JPS6262248U - - Google Patents

Info

Publication number
JPS6262248U
JPS6262248U JP15296985U JP15296985U JPS6262248U JP S6262248 U JPS6262248 U JP S6262248U JP 15296985 U JP15296985 U JP 15296985U JP 15296985 U JP15296985 U JP 15296985U JP S6262248 U JPS6262248 U JP S6262248U
Authority
JP
Japan
Prior art keywords
bottle
carry
inspection
foil
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15296985U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0526993Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15296985U priority Critical patent/JPH0526993Y2/ja
Publication of JPS6262248U publication Critical patent/JPS6262248U/ja
Application granted granted Critical
Publication of JPH0526993Y2 publication Critical patent/JPH0526993Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Specific Conveyance Elements (AREA)
JP15296985U 1985-10-05 1985-10-05 Expired - Lifetime JPH0526993Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15296985U JPH0526993Y2 (enrdf_load_stackoverflow) 1985-10-05 1985-10-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15296985U JPH0526993Y2 (enrdf_load_stackoverflow) 1985-10-05 1985-10-05

Publications (2)

Publication Number Publication Date
JPS6262248U true JPS6262248U (enrdf_load_stackoverflow) 1987-04-17
JPH0526993Y2 JPH0526993Y2 (enrdf_load_stackoverflow) 1993-07-08

Family

ID=31071430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15296985U Expired - Lifetime JPH0526993Y2 (enrdf_load_stackoverflow) 1985-10-05 1985-10-05

Country Status (1)

Country Link
JP (1) JPH0526993Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02198152A (ja) * 1989-01-27 1990-08-06 Hitachi Electron Eng Co Ltd カセット内ウェハのハンドリング方法および装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02198152A (ja) * 1989-01-27 1990-08-06 Hitachi Electron Eng Co Ltd カセット内ウェハのハンドリング方法および装置

Also Published As

Publication number Publication date
JPH0526993Y2 (enrdf_load_stackoverflow) 1993-07-08

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