾性変形して、該振動体の進行性振動波の頂
稜近傍に接触する、ことを特徴とする振動波モータ。(1) In a vibration wave motor that applies a frequency voltage to an electrostrictive element and drives a moving body in contact with the vibrating body by progressive vibration waves generated in a vibrating body joined to the electrostrictive element. A vibration wave motor characterized in that the movable body is elastically deformed and comes into contact with a vicinity of a top edge of a progressive vibration wave of the vibrating body.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59014905A JPS60174074A (en) | 1984-01-30 | 1984-01-30 | Vibration wave motor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59014905A JPS60174074A (en) | 1984-01-30 | 1984-01-30 | Vibration wave motor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60174074A true JPS60174074A (en) | 1985-09-07 |
Family
ID=11874001
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59014905A Pending JPS60174074A (en) | 1984-01-30 | 1984-01-30 | Vibration wave motor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60174074A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61203872A (en) * | 1985-03-01 | 1986-09-09 | Shinsei Kogyo:Kk | Rotor/movable element of surface wave motor |
JPS62281772A (en) * | 1986-05-27 | 1987-12-07 | Sony Corp | Elastic wave motor |
JPS631381A (en) * | 1986-06-18 | 1988-01-06 | Matsushita Electric Ind Co Ltd | Ultrasonic motor |
JPH01222671A (en) * | 1988-03-01 | 1989-09-05 | Matsushita Electric Ind Co Ltd | Ultrasonic motor and manufacture thereof |
JPH0318688U (en) * | 1989-06-28 | 1991-02-25 | ||
WO2008064974A1 (en) * | 2006-11-27 | 2008-06-05 | Physik Instrumente (Pi) Gmbh & Co. Kg | Ultrasound drive |
-
1984
- 1984-01-30 JP JP59014905A patent/JPS60174074A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61203872A (en) * | 1985-03-01 | 1986-09-09 | Shinsei Kogyo:Kk | Rotor/movable element of surface wave motor |
JPS62281772A (en) * | 1986-05-27 | 1987-12-07 | Sony Corp | Elastic wave motor |
JPS631381A (en) * | 1986-06-18 | 1988-01-06 | Matsushita Electric Ind Co Ltd | Ultrasonic motor |
JPH01222671A (en) * | 1988-03-01 | 1989-09-05 | Matsushita Electric Ind Co Ltd | Ultrasonic motor and manufacture thereof |
JPH0318688U (en) * | 1989-06-28 | 1991-02-25 | ||
WO2008064974A1 (en) * | 2006-11-27 | 2008-06-05 | Physik Instrumente (Pi) Gmbh & Co. Kg | Ultrasound drive |
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