JPS63137939U - - Google Patents
Info
- Publication number
- JPS63137939U JPS63137939U JP3096787U JP3096787U JPS63137939U JP S63137939 U JPS63137939 U JP S63137939U JP 3096787 U JP3096787 U JP 3096787U JP 3096787 U JP3096787 U JP 3096787U JP S63137939 U JPS63137939 U JP S63137939U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- wafer transfer
- boat
- transfer table
- carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987030967U JPH0610686Y2 (ja) | 1987-03-03 | 1987-03-03 | ウエハ移し替装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987030967U JPH0610686Y2 (ja) | 1987-03-03 | 1987-03-03 | ウエハ移し替装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63137939U true JPS63137939U (fr) | 1988-09-12 |
JPH0610686Y2 JPH0610686Y2 (ja) | 1994-03-16 |
Family
ID=30836262
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987030967U Expired - Lifetime JPH0610686Y2 (ja) | 1987-03-03 | 1987-03-03 | ウエハ移し替装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0610686Y2 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015159836A1 (fr) * | 2014-04-14 | 2015-10-22 | 富士フイルム株式会社 | Procédé de mesure de contrainte, élément pour mesure de contrainte et ensemble pour mesure de contrainte |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5991735U (ja) * | 1982-12-10 | 1984-06-21 | 日本電気ホームエレクトロニクス株式会社 | 半導体ウエ−ハ移し替え装置 |
-
1987
- 1987-03-03 JP JP1987030967U patent/JPH0610686Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5991735U (ja) * | 1982-12-10 | 1984-06-21 | 日本電気ホームエレクトロニクス株式会社 | 半導体ウエ−ハ移し替え装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015159836A1 (fr) * | 2014-04-14 | 2015-10-22 | 富士フイルム株式会社 | Procédé de mesure de contrainte, élément pour mesure de contrainte et ensemble pour mesure de contrainte |
Also Published As
Publication number | Publication date |
---|---|
JPH0610686Y2 (ja) | 1994-03-16 |