JPS6255542A - 光学系検査装置 - Google Patents

光学系検査装置

Info

Publication number
JPS6255542A
JPS6255542A JP19565285A JP19565285A JPS6255542A JP S6255542 A JPS6255542 A JP S6255542A JP 19565285 A JP19565285 A JP 19565285A JP 19565285 A JP19565285 A JP 19565285A JP S6255542 A JPS6255542 A JP S6255542A
Authority
JP
Japan
Prior art keywords
optical system
pinhole
laser light
inspected
pass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19565285A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0471453B2 (fr
Inventor
Taisuke Endo
泰介 遠藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP19565285A priority Critical patent/JPS6255542A/ja
Publication of JPS6255542A publication Critical patent/JPS6255542A/ja
Publication of JPH0471453B2 publication Critical patent/JPH0471453B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Optical Devices Or Fibers (AREA)
JP19565285A 1985-09-04 1985-09-04 光学系検査装置 Granted JPS6255542A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19565285A JPS6255542A (ja) 1985-09-04 1985-09-04 光学系検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19565285A JPS6255542A (ja) 1985-09-04 1985-09-04 光学系検査装置

Publications (2)

Publication Number Publication Date
JPS6255542A true JPS6255542A (ja) 1987-03-11
JPH0471453B2 JPH0471453B2 (fr) 1992-11-13

Family

ID=16344732

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19565285A Granted JPS6255542A (ja) 1985-09-04 1985-09-04 光学系検査装置

Country Status (1)

Country Link
JP (1) JPS6255542A (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100474141B1 (ko) * 2001-07-06 2005-03-08 전자빔기술센터 주식회사 레이저를 이용한 부품의 구멍 정렬방법 및 이를 이용한 부품의 정렬 방법
WO2006033544A1 (fr) * 2004-09-20 2006-03-30 Cebt Co. Ltd. Procede d'alignement de micro-ouvertures de pieces a l'aide du reseau de diffraction d'un laser, et systeme y recourant
CN104807614A (zh) * 2014-01-23 2015-07-29 苏州智华汽车电子有限公司 一种车载摄像头光轴检查机用标定金样品的制作方法
CN107687937A (zh) * 2017-08-10 2018-02-13 苏州精濑光电有限公司 一种准分子激光退火ela制程质量量测方法与系统

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100474141B1 (ko) * 2001-07-06 2005-03-08 전자빔기술센터 주식회사 레이저를 이용한 부품의 구멍 정렬방법 및 이를 이용한 부품의 정렬 방법
WO2006033544A1 (fr) * 2004-09-20 2006-03-30 Cebt Co. Ltd. Procede d'alignement de micro-ouvertures de pieces a l'aide du reseau de diffraction d'un laser, et systeme y recourant
CN104807614A (zh) * 2014-01-23 2015-07-29 苏州智华汽车电子有限公司 一种车载摄像头光轴检查机用标定金样品的制作方法
CN107687937A (zh) * 2017-08-10 2018-02-13 苏州精濑光电有限公司 一种准分子激光退火ela制程质量量测方法与系统
CN107687937B (zh) * 2017-08-10 2020-02-07 苏州精濑光电有限公司 一种准分子激光退火ela制程质量量测方法与系统

Also Published As

Publication number Publication date
JPH0471453B2 (fr) 1992-11-13

Similar Documents

Publication Publication Date Title
US3565568A (en) Method and apparatus for ascertaining geometric deviations from an ideal surface by optical means
JP2002071513A (ja) 液浸系顕微鏡対物レンズ用干渉計および液浸系顕微鏡対物レンズの評価方法
US4281926A (en) Method and means for analyzing sphero-cylindrical optical systems
JPH10311779A (ja) レンズ特性測定装置
US6794625B2 (en) Dynamic automatic focusing method and apparatus using interference patterns
JPH02238338A (ja) レンズ検査装置
JPS60196605A (ja) 散乱光検出光学装置
JPS6255542A (ja) 光学系検査装置
JP2008026049A (ja) フランジ焦点距離測定装置
JPH06508218A (ja) 広い測定範囲を有する偏向型光学装置
JPH11304640A (ja) 光学素子検査装置
KR100738387B1 (ko) 비축 조사에 의한 파면 측정장치
JP2672771B2 (ja) 貫通孔の内径測定装置
JPH01502535A (ja) 円筒物体の光学検査システム
JPS63263412A (ja) 非接触変位計
CN115200471A (zh) 一种用于引线键合机的散斑装置及其控制方法
JP2565496B2 (ja) 被検対象物体の撮像装置
JP2657405B2 (ja) アナモフィックレンズの測定方法
JPS63182547A (ja) 粒子解析装置
JPH01180403A (ja) 微小孔径の測定方法
RU1830500C (ru) Устройство дл обмера следов частиц
JPH10197397A (ja) 非球面形状測定装置及び非球面形状測定方法
JPH03261808A (ja) 微小形状測定装置
JPS61120912A (ja) 距離測定装置
JP2008026048A (ja) フランジ焦点距離測定装置