JPS6262040B2 - - Google Patents

Info

Publication number
JPS6262040B2
JPS6262040B2 JP56064169A JP6416981A JPS6262040B2 JP S6262040 B2 JPS6262040 B2 JP S6262040B2 JP 56064169 A JP56064169 A JP 56064169A JP 6416981 A JP6416981 A JP 6416981A JP S6262040 B2 JPS6262040 B2 JP S6262040B2
Authority
JP
Japan
Prior art keywords
cooling water
cooling
water
target
neutral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56064169A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57180100A (en
Inventor
Masanori Araki
Shoji Isobe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56064169A priority Critical patent/JPS57180100A/ja
Publication of JPS57180100A publication Critical patent/JPS57180100A/ja
Publication of JPS6262040B2 publication Critical patent/JPS6262040B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
JP56064169A 1981-04-30 1981-04-30 Cooler for neutral particle incident unit Granted JPS57180100A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56064169A JPS57180100A (en) 1981-04-30 1981-04-30 Cooler for neutral particle incident unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56064169A JPS57180100A (en) 1981-04-30 1981-04-30 Cooler for neutral particle incident unit

Publications (2)

Publication Number Publication Date
JPS57180100A JPS57180100A (en) 1982-11-05
JPS6262040B2 true JPS6262040B2 (cg-RX-API-DMAC7.html) 1987-12-24

Family

ID=13250286

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56064169A Granted JPS57180100A (en) 1981-04-30 1981-04-30 Cooler for neutral particle incident unit

Country Status (1)

Country Link
JP (1) JPS57180100A (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0172407U (cg-RX-API-DMAC7.html) * 1987-11-04 1989-05-16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0172407U (cg-RX-API-DMAC7.html) * 1987-11-04 1989-05-16

Also Published As

Publication number Publication date
JPS57180100A (en) 1982-11-05

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