JPS6262870U - - Google Patents

Info

Publication number
JPS6262870U
JPS6262870U JP15331085U JP15331085U JPS6262870U JP S6262870 U JPS6262870 U JP S6262870U JP 15331085 U JP15331085 U JP 15331085U JP 15331085 U JP15331085 U JP 15331085U JP S6262870 U JPS6262870 U JP S6262870U
Authority
JP
Japan
Prior art keywords
suction chamber
case
workpiece
guide portion
coating device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15331085U
Other languages
English (en)
Other versions
JPH0441976Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985153310U priority Critical patent/JPH0441976Y2/ja
Publication of JPS6262870U publication Critical patent/JPS6262870U/ja
Application granted granted Critical
Publication of JPH0441976Y2 publication Critical patent/JPH0441976Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)

Description

【図面の簡単な説明】
第１図は本考案に係る塗布装置の縦断面図、第
２図は同塗布装置の平面図、第３図はスピンナー
の斜視図である。 尚、図面中１はケース、２は上板、３は壁板、
４は底板、９はスピンナー、１５は吸引室、１８
はガイド部、１９は流入口、２０は溜り部、Ｗは
非処理部材である。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) ケース内に下方から臨むスピンナー上に被
    処理物を載置し、スピンナーにて被処理物を回転
    せしめることで被処理物表面にノズルから滴下し
    た塗布液を遠心力で被処理物表面に均一に広げる
    ようにした塗布装置において、前記ケース内に吸
    引室が形成され、この吸引室の下方には前記ケー
    スを構成する壁板から前記ケース内方に向かつて
    突出するガイド部が設けられ、このガイド部と前
    記ケースを構成する底板との間に前記吸引室と連
    通する溶剤の溜り部を形成したことを特徴とする
    塗布装置。 (2) 前記ガイド部の上面を傾斜面としたことを
    特徴とする実用新案登録請求の範囲第１項記載の
    塗布装置。
JP1985153310U 1985-10-07 1985-10-07 Expired JPH0441976Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985153310U JPH0441976Y2 (ja) 1985-10-07 1985-10-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985153310U JPH0441976Y2 (ja) 1985-10-07 1985-10-07

Publications (2)

Publication Number Publication Date
JPS6262870U true JPS6262870U (ja) 1987-04-18
JPH0441976Y2 JPH0441976Y2 (ja) 1992-10-02

Family

ID=31072077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985153310U Expired JPH0441976Y2 (ja) 1985-10-07 1985-10-07

Country Status (1)

Country Link
JP (1) JPH0441976Y2 (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5990928A (ja) * 1982-11-16 1984-05-25 Dainippon Screen Mfg Co Ltd 回転式表面処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5990928A (ja) * 1982-11-16 1984-05-25 Dainippon Screen Mfg Co Ltd 回転式表面処理装置

Also Published As

Publication number Publication date
JPH0441976Y2 (ja) 1992-10-02

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