JPS6255692B2 - - Google Patents

Info

Publication number
JPS6255692B2
JPS6255692B2 JP53015396A JP1539678A JPS6255692B2 JP S6255692 B2 JPS6255692 B2 JP S6255692B2 JP 53015396 A JP53015396 A JP 53015396A JP 1539678 A JP1539678 A JP 1539678A JP S6255692 B2 JPS6255692 B2 JP S6255692B2
Authority
JP
Japan
Prior art keywords
etching
gas
aluminum
chlorine
boron trichloride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53015396A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54109387A (en
Inventor
Tatsumi Mizutani
Hideo Komatsu
Shinya Iida
Yukyoshi Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1539678A priority Critical patent/JPS54109387A/ja
Publication of JPS54109387A publication Critical patent/JPS54109387A/ja
Publication of JPS6255692B2 publication Critical patent/JPS6255692B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP1539678A 1978-02-15 1978-02-15 Etching method Granted JPS54109387A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1539678A JPS54109387A (en) 1978-02-15 1978-02-15 Etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1539678A JPS54109387A (en) 1978-02-15 1978-02-15 Etching method

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP19051786A Division JPS6254441A (ja) 1986-08-15 1986-08-15 エツチング装置

Publications (2)

Publication Number Publication Date
JPS54109387A JPS54109387A (en) 1979-08-27
JPS6255692B2 true JPS6255692B2 (enExample) 1987-11-20

Family

ID=11887562

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1539678A Granted JPS54109387A (en) 1978-02-15 1978-02-15 Etching method

Country Status (1)

Country Link
JP (1) JPS54109387A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4310380A (en) * 1980-04-07 1982-01-12 Bell Telephone Laboratories, Incorporated Plasma etching of silicon
US4412885A (en) * 1982-11-03 1983-11-01 Applied Materials, Inc. Materials and methods for plasma etching of aluminum and aluminum alloys

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50122878A (enExample) * 1974-03-14 1975-09-26
US3994793A (en) * 1975-05-22 1976-11-30 International Business Machines Corporation Reactive ion etching of aluminum
JPS5835364B2 (ja) * 1977-04-07 1983-08-02 富士通株式会社 プラズマエッチング方法

Also Published As

Publication number Publication date
JPS54109387A (en) 1979-08-27

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