JPS6257226A - Pickup mechanism - Google Patents

Pickup mechanism

Info

Publication number
JPS6257226A
JPS6257226A JP60195744A JP19574485A JPS6257226A JP S6257226 A JPS6257226 A JP S6257226A JP 60195744 A JP60195744 A JP 60195744A JP 19574485 A JP19574485 A JP 19574485A JP S6257226 A JPS6257226 A JP S6257226A
Authority
JP
Japan
Prior art keywords
pickups
lsi
pickup
conveyed
chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60195744A
Other languages
Japanese (ja)
Inventor
Hideki Miyazaki
英機 宮崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP60195744A priority Critical patent/JPS6257226A/en
Publication of JPS6257226A publication Critical patent/JPS6257226A/en
Pending legal-status Critical Current

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  • Manipulator (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • De-Stacking Of Articles (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)

Abstract

PURPOSE:To respond to the change in kinds of materials immediately, by sucking and conveying a material to be conveyed with two pickups in the normal operation, and sucking and conveying a small material to be conveyed by operating only any one of the pickups. CONSTITUTION:When an LSI chip to be conveyed is large, a control part 16 uses both pickups 4 and 5. Therefore both solenoid valves 11 and 12 are driven. Namely, the pickups 4 and 5 are moved to a positioning part, where an LSI chip 21 is placed, by the movement of a mounting head 18. The pickups are moved and lowered so that the intermediate central position is brought to the approximately central part of the LSI chip 21. The pickups 4 and 5 are contacted with the LSI 21. Then the solenoid valves 11 and 12 are turned ON under the instruction of the control part 16. The pickups 4 and 5 are communicated to a vacuum source 15. The LSI 21 is sucked owing to the pressure reduction. The LSI 21 is pushed to a specified position on a substrate with the movement of the mounting head 18. When the change in kinds of the chips is instructed, the control part 16 turns OFF the solenoid valve 12 and the pickup 5 is released to free air. Only the solenoid valve 11 is turned ON and OFF, and the pickup 4 is operated. Thus the chip is conveyed.

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明は各種寸法の小形部品を取扱うのに好適なピック
アップ機構に関する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a pickup mechanism suitable for handling small parts of various sizes.

〔発明の′技術的背景とその問題点〕[Technical background of the invention and its problems]

半導体装置の組立1穐においては種々な組立装置があり
、例えばLSIチップを基板に接着するマウンターとか
、リードフレームに接着するダイボンダーなどが知られ
ている。これらの組立装置においては、減圧によりLS
Iチップを吸着保持するピックアップ機構が用いられて
いる。しかしこれらLSIは常時同一寸法のものが組立
られていれば問題はないが、近時は多種少量生産となり
しばしば品種が変わることがある。このようなときは、
ピックアップ機構の直接部品を保持する管体からなるピ
ックアップは、LSIの種類に応じて交換する必要があ
るうこの交換には最も簡単な手段として作業者が所望の
ピックアップを取シに行き交換する方法とか、各種ピッ
クアップを並べておき、自動で所望のものと交換するツ
ールチェンジャーを有するものとか、タレットヘッドを
備えていて、タレットの回転によシ所望のヘッドが用意
されるものなど種々な手段がある。しかるに作業者によ
る方法は能率が悪く、面倒であシ、ツールチェンジャー
を有するものは品種の交換が頻繁な場合は時間の損失が
大である。まだタレットを有するものは非常に高価であ
るという欠点がある。
There are various types of assembly equipment for assembling semiconductor devices, such as a mounter for bonding an LSI chip to a substrate, a die bonder for bonding it to a lead frame, and the like. In these assembly devices, the LS
A pickup mechanism is used that attracts and holds the I-chip. However, if these LSIs are always assembled with the same dimensions, there will be no problem, but recently they have been produced in small quantities of many different types, and the types often change. In times like this,
The pickup, which is a tubular body that holds the direct parts of the pickup mechanism, needs to be replaced depending on the type of LSI.The easiest way to replace the pickup is for the operator to go to the desired pickup and replace it. There are various methods, such as a tool changer that arranges various pickups and automatically replaces them with the desired one, and a tool that is equipped with a turret head and the desired head is prepared by the rotation of the turret. . However, the method performed by an operator is inefficient and troublesome, and those equipped with a tool changer result in a large loss of time if the tool type is frequently replaced. Still the disadvantage is that those with turrets are very expensive.

