JPS6258521B2 - - Google Patents

Info

Publication number
JPS6258521B2
JPS6258521B2 JP56001681A JP168181A JPS6258521B2 JP S6258521 B2 JPS6258521 B2 JP S6258521B2 JP 56001681 A JP56001681 A JP 56001681A JP 168181 A JP168181 A JP 168181A JP S6258521 B2 JPS6258521 B2 JP S6258521B2
Authority
JP
Japan
Prior art keywords
temperature
thin film
metal plate
platinum
sensitive resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56001681A
Other languages
Japanese (ja)
Other versions
JPS57115803A (en
Inventor
Kazuo Ogata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56001681A priority Critical patent/JPS57115803A/en
Publication of JPS57115803A publication Critical patent/JPS57115803A/en
Publication of JPS6258521B2 publication Critical patent/JPS6258521B2/ja
Granted legal-status Critical Current

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  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Thermistors And Varistors (AREA)

Description

【発明の詳細な説明】 この発明は感温抵抗器の製造方法に関するもの
である。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of manufacturing a temperature sensitive resistor.

白金を用いた測温抵抗体は、JIS C1604にも制
定され、精密温度センサとして使用されており、
精度は高く、互換性もあるが、白金線を使用する
ため抵抗値は50Ω,100Ωと低く、そのため、周
辺回路が複雑になり、また周辺回路の雑音等影響
を受けやすいという問題があり、また形状も大き
く、さらに振動および衝撃に弱い。また、白金線
を細くすることには限界があるから高価な白金線
を相当多量に使用することになるとともに、白金
線を1本ずつ軸等にまきつけて作成していくから
大量生産は不可能であつて相当高価なものとなつ
ていた。
Resistance thermometers using platinum have been established in JIS C1604 and are used as precision temperature sensors.
Although the accuracy is high and there is compatibility, the resistance value is low at 50Ω and 100Ω because platinum wire is used, which causes the problem that the peripheral circuit is complicated and is easily affected by peripheral circuit noise. It has a large shape and is also susceptible to vibration and shock. In addition, there is a limit to how thin platinum wire can be made, so a considerable amount of expensive platinum wire is used, and mass production is impossible because each platinum wire is wound around a shaft, etc. It had become quite expensive.

一方、白金を主成分とするインクをスクリーン
印刷後、抵抗値調整する厚膜型白金感温抵抗器も
あるが、厚膜を使用するため抵抗値を高くするこ
とができず、やはり50Ω,100Ω程度であつてし
かも形状が非常に大きい。
On the other hand, there is also a thick film type platinum temperature sensitive resistor whose resistance value is adjusted after screen printing with platinum-based ink, but because it uses a thick film, it is not possible to increase the resistance value, and it is still 50Ω and 100Ω. In addition, the shape is very large.

また、薄膜を使用した場合、抵抗値を高く作る
ことができるため、小型でかつ5KΩ,10KΩ程
度のものを作ることが可能であるが、印刷等で予
め図形化できないため着膜後図形化する必要が生
じる。ところが、白金は非常に安定であるため、
通常の化学エツチング等では長時間エツチング液
中に浸漬しておく必要があつたり、フオトレジス
トが途中で浸されてしまつたり、またはがれたり
することが多く薄膜のものの製造は容易でなかつ
た。
In addition, when using a thin film, it is possible to create a high resistance value, so it is possible to make a small one of about 5KΩ or 10KΩ, but it is not possible to create a shape in advance by printing etc., so it is necessary to create a shape after the film is deposited. The need arises. However, since platinum is very stable,
In ordinary chemical etching, it is necessary to immerse the photoresist in the etching solution for a long time, and the photoresist is often immersed or peeled off during the process, making it difficult to manufacture thin films. .

したがつて、この発明の目的は、金属薄膜を用
いた感温抵抗器を安価でかつ容易に製造すること
ができる感温抵抗器の製造方法を提供することで
ある。
Therefore, an object of the present invention is to provide a method for manufacturing a temperature-sensitive resistor that can be manufactured easily and inexpensively using a metal thin film.

