JPS6254217A - Picture shifting device - Google Patents

Abstract

PURPOSE:To miniaturize the device and to improve the highly speedy response by arranging regularly the deflecting element in the direction orthogonal essentially with the shaft of the turning. CONSTITUTION:When the voltage is not impressed between an upper electrode 2 and a lower electrode 16, the light flux made incident from upward in the Z direction is reflected from the upper surface of an upper electrode 2 and proceeded to upward in the Z direction. Consequently, the light flux does not come out in the upward direction of the device. On the other hand, when the suitable voltage is impressed between the upper electrode 2 and the lower electrode 16, the upper electrode 2 is rotated by about 45 deg. around the Y direction with a hinge part 4 as a shaft. Thus, when all deflecting elements are ON, after the light flux made incident from upward in the Z direction is reflected by the upper surface of the upper electrode 2, the flux is reflected by the lower surface of the upper electrode 2 to proceed and adjoin in the X direction and proceeded to downward in the Z direction.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an image shifting device. An image shifting device is used in an optical system and has the function of shifting a light beam carrying image information.

[Conventional technology]

Image shifting devices commonly used in the past include parallel plates, mirrors, and! There are those that shift the luminous flux by mechanically driving optical components such as rhythm and lenses, and those that combine an electro-optic crystal and birefringent material to separate ordinary and extraordinary rays. Something that did this was used.

FIG. 9 is a diagram showing a schematic configuration of a two-dimensional image shifting device using parallel plates.

In the figure, 52 is an input image, 54 is an imaging lens, 56 is a first light-transmitting parallel plate, and 58 is a drive for rotating the parallel plate around an axis in the Y direction. 60 is a second light-transmitting parallel flat plate, 62 is a drive motor for rotating the parallel flat plate around the X direction, and 64 is a two-dimensional light receiving element array. The light emitted from one point of the input image @52 is focused by the imaging lens 54 and then focused by the first and second parallel plates 56.
．． 60 and is imaged onto a light receiving element array 64. This image formation position differs depending on the rotational positions of the first and second parallel plates. That is, for the same incident light flux 68 of mK% shown in Figure 10, the image formation position on the light receiving element array 72 changes as shown by the solid line and dotted line depending on the inclination of the parallel plate 70. In the device shown in Figure 9, the first
When the parallel plate 56 is rotated at an appropriate angle around the axis in the Y direction and the second parallel plate 60 is rotated at an appropriate angle around the X axis, an arbitrary position on the light receiving element array 64 can be obtained from K. It is possible to form an image.

Diagram Ml1 is a diagram showing a schematic configuration of an image shift device using an electro-optic crystal and a birefringent material.

Figure Nioite, 74 HaBSO, , LiNb0I1, KD
First electro-optic crystal such as P, PLZT, 76
．． 78 is a transparent electrode made of ITO or the like attached to both sides of the crystal; 80 is a first birefringent material such as calcite; 82 is a second electro-optic crystal similar to 74;
4.86 is a transparent electrode similar to 76 attached to both sides of the crystal, and 88 is similar to 8o except that the thickness is the same as that of 76.
It is a birefringent material. Thus, the electro-optic crystal of Ml 7
By appropriately adjusting the voltage applied to the crystal, the linearly polarized light 90 incident on the crystal 4 enters the first birefringent material 80 after exiting the crystal and becomes an ordinary ray 92'i or an extraordinary ray [94]. By appropriately adjusting the voltage applied to the crystal, the linearly polarized light that enters the second electro-optic crystal 82 after exiting the material is incident on the second birefringent material 88 after exiting the crystal. Ordinary ray 96 or extraordinary ray 98 and ordinary ray 100
Alternatively, an extraordinary ray 102 is emitted from the material. In this way, by adjusting the voltage applied to the electro-optic crystal 74, 82, the incident light can be shifted, and by making the combination of the electro-optic crystal and the birefringent material more multi-stage, the number of stages of the shift can be increased. It can be further increased.

[Problem that the invention seeks to solve]

However, the image shifting device as shown in FIG. 9 is one in which the image information light beam is shifted all at once by a parallel plate, and the rotation space of the parallel plate must be considerably large. A fairly large drive motor is also required. For this reason, there have been problems in that it is difficult to miniaturize the device, and it is also difficult to increase the operating speed.

In addition, the image shifting device shown in FIG. 11 has the problem of increasing the number of shifting stages, requiring the use of a large amount of material, and making it difficult to miniaturize the device.

[Means for solving problems]

According to the present invention, as a solution to the problems of the prior art as described above, the pages are rotatable in at least one direction based on a drive signal, and at least a portion of both pages are substantially parallel to each other. An image shifting device is provided, characterized in that deflection elements formed on a surface are regularly arranged in a direction substantially perpendicular to the axis of rotation.

〔Example〕

Hereinafter, specific embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a partial plan view showing a first embodiment of the device of the present invention, and FIG. 2 is a cross-sectional view thereof.

In the figure, the upper electrode is made of a 2ii metal film, both surfaces of which are parallel planes and have light reflective properties. The upper electrode 2 has a substantially square shape, and a portion corresponding to the negative side thereof is connected to a conductor 86 for applying a voltage to the electrode 2 via the hinge portion 4. The hinge portion 4 and the conductive wire 6 are made of gold RMII similar to the electrode 2. conductivity 8
6 is formed on the support layer s, and a cavity 10 is formed in the support layer 8 at a portion corresponding to the upper electrode 2.

