JPS6261031A - Manufacture of liquid crystal display element - Google Patents

Abstract

PURPOSE:To simplify the process forming the insulating film of a metallic wiring part formed on a substrate by forming each corresponding metallic wiring part and terminal part of a wiring pattern and connecting the metallic wiring part to the terminal part after the former is anodized. CONSTITUTION:Plural substrates of liquid crystal display elements are taken out of a large-scaled substrate 5, on which four same wiring patterns 7 composed of plural metallic wiring parts 6... and terminal parts 6a... are formed. The metallic wiring part 6 and the terminal part 6a and formed such that the terminal part 6a is separated from the metallic wiring part 6 and they can be nonconductive. All the metallic wiring parts 6 of four wiring patterns 7 are connected at end part opposite to the direction of the terminal part 6a, and taken out at a point X on one side of the large-scaled substrate 5. The wiring patterns 7... formed on said substrate 5 are anodized in an electrolytic bath with the point X as an anode. At this time, since the terminal parts 6... are not conducted, only the metallic wiring parts 6... form an insulating film.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a liquid crystal display element with an active element, such as a liquid crystal display element having an MIM (metal-insulator-metal) element and a liquid crystal display element with a TPT (thin film transistor). The present invention relates to a method of manufacturing a liquid crystal display element using an anodic oxidation method.

[Prior art]

In a conventional method for manufacturing a liquid crystal display element, for example, the formation of an insulating film in the manufacturing process of an MIM element is performed by an anodic oxidation method. Here, if the insulating film of the metal wiring part is formed by a method such as sputtering or thin deposition, if a pinhole exists in the insulating film, the upper metal film formed on the metal wiring part and the metal wiring part will be leaked immediately. However, when the above-mentioned IiA edge film of the metal wiring part is formed using the anodic oxidation method, even if a pinhole exists in the metal wiring part, an oxide film is also formed inside the pinhole at the same time. Therefore, no leakage occurs between the pinhole and the upper electric bridge formed over the pinhole, and a stable insulating film can be formed.

Furthermore, it was an effective means for forming an insulating film, such as by omitting the step of forming a pattern for the insulating film. When insulating the metal wiring parts formed on the substrate by the above-mentioned anodic oxidation method, as shown in FIG. It is customary to form 3... and process them simultaneously to take out a large number of sheets.

However, in the conventional method described above, during the insulating film formation process,
In order to prevent oxidation of the terminal portions 2a of each metal wiring portion 2, which is a connection portion with an external device, it was necessary to provide an oxidation-preventing film 4 made of an organic insulating film such as novolac resin. . Therefore, the steps of coating, curing, and peeling off the antioxidant film 4 are required, which increases the number of steps, resulting in an increase in cost and a decrease in productivity.

[Purpose of the invention]

The present invention has been made in consideration of the above conventional problems, and improves productivity and reduces costs by simplifying the process of forming an insulating film on a metal wiring portion formed on a substrate. The object of the present invention is to provide a method for manufacturing a liquid crystal display element that can be manufactured using the following methods.

[Structure of the invention]

The method for manufacturing a liquid crystal display element of the present invention is a method for manufacturing a liquid crystal display element in which an insulating film is formed on a wiring pattern formed on a substrate by an anodic oxidation method. The present invention is characterized in that the metal wiring portion is formed to be non-conductive, the metal wiring portion is anodized, and then the metal wiring portion and the terminal portion are connected, thereby simplifying the manufacturing process.

〔Example〕

An embodiment of the present invention will be described below based on FIGS. 1 to 4.

The substrate of the liquid crystal display element is a large substrate 5 as shown in FIG.
A larger number of sheets are taken. On this large substrate 5, four identical wiring patterns 7 consisting of a large number of metal wiring parts 6 and terminal parts 6a are formed.

As shown in FIG. 2, the metal wiring portion 6 and the terminal portion 6a are formed so that the terminal portion 6a is separated from the metal wiring portion 6 so as to be non-conductive. In addition, the four wiring patterns 7 and
All the metal wiring parts 6 are connected at the end opposite to the direction of the terminal part 6a, and taken out at point X on one side of the large board 5. The wiring patterns 7 formed on the large substrate 5 are anodized in an electrolytic bath using the point X as an anode. At this time, the terminal portion 6a
Since no current is applied to the metal wiring portions 6..., the insulating film is formed only on the metal wiring portions 6.... After the anodic oxidation treatment, as shown in FIGS. 3 and 4, a metal film 10 is formed by sputter deposition between the metal wiring section 6 and the corresponding terminal section 6a to connect the two. will be carried out.

Note that the formation of the metal film 10 is performed on the protrusion 6 of the metal wiring portion 6.
It is formed simultaneously with the upper metal film 8 formed on b. After this, a transparent conductive film 9 is patterned by vapor deposition on the upper metal film 8, and the present liquid crystal display element is manufactured by the same method as the manufacturing method of a conventional twisted nematic liquid crystal element.

〔Effect of the invention〕

As described above, in the method for manufacturing a liquid crystal display element of the present invention, the metal wiring portions and the terminal portions corresponding to each of the wiring patterns are formed to be non-conductive, the metal wiring portions are anodized, and then the metal wiring portions and the terminal portions are anodized. It connects to the terminal section. Thereby, there is no need to form an oxidation-preventing film to prevent anodic oxidation of the terminal portion, and the steps of coating, curing, and peeling the oxidation-preventing film can be omitted. Further, the connection between the metal wiring portion and the terminal portion can be performed simultaneously with the subsequent upper metal film forming step. This makes it possible to simplify the manufacturing process, thereby achieving effects such as cost reduction and productivity improvement.

[Brief explanation of the drawing]

1 to 4 show one embodiment of the present invention, in which FIG. 1 is a schematic configuration diagram showing a wiring pattern, and FIG. 2 is a diagram showing a metal wiring part and a terminal part shown in FIG. 3 is a schematic explanatory diagram showing the process after anodization, FIG. 4 is an enlarged view of section A in FIG. 3, and FIG. 5 is a schematic diagram showing the wiring pattern of a conventional example. 5 is a large substrate, 6 is a metal wiring section, 6a is a terminal section, 7 is a wiring pattern, and 10 is a metal film.

Claims (1)

[Claims] 1. In a method for manufacturing a liquid crystal display element in which an insulating film is formed on a wiring pattern formed on a substrate by an anodizing method, the corresponding metal wiring portions and terminal portions of the wiring pattern are formed to be non-conductive, and the metal 1. A method of manufacturing a liquid crystal display element, which comprises connecting a metal wiring part and a terminal part after anodizing the wiring part.