〔発明の目的〕[Purpose of the invention]

本発明は、上述の不都合を解決するためになさhたもの
で、品種の交換に即座に対応でき、シフ5葛も構成の簡
単なピックアップ機構を提供することを目的とする0 〔発明の概要〕 本発明は、移動自在なピックアップ本体に、2個のピッ
クアップC管体)を増付け、このピックアップをそれぞ
れ別個に吸着、釈放するように構成し、通常は2個のピ
ックアップで被搬送物を吸着搬送し、小形の被搬送物に
対してはいずれか一方のピックアップだけを作動させて
吸着・搬送するよってし、品種変更などに即時対応でき
るようKしたピックアップ機構である0 〔発明の実施例〕 以下、本発明の詳細を第1図〜第3図に示す一実施例て
よシ説明する。なお本実施例はLSIチップ、例えば−
辺が2朋〜8朋位のものを基板に接着するマウンターに
取付けられたものである。
The present invention has been made to solve the above-mentioned disadvantages, and an object of the present invention is to provide a pick-up mechanism that can immediately respond to the change of product types and has a simple configuration. ] In the present invention, two pickups (C tube bodies) are added to a movable pickup main body, and the pickups are configured to be attracted and released separately. Normally, two pickups are used to pick up and release objects. This pickup mechanism is designed to be able to immediately respond to changes in product types by suctioning and conveying small objects and operating only one of the pickups to suction and convey small objects.[Embodiment of the Invention] ] The details of the present invention will be explained below with reference to an embodiment shown in FIGS. 1 to 3. Note that this embodiment uses an LSI chip, for example -
It is attached to a mounter that adheres items with sides of about 2 to 8 inches to a board.

(1)は角ブロックからなる本体で、上面から下面に貫
通した2個の吸排孔(2) 、 (3)が設けられてい
る。
(1) is a main body consisting of a square block, and two suction/exhaust holes (2) and (3) penetrating from the top surface to the bottom surface are provided.

この上面開口および下面開口は上面、下面のほぼ対角線
上に互に離間して位置していて、下面開口にはそれぞれ
管体からなるピックアップ(4) 、 (5)が突出固
定されておシ、その套出長さは同じになっていて、下方
の一端部は大気に開放されて、上方の他端部は吸排孔(
2) 、 (3)に気密に連通している。
The upper surface opening and the lower surface opening are located substantially diagonally apart from each other on the upper surface and the lower surface, and pick-ups (4) and (5) each consisting of a tube are protruded and fixed to the lower surface opening, The length of the protrusion is the same, one lower end is open to the atmosphere, and the other upper end has a suction and exhaust hole (
2) and (3) are airtightly connected.

吸排孔(2) 、、(3)の上面開口には接手(6) 
、 (7)が取付けられていて、これらにゴムなどから
なる可撓性の導管(8) 、 (9)の一端側が接続さ
れている。また、これら導管(8) 、 (9)の他端
側にはそれぞれ別個に電磁弁aυ、Q3の第1の開口が
接続されていて、これら電磁弁−,a乃の第2の開口は
それぞれ真空源α喝に接続され、第3の開口はそれぞれ
大気に開放されている。すなわちこれら電磁弁−,α2
はON、OFFの切換えによりピックアップ(4) 、
 (5)の開口を真空源α5または大気に交互にそれぞ
れ別個に連通させることかできる。aOは制御部で、電
磁弁(11) 、 (13のON 、 OFF切換えを
制御するもので、この実施例のピックアップ機構が取付
けられている主装置(マウンター)からの信号によシ行
なわれる。Q8)は主装置のマウントヘッドで図示しな
いXYテーブル上に取付けられて、水平方向、上下方向
に駆動される。そして取付は案内溝翰に本体(1)が上
下方向位置調節可能に取付けられている。また電磁弁α
BCl2+、真空源(l[有]、制御部(Iυなどは主
装置の固定部に取付けられている。
There are joints (6) on the top openings of the suction and exhaust holes (2), (3).
, (7) are attached, and one ends of flexible conduits (8), (9) made of rubber or the like are connected to these. In addition, the first openings of solenoid valves aυ and Q3 are connected to the other ends of these conduits (8) and (9), respectively, and the second openings of these solenoid valves - and ano are respectively connected. It is connected to a vacuum source α, and each third opening is open to the atmosphere. In other words, these solenoid valves −, α2
is picked up by switching ON and OFF (4),
The openings in (5) can be alternately and separately communicated with the vacuum source α5 or the atmosphere. aO is a control unit that controls ON/OFF switching of the electromagnetic valves (11) and (13), and is controlled by a signal from the main device (mounter) to which the pickup mechanism of this embodiment is attached. Q8) is mounted on an XY table (not shown) by the mount head of the main device, and is driven horizontally and vertically. The main body (1) is attached to the guide groove so that its position in the vertical direction can be adjusted. Also, solenoid valve α
BCl2+, vacuum source (I), control unit (Iυ, etc.) are attached to the fixed part of the main device.

