JPS6260061U - - Google Patents

Info

Publication number
JPS6260061U
JPS6260061U JP15158985U JP15158985U JPS6260061U JP S6260061 U JPS6260061 U JP S6260061U JP 15158985 U JP15158985 U JP 15158985U JP 15158985 U JP15158985 U JP 15158985U JP S6260061 U JPS6260061 U JP S6260061U
Authority
JP
Japan
Prior art keywords
control device
flow rate
gas pressure
gas flow
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15158985U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15158985U priority Critical patent/JPS6260061U/ja
Publication of JPS6260061U publication Critical patent/JPS6260061U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Lasers (AREA)

Description

【図面の簡単な説明】
第1図は本考案の一実施例を示す構成図、第2
図は第1図の動作を示すタイムチヤート、第3図
は従来のレーザ制御装置の一例を示す構成図、第
4図は第3図の動作を示すタイムチヤートである
。 1……演算増幅器、2……電源部、3……レー
ザ発振器、4……電源出力検出器、5……ガス圧
検出器、6……ガス圧調節器、7……回転数補正
演算回路、8……モータ駆動装置、9……ブロワ

Claims (1)

    【実用新案登録請求の範囲】
  1. レーザ発振器の光出力を入力電力に対応して一
    定に制御するレーザ制御装置において、レーザ発
    振器内のガス圧を検出し、ガス圧の変動に応じて
    ガス流速を補正するガス流速調整回路を備えたこ
    とを特徴とするレーザ制御装置。
JP15158985U 1985-10-04 1985-10-04 Pending JPS6260061U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15158985U JPS6260061U (ja) 1985-10-04 1985-10-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15158985U JPS6260061U (ja) 1985-10-04 1985-10-04

Publications (1)

Publication Number Publication Date
JPS6260061U true JPS6260061U (ja) 1987-04-14

Family

ID=31068802

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15158985U Pending JPS6260061U (ja) 1985-10-04 1985-10-04

Country Status (1)

Country Link
JP (1) JPS6260061U (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008235646A (ja) * 2007-03-22 2008-10-02 Komatsu Ltd 放電励起エキシマレーザ装置
JP2011211233A (ja) * 2011-06-24 2011-10-20 Komatsu Ltd 放電励起エキシマレーザ装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008235646A (ja) * 2007-03-22 2008-10-02 Komatsu Ltd 放電励起エキシマレーザ装置
JP2011211233A (ja) * 2011-06-24 2011-10-20 Komatsu Ltd 放電励起エキシマレーザ装置

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