Therefore, the upper electrode 2 is held by the conductive wire 6 via the hinge portion 4 and extends over the cavity lo. still,
The support layer 8 has light transmittance. Support layer 8 is formed on substrate 12 . A through hole 14 in two directions is formed in a portion of the substrate 12 corresponding to the cavity 10 . Note that a U-shaped lower electrode 16 is provided on the upper surface of the substrate 12 around the opening of the through hole 14 . Although not shown in the figure, a conductive wire for voltage application is connected to the lower electrode 16 similarly to the upper electrode 2 described above. The lower electrode 16 and the conductive wire are made of gold IIKBM similar to the upper electrode 2 described above.

Thus, in this embodiment, the upper electrode 2 and the lower electrode 1
6, the upper electrode 2 can be pulled down by electrostatic force, and thus the upper electrode 2 can rotate around the hinge part 4 in the Y direction. The angle of rotation can be controlled by applied voltage. That is, in this embodiment, the upper electrode 2
constitutes a deflection element.

As shown in the figure, in this embodiment, deflection elements having the same configuration are arranged at equal intervals in the X direction, and the arrangement pitch is P.

The above structure can be tabulated by using a semiconductor substrate and performing treatments such as applying appropriate layers to the substrate or selectively etching it.

Incidentally, the device of this embodiment is manufactured by, for example, R, E, Brooks.
etal, ″Mi*rom@ohkenn1oal lig
ht modulators for data tra
nsf@r and proasasing', 8P
It has a structure similar to the cantilever-type spatial light modulator described in IE 465-28 (1984) and the like.

In this embodiment, as shown in FIG. 2, when no voltage is applied between the upper electrode 2 and the lower electrode 16 (that is, the deflection element is OFF), from above in two directions. The incident light beam is reflected by the upper surface of the upper electrode 2 and travels upward in two directions. Therefore, no light beam is emitted below the device.

On the other hand, when an appropriate voltage is applied between the upper electrode 2 and the lower electrode 16 (that is, the deflection element is ON), the third
As shown in the figure, the upper electrode 2 rotates about 45 degrees around the Y direction about the hinge part 4. When all the deflection elements are ON, the light beams incident from above in two directions are reflected by the upper surface of the upper electrode 2, then proceed in the X direction and are reflected by the lower surface of the adjacent upper electrode 20. It moves downward in two directions. Therefore, the entire luminous flux (image information luminous flux) incident from above the apparatus is shifted in the X direction by P as a whole and is emitted downward from the apparatus.

4 and 5 are schematic partial cross-sectional views showing the state of the deflection element when the image information beam is shifted by 2P in this embodiment.

First, as shown in FIG. 4, by turning on every other deflection element 20b, 20d, . . . of the first group, light is incident on the deflection elements of the first group from above in two directions. The resulting light flux is shifted by 2P in the X direction and is emitted downward.

Next, as shown in FIG. 5, every other deflection element 20m of the second group excluding the deflection element of the first group.

By turning ON only 20c, . . . , the light flux incident on the second group of deflection elements from above in two directions is reduced by 2P
Shift in the direction and fire downward.

Thus, by making the same image information light beam incident twice, an image information light beam shifted in the X direction by 2P can be obtained as a whole.

Similarly, in this example, n-P (n is a positive integer)
In order to shift the image information light beam by 1, the deflection elements of the first group are turned on every (n-1) deflection elements upward in two directions. The luminous flux incident from is shifted in the X direction by n-P and exits downward.

Next, secondly, by turning on only the second group of deflection elements adjacent to the same side of the first group of deflection elements, the second group of deflection elements is turned ON.
The luminous flux incident on the deflection element of the group from above in two directions is n-1.
is shifted in the X direction and emitted downward.

Thereafter, operations up to the nth group of deflection elements are performed in the same manner.

In this way, by making the same image information light beam incident n times, an image information light beam shifted by n4' in the X direction is obtained as a whole.

In the case of such an image shift of 2P or more, the light receiving means for the light flux emitted from the apparatus of this embodiment is preferably of a type that integrates the exposure amount, such as COD.

FIG. 6 is a schematic perspective view showing a second embodiment of the device of the present invention.

The device 22 of this embodiment corresponds to a plurality of devices of the first embodiment described above arranged regularly in the Y direction. In addition, in this embodiment device, the conductive wires 6 connected to the upper electrode 2 and the conductive wires connected to the lower electrode 2 are connected to each other so that the deflection elements located at the same position in the X direction all operate in the same manner. L7 are connected to each other.

According to this embodiment, it is possible to obtain two-dimensional output image information 26 by shifting two-dimensional input image information 24 in the X direction by an appropriate distance (provided that it is an integral multiple of the deflection element arrangement pitch P in the X direction). can.

FIG. 7 is a schematic perspective view showing a third embodiment of the device of the present invention.

The device of this embodiment is the device 22a of the second embodiment.

22b are arranged one on top of the other, orthogonal to each other. In this embodiment, the arrangement pitch in the X direction and the arrangement pitch in the Y direction of each deflection element are equal, and the deflection elements of the superposed devices 22 m and 22 b are located correspondingly.

According to this embodiment, two-dimensional output image information is obtained by shifting the two-dimensional input image information 28 by an appropriate distance in the X direction