この発明の一実施例を第1図ないし第4図に基
づいて説明する。すなわち、この感温抵抗器の製
造方法は、第1図に示すように、まず銅ニツケル
箔(銅ニツケル一種,銅:ニツケル=45:55,厚
み20μm)を化学エツチング法により加工して取
出電極形成部1a,1bおよびジグザグ状の抵抗
体形成部1cを有する基材1を作成する。この場
合、抵抗体形成部1cの幅と抵抗体形成部1c間
の溝の幅をそれぞれ50μm,30μmとしたのでエ
ツチング法を採用したが、もつと幅をひろく、例
えば300μm程度であるならば金型による打抜き
法によつても、基材1を作成することが可能であ
る。
An embodiment of the present invention will be described based on FIGS. 1 to 4. In other words, as shown in Figure 1, the manufacturing method for this temperature-sensitive resistor is to first process a copper-nickel foil (a type of copper-nickel, copper:nickel = 45:55, thickness 20 μm) using a chemical etching method to form an extraction electrode. A base material 1 having forming portions 1a and 1b and a zigzag resistor forming portion 1c is created. In this case, the etching method was adopted because the width of the resistor forming part 1c and the width of the groove between the resistor forming parts 1c were set to 50 μm and 30 μm, respectively. It is also possible to create the base material 1 by a punching method using a die.

つぎに、基材1をめつき液中に浸漬して白金薄
膜2を無電解めつき法により基材1の表面に析出
させる。この場合、処理温度は40〜60℃で、約60
分で厚さ1μmの白金薄膜2が得られる。基材1
には、取出電極部1a,1bおよび抵抗体形成部
1cがあるため、白金薄膜2にも同寸法の取出電
極部2a,2bおよび抵抗体部2cが形成され
る。なお、基材1への白金薄膜2の付着形成は、
上記の湿式めつき法以外にいわゆる乾式めつき
法、例えば真空蒸着法、スパツタリング法によつ
ても可能である。
Next, the base material 1 is immersed in a plating solution, and a platinum thin film 2 is deposited on the surface of the base material 1 by electroless plating. In this case, the processing temperature is 40-60℃, about 60℃
A platinum thin film 2 with a thickness of 1 μm is obtained in minutes. Base material 1
Since there are the extraction electrode parts 1a, 1b and the resistor forming part 1c, the platinum thin film 2 also has the extraction electrode parts 2a, 2b and the resistor part 2c of the same dimensions. Note that the formation of adhesion of the platinum thin film 2 on the base material 1 is as follows:
In addition to the above-mentioned wet plating method, a so-called dry plating method such as a vacuum evaporation method or a sputtering method may also be used.

つぎに、第2図に示すように、基材1に付着形
成した白金薄膜2をアルミナ製の絶縁基板3に、
耐熱性の十分なシリコン樹脂4を用いて基材1が
外側になるように接着する。なお、さらに高い耐
熱性を必要するときは、シリコン樹脂4に代え
て、シリケート系等の無機接着剤(登録商標:ア
ロンセラミツク等)も使用可能である。また、絶
縁基板3としては、アルミナ以外に、フオルステ
ライト,ムライト磁器等を使用してもよい。ま
た、特に熱伝導性を良好にする目的の場合はベリ
リア磁器を使用することも可能である。
Next, as shown in FIG. 2, the platinum thin film 2 deposited on the base material 1 is placed on an insulating substrate 3 made of alumina.
The base material 1 is bonded to the outside using a silicone resin 4 having sufficient heat resistance. Note that when higher heat resistance is required, an inorganic adhesive such as a silicate adhesive (registered trademark: Aron Ceramic, etc.) can be used in place of the silicone resin 4. Further, as the insulating substrate 3, forsterite, mullite ceramic, etc. may be used in addition to alumina. In addition, beryllia porcelain can also be used especially for the purpose of improving thermal conductivity.

つぎに、上記作成物を36〜42重ボーメ度の塩化
第2鉄溶液の中に浸漬して第3図に示すように基
材1を溶解除去する。それにより、白金薄膜2が
抵抗体部2cおよび取出電極部2a,2bを有し
て露出する。これを感温抵抗体とする。
Next, the above-mentioned product is immersed in a ferric chloride solution of 36 to 42 degrees Baume to dissolve and remove the base material 1 as shown in FIG. Thereby, the platinum thin film 2 is exposed including the resistor portion 2c and the lead electrode portions 2a and 2b. This is used as a temperature-sensitive resistor.

