JPS6259857B2 - - Google Patents
Info
- Publication number
- JPS6259857B2 JPS6259857B2 JP56055946A JP5594681A JPS6259857B2 JP S6259857 B2 JPS6259857 B2 JP S6259857B2 JP 56055946 A JP56055946 A JP 56055946A JP 5594681 A JP5594681 A JP 5594681A JP S6259857 B2 JPS6259857 B2 JP S6259857B2
- Authority
- JP
- Japan
- Prior art keywords
- particle
- particles
- incident
- magnetic field
- charged
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002245 particle Substances 0.000 claims description 114
- 230000005684 electric field Effects 0.000 claims description 26
- 238000001514 detection method Methods 0.000 claims description 9
- 238000006073 displacement reaction Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/025—Detectors specially adapted to particle spectrometers
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56055946A JPS57170453A (en) | 1981-04-14 | 1981-04-14 | Particle detecting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56055946A JPS57170453A (en) | 1981-04-14 | 1981-04-14 | Particle detecting device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57170453A JPS57170453A (en) | 1982-10-20 |
JPS6259857B2 true JPS6259857B2 (de) | 1987-12-14 |
Family
ID=13013238
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56055946A Granted JPS57170453A (en) | 1981-04-14 | 1981-04-14 | Particle detecting device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57170453A (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4718982B2 (ja) * | 2005-12-07 | 2011-07-06 | 財団法人光科学技術研究振興財団 | イオン分析装置 |
-
1981
- 1981-04-14 JP JP56055946A patent/JPS57170453A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS57170453A (en) | 1982-10-20 |
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