次に本実施例の作用につき説明する。搬送すべきLSI
チップが大形、例えば縦8關×横8關とすると、主装置
からの信号により制御部−は両ピックアップ(4) 、
 (5)を使用するため、両電磁弁αυ。
Next, the operation of this embodiment will be explained. LSI to be transported
If the chip is large, for example, 8 vertically x 8 horizontally, the control section will pick up both pickups (4) according to the signal from the main device.
(5), both solenoid valves αυ.

aのを駆動する。すなわちマウントヘッドQ秒の移動に
より、LSIチップ01)が置かれている位置決め部(
図示しない)にピックアップ(4) 、 (5)は移動
しこれらの中間中心位置がLSIチップ(21)のほぼ
中心に来るように搬送されて下降し、ピックアップ(4
) 、 (5)はLSIQυに当接する。次に制御部α
Qの指令によシミ磁弁Ql) 、 (12がONシ、真
空源a9とピックアップ(4) 、 (5)が連通して
減圧によシ、LSI(2υは吸着され、マウントヘッド
錦の移動により基板上の所定位置にLSI@l)は押圧
される0そして制御部αeが電磁弁aη、 t17Jを
OFF’すると、ピックアップ(41、(5)が大気に
連通し、LSI(21)は釈放される。
Drive a. In other words, by moving the mount head for Q seconds, the positioning part (
The pickups (4) and (5) are moved to the LSI chip (not shown) and are transported so that their intermediate center position is almost at the center of the LSI chip (21), and then lowered to the pickup (4).
) and (5) contact LSIQυ. Next, control section α
According to the command of Q, the stain magnetic valve Ql), (12 is turned on, the vacuum source a9 and the pickups (4) and (5) are connected to reduce the pressure, the LSI (2υ) is attracted, and the mount head brocade is moved. 0, the LSI@l) is pressed to a predetermined position on the board by be done.

次に主装置力)らの指令によシ、品種の切換えが指令さ
れると、今度は小形のLSI(33(第3図参照)の搬
送に切換える。すなわち制御部αeは電磁弁aのをOF
F l、、ピックアップ(5)を大気に開放したままと
し、電磁弁αBのみ上述の場合と同様にON。
Next, when a command is issued from the main equipment to change the product type, the controller αe switches to transporting a small LSI (33 (see Figure 3)).In other words, the controller αe controls the solenoid valve a OF
Fl. Leave the pickup (5) open to the atmosphere, and turn on only the solenoid valve αB as in the above case.

OFF L、てピックアップ(4)を作動させて搬送す
る。
OFF L, operate the pickup (4) and transport.

この際は一方のピックアップ(4)をLSI(22の中
心に合わせることが望ましい。
At this time, it is desirable to align one pickup (4) with the center of the LSI (22).

なお、本実施例においては同じ内径のピックアップにつ
き述べたが、一方の内径を上述の場合よ)大に、他方の
内径を小に形成してもよく、この場合はLSIのピック
アップ可能の範囲を広げることができる。また被搬送物
がLSIの場合につき述べたが、テープレコーダのへラ
ドチップやVTRのへラドチップや各種チップ部品の搬
送に適用してもよhし、吸着可能ならば多品種の部品を
用いるテレビ組立ラインなどの部品搬送に用いてもよい
Although this embodiment describes pickups with the same inner diameter, one inner diameter may be made larger (as in the case described above) and the other inner diameter may be made smaller. In this case, the pick-up range of the LSI may be reduced. Can be expanded. In addition, although we have described the case where the transported object is an LSI, it can also be applied to transporting Herad chips of tape recorders, Herad chips of VTRs, and various other chip parts.If suction is possible, TV assembly using a wide variety of parts can be applied. It may also be used for transporting parts on a line or the like.