つぎに、第4図に示すように、白金薄膜2の取
出電極部分2a,2bに電極引出線5a,5bを
溶接により接続する。なお、電極引出線5a,5
bの接続は、はんだ付,導電接着材による接着も
可能である。
Next, as shown in FIG. 4, electrode lead wires 5a and 5b are connected to the lead electrode portions 2a and 2b of the platinum thin film 2 by welding. Note that the electrode lead wires 5a, 5
The connection b can also be made by soldering or bonding with a conductive adhesive.

つぎに、絶縁基板3および白金薄膜2の表面に
エポキシ樹脂よりなる保護皮膜6を塗装して感温
抵抗器の製造を完了する。なお、保護皮膜6とし
ては、エポキシ樹脂に代えて、シリコン樹脂等の
有機塗料のほか、無機系の塗料を使用することも
できる。
Next, a protective film 6 made of epoxy resin is applied to the surfaces of the insulating substrate 3 and the platinum thin film 2 to complete the manufacture of the temperature-sensitive resistor. Note that as the protective film 6, in place of the epoxy resin, in addition to organic paints such as silicone resins, inorganic paints can also be used.

このようにして製造された感温抵抗器は、第5
図に示すような感温抵抗特性を有し、第6図に示
すような高温放置特性(条件:350℃大気中放
置)を有し、第7図に示すような高温負荷特性
(条件:70℃;0.25W,1.5時間オン,0.5時間オ
フ;100Ω,3800ppm/℃)を有し、第8図に示
すような耐湿負荷特性(条件:40℃,95%RH;
0.25W 1.5時間オン,0.5時間オフ;100Ω,
3800ppm/℃)を有していた。
The temperature-sensitive resistor manufactured in this way has a fifth
It has the temperature-sensitive resistance characteristics as shown in the figure, the high-temperature storage characteristics as shown in Figure 6 (conditions: 350℃ left in the atmosphere), and the high-temperature load characteristics as shown in Figure 7 (conditions: 70°C). ℃; 0.25W, 1.5 hours on, 0.5 hours off; 100Ω, 3800ppm/℃), and has humidity load characteristics as shown in Figure 8 (conditions: 40℃, 95%RH;
0.25W 1.5 hours on, 0.5 hours off; 100Ω,
3800ppm/℃).

また、この感温抵抗器はつぎのような特徴を有
する。
Furthermore, this temperature-sensitive resistor has the following features.

(1) 静止状態における抵抗値のばらつきが小さ
く、また動作状態における抵抗値のばらつきも
小さいため、指示温度の誤差が小さい。
(1) The variation in resistance value in the static state is small, and the variation in resistance value in the operating state is also small, so the error in the indicated temperature is small.

(2) 温度変化に対して電気抵抗が直線変化する。(2) Electrical resistance changes linearly with temperature changes.

(3) 安定性が高い。(3) High stability.

(4) 形状が小さく、抵抗値の高いものが作成でき
る。
(4) Small shapes and high resistance values can be created.

(5) 振動,衝撃により変化の起こりにくい構造を
もつ。
(5) Has a structure that is unlikely to change due to vibration or impact.

この実施例の感温抵抗器の製造方法は、つぎの
ような効果を有する。
The method of manufacturing a temperature sensitive resistor of this embodiment has the following effects.

(A) 従来より使用されているスパイラルカツテイ
ング等の溝切方法がつかいにくく、エツチング
しにくく、かつリフトオフ法等によつてもパタ
ーン形成しにくい白金等の金属薄膜を用いた感
温抵抗器を安価でかつ容易に大量に作ることが
できる。
(A) Temperature-sensitive resistors using thin metal films such as platinum that are difficult to use with conventionally used groove cutting methods such as spiral cutting, difficult to etch, and difficult to form patterns even with lift-off methods. It is inexpensive and can be easily produced in large quantities.

(B) 小形,軽量の感温抵抗器を作ることができ
る。
(B) A small and lightweight temperature-sensitive resistor can be made.

(C) 耐振動,耐衝撃性の強い感温抵抗器を作るこ
とができる。
(C) It is possible to make a temperature-sensitive resistor with strong vibration and shock resistance.

