JPS6258037U - - Google Patents
Info
- Publication number
- JPS6258037U JPS6258037U JP15033885U JP15033885U JPS6258037U JP S6258037 U JPS6258037 U JP S6258037U JP 15033885 U JP15033885 U JP 15033885U JP 15033885 U JP15033885 U JP 15033885U JP S6258037 U JPS6258037 U JP S6258037U
- Authority
- JP
- Japan
- Prior art keywords
- container
- sprayed
- chemical solution
- upper nozzle
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
- 239000000463 material Substances 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Nozzles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15033885U JPS6258037U (fr) | 1985-09-30 | 1985-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15033885U JPS6258037U (fr) | 1985-09-30 | 1985-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6258037U true JPS6258037U (fr) | 1987-04-10 |
Family
ID=31066390
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15033885U Pending JPS6258037U (fr) | 1985-09-30 | 1985-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6258037U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4707223B2 (ja) * | 2000-12-13 | 2011-06-22 | Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 | 石英ベルジャー洗浄乾燥機及び石英ベルジャーの洗浄乾燥方法 |
-
1985
- 1985-09-30 JP JP15033885U patent/JPS6258037U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4707223B2 (ja) * | 2000-12-13 | 2011-06-22 | Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 | 石英ベルジャー洗浄乾燥機及び石英ベルジャーの洗浄乾燥方法 |