JPH02146429U - - Google Patents
Info
- Publication number
- JPH02146429U JPH02146429U JP5666089U JP5666089U JPH02146429U JP H02146429 U JPH02146429 U JP H02146429U JP 5666089 U JP5666089 U JP 5666089U JP 5666089 U JP5666089 U JP 5666089U JP H02146429 U JPH02146429 U JP H02146429U
- Authority
- JP
- Japan
- Prior art keywords
- rotating shaft
- solution
- solution supply
- spray nozzle
- supply pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007921 spray Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000004528 spin coating Methods 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5666089U JPH02146429U (fr) | 1989-05-16 | 1989-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5666089U JPH02146429U (fr) | 1989-05-16 | 1989-05-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02146429U true JPH02146429U (fr) | 1990-12-12 |
Family
ID=31580680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5666089U Pending JPH02146429U (fr) | 1989-05-16 | 1989-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02146429U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002143750A (ja) * | 2000-11-13 | 2002-05-21 | Honda Lock Mfg Co Ltd | 車両用ミラーのコーティング装置および方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58100425A (ja) * | 1981-12-11 | 1983-06-15 | Hitachi Ltd | ウエハ両面のレジスト膜均一塗布装置 |
| JPS63240967A (ja) * | 1988-03-03 | 1988-10-06 | Toray Ind Inc | スピンコート装置 |
-
1989
- 1989-05-16 JP JP5666089U patent/JPH02146429U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58100425A (ja) * | 1981-12-11 | 1983-06-15 | Hitachi Ltd | ウエハ両面のレジスト膜均一塗布装置 |
| JPS63240967A (ja) * | 1988-03-03 | 1988-10-06 | Toray Ind Inc | スピンコート装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002143750A (ja) * | 2000-11-13 | 2002-05-21 | Honda Lock Mfg Co Ltd | 車両用ミラーのコーティング装置および方法 |