(D) 精度が高く、安定で、互換性のある感温抵抗
器を作ることができる。
(D) Highly accurate, stable, and compatible temperature-sensitive resistors can be made.

なお、実施例では、基材1として銅ニツケル
一種箔を使用し、感温抵抗薄膜に白金薄膜2を
使用したが、これに限らず基材1に銅箔を使用
するとともに感温抵抗薄膜にニツケル膜等を使
用する等、種々の組合せも可能である。
In the example, a copper-nickel type foil was used as the base material 1, and a platinum thin film 2 was used as the temperature-sensitive resistor thin film, but the present invention is not limited to this. Various combinations are also possible, such as using a nickel film or the like.

以上のように、この発明の感温抵抗器の製造方
法は、所定の形状に加工した金属板にこの金属板
と異なる種類の金属をめつきして感温抵抗薄膜を
形成する工程と、前記金属板に形成した感温抵抗
薄膜を絶縁基板に前記金属板が外側になるように
接着する工程と、前記金属板を溶解除去する工程
とを含むので、金属薄膜を用いた感温抵抗器を安
価でかつ容易に製造することができるという効果
がある。
As described above, the method for manufacturing a temperature-sensitive resistor of the present invention includes the steps of plating a metal plate processed into a predetermined shape with a metal of a different type from the metal plate to form a temperature-sensitive resistor thin film; The method includes the steps of bonding a temperature-sensitive resistor thin film formed on a metal plate to an insulating substrate so that the metal plate is on the outside, and dissolving and removing the metal plate. It has the advantage of being inexpensive and easy to manufacture.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図ないし第4図はそれぞれこの発明の一実
施例を説明するための斜視図、第5図は得られた
感温抵抗器の温度抵抗特性図、第6図は同じく高
温放置特性図、第7図は同じく高温負荷特性図、
第8図は同じく耐湿負荷特性図である。 1……基材(金属板)、2……白金薄膜(感温
抵抗薄膜)、3……絶縁基板、4……シリコン樹
脂。
1 to 4 are respectively perspective views for explaining one embodiment of the present invention, FIG. 5 is a temperature resistance characteristic diagram of the obtained temperature sensitive resistor, and FIG. 6 is a high temperature storage characteristic diagram, Figure 7 is also a high temperature load characteristic diagram.
FIG. 8 is also a diagram of moisture resistance load characteristics. 1... Base material (metal plate), 2... Platinum thin film (temperature sensitive resistance thin film), 3... Insulating substrate, 4... Silicone resin.

Claims (1)

【特許請求の範囲】[Claims] 1 所定の形状に加工した金属板にこの金属板と
異なる種類の金属をめつきして感温抵抗薄膜を形
成する工程と、前記金属板に形成した感温抵抗薄
膜を絶縁基板に前記金属板が外側になるように接
着する工程と、前記金属板を溶解除去する工程と
を含む感温抵抗器の製造方法。
1. A step of plating a metal plate processed into a predetermined shape with a metal of a different type from the metal plate to form a temperature-sensitive resistive thin film, and a step of plating the temperature-sensitive resistive thin film formed on the metal plate onto an insulating substrate. A method for manufacturing a temperature-sensitive resistor, comprising the steps of: adhering the metal plate so that the metal plate is on the outside; and melting and removing the metal plate.
JP56001681A 1981-01-08 1981-01-08 Method of producing temperature sensitive resistor Granted JPS57115803A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56001681A JPS57115803A (en) 1981-01-08 1981-01-08 Method of producing temperature sensitive resistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56001681A JPS57115803A (en) 1981-01-08 1981-01-08 Method of producing temperature sensitive resistor

Publications (2)

Publication Number Publication Date
JPS57115803A JPS57115803A (en) 1982-07-19
JPS6258521B2 true JPS6258521B2 (en) 1987-12-07

Family

ID=11508247

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56001681A Granted JPS57115803A (en) 1981-01-08 1981-01-08 Method of producing temperature sensitive resistor

Country Status (1)

Country Link
JP (1) JPS57115803A (en)

Also Published As

Publication number Publication date
JPS57115803A (en) 1982-07-19

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