JPS6258455U - - Google Patents
Info
- Publication number
- JPS6258455U JPS6258455U JP1985081409U JP8140985U JPS6258455U JP S6258455 U JPS6258455 U JP S6258455U JP 1985081409 U JP1985081409 U JP 1985081409U JP 8140985 U JP8140985 U JP 8140985U JP S6258455 U JPS6258455 U JP S6258455U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- mask
- hook
- flail
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012528 membrane Substances 0.000 claims description 2
- 239000003566 sealing material Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985081409U JPS6323704Y2 (enExample) | 1985-05-30 | 1985-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985081409U JPS6323704Y2 (enExample) | 1985-05-30 | 1985-05-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6258455U true JPS6258455U (enExample) | 1987-04-11 |
| JPS6323704Y2 JPS6323704Y2 (enExample) | 1988-06-29 |
Family
ID=30933117
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985081409U Expired JPS6323704Y2 (enExample) | 1985-05-30 | 1985-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6323704Y2 (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012022129A (ja) * | 2010-07-14 | 2012-02-02 | Toppan Printing Co Ltd | ペリクルのフォトマスクへの取り付け構造 |
| JP2014211591A (ja) * | 2013-04-22 | 2014-11-13 | 信越化学工業株式会社 | ペリクルおよびこのペリクルを装着するフォトマスク |
| JP2017083791A (ja) * | 2015-10-30 | 2017-05-18 | 三井化学株式会社 | ペリクル、ペリクルの製造方法及びペリクルを用いた露光方法 |
| JP2024111212A (ja) * | 2014-11-17 | 2024-08-16 | エーエスエムエル ネザーランズ ビー．ブイ． | マスクアセンブリ |
-
1985
- 1985-05-30 JP JP1985081409U patent/JPS6323704Y2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012022129A (ja) * | 2010-07-14 | 2012-02-02 | Toppan Printing Co Ltd | ペリクルのフォトマスクへの取り付け構造 |
| JP2014211591A (ja) * | 2013-04-22 | 2014-11-13 | 信越化学工業株式会社 | ペリクルおよびこのペリクルを装着するフォトマスク |
| JP2024111212A (ja) * | 2014-11-17 | 2024-08-16 | エーエスエムエル ネザーランズ ビー．ブイ． | マスクアセンブリ |
| JP2017083791A (ja) * | 2015-10-30 | 2017-05-18 | 三井化学株式会社 | ペリクル、ペリクルの製造方法及びペリクルを用いた露光方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6323704Y2 (enExample) | 1988-06-29 |