JPS6263230U - - Google Patents
Info
- Publication number
- JPS6263230U JPS6263230U JP15374285U JP15374285U JPS6263230U JP S6263230 U JPS6263230 U JP S6263230U JP 15374285 U JP15374285 U JP 15374285U JP 15374285 U JP15374285 U JP 15374285U JP S6263230 U JPS6263230 U JP S6263230U
- Authority
- JP
- Japan
- Prior art keywords
- arm
- detection plate
- utility
- transfer device
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15374285U JPS6263230U (fr) | 1985-10-09 | 1985-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15374285U JPS6263230U (fr) | 1985-10-09 | 1985-10-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6263230U true JPS6263230U (fr) | 1987-04-20 |
Family
ID=31072895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15374285U Pending JPS6263230U (fr) | 1985-10-09 | 1985-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6263230U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02291144A (ja) * | 1989-05-01 | 1990-11-30 | Nidek Co Ltd | ウェーハ搬送装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4877561A (fr) * | 1972-01-21 | 1973-10-18 |
-
1985
- 1985-10-09 JP JP15374285U patent/JPS6263230U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4877561A (fr) * | 1972-01-21 | 1973-10-18 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02291144A (ja) * | 1989-05-01 | 1990-11-30 | Nidek Co Ltd | ウェーハ搬送装置 |