〔発明の効果〕〔Effect of the invention〕

以上詳述したように、本発明のピックアップ機構は、2
個のピックアップを用いて構成したので極めて簡単かつ
安価な構成にもかかわらず、1個または2個のビックア
、ツブを適宜使いわけること1くよシ、ピックアップの
交換なしで極めて広い範囲に寸法の異なる被搬送物を取
扱うことができる。
As detailed above, the pickup mechanism of the present invention has two
Although the configuration is extremely simple and inexpensive because it is constructed using two pickups, it is difficult to use one or two pickups or knobs as appropriate, and it is difficult to adjust the dimensions in an extremely wide range without replacing pickups. Can handle different objects.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明のピックアップ機構の構成図、第2図は
同じく第1図の矢印■方向から見た下面図、第3図は同
じく第1図の要部のみ示し他の使用態様を示す説明図で
ある。 (1)・・・本体、(4)、(5)・・・ピックアップ
、圓、 L12)・・・切換弁、 05)・・・減圧源
。 代理人 弁理士  則 近 憲 佑 同     竹 花 喜久男 第2図
Fig. 1 is a configuration diagram of the pickup mechanism of the present invention, Fig. 2 is a bottom view similarly seen from the arrow ■ direction in Fig. 1, and Fig. 3 similarly shows only the main parts of Fig. 1 and shows another mode of use. It is an explanatory diagram. (1)...Main body, (4), (5)...Pickup, circle, L12)...Switching valve, 05)...Reducing pressure source. Agent Patent Attorney Noriyuki Chika Yudo Kikuo Takehana Figure 2

Claims (2)

【特許請求の範囲】[Claims] (1)移動自在に支持された本体と、管体からなり上記
本体からほぼ同一長さ突出して上記本体に固定され突出
した一端が大気に開放された2個のピックアップと、こ
れらピックアップの他端にそれぞれ別個に連通しピック
アップと減圧源との連通およびこれらピックアップと大
気もしくは高圧源との連通を各ピックアップ毎に別個に
切換える2個の切換弁とを具備したことを特徴とするピ
ックアップ機構。
(1) A movably supported main body, two pickups made of tubular bodies that protrude from the main body by approximately the same length, are fixed to the main body, and have one protruding end open to the atmosphere, and the other ends of these pickups. A pickup mechanism characterized in that the pickup mechanism is equipped with two switching valves that separately communicate with each other to switch communication between the pickup and a reduced pressure source and communication between these pickups and the atmosphere or a high pressure source for each pickup.
(2)2個のピックアップの内径は互に異っていること
を特徴とする特許請求の範囲第1項記載のピックアップ
機構。
(2) The pickup mechanism according to claim 1, wherein the two pickups have different inner diameters.
JP60195744A 1985-09-06 1985-09-06 Pickup mechanism Pending JPS6257226A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60195744A JPS6257226A (en) 1985-09-06 1985-09-06 Pickup mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60195744A JPS6257226A (en) 1985-09-06 1985-09-06 Pickup mechanism

Publications (1)

Publication Number Publication Date
JPS6257226A true JPS6257226A (en) 1987-03-12

Family

ID=16346244

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60195744A Pending JPS6257226A (en) 1985-09-06 1985-09-06 Pickup mechanism

Country Status (1)

Country Link
JP (1) JPS6257226A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS639200U (en) * 1986-07-05 1988-01-21
JPH0227882U (en) * 1988-08-08 1990-02-22
JPH02185387A (en) * 1989-01-11 1990-07-19 Aloka Co Ltd Transfer device for bead
JPH02209331A (en) * 1989-02-10 1990-08-20 Kokusai Electric Co Ltd Wafer suction holder
JPH0438390U (en) * 1990-07-27 1992-03-31
KR100463760B1 (en) * 2002-12-10 2004-12-29 한미반도체 주식회사 Semiconductor package loading apparatus

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS639200U (en) * 1986-07-05 1988-01-21
JPH0227882U (en) * 1988-08-08 1990-02-22
JPH02185387A (en) * 1989-01-11 1990-07-19 Aloka Co Ltd Transfer device for bead
JPH02209331A (en) * 1989-02-10 1990-08-20 Kokusai Electric Co Ltd Wafer suction holder
JPH0438390U (en) * 1990-07-27 1992-03-31
KR100463760B1 (en) * 2002-12-10 2004-12-29 한미반도체 주식회사 Semiconductor package loading apparatus

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