JPS61117254U - - Google Patents
Info
- Publication number
- JPS61117254U JPS61117254U JP9585U JP9585U JPS61117254U JP S61117254 U JPS61117254 U JP S61117254U JP 9585 U JP9585 U JP 9585U JP 9585 U JP9585 U JP 9585U JP S61117254 U JPS61117254 U JP S61117254U
- Authority
- JP
- Japan
- Prior art keywords
- storage box
- predetermined direction
- wafer storage
- holding arm
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
- Discharge By Other Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9585U JPS61117254U (fr) | 1985-01-07 | 1985-01-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9585U JPS61117254U (fr) | 1985-01-07 | 1985-01-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61117254U true JPS61117254U (fr) | 1986-07-24 |
Family
ID=30471664
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9585U Pending JPS61117254U (fr) | 1985-01-07 | 1985-01-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61117254U (fr) |
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1985
- 1985-01-07 JP JP9585U patent/JPS61117254U/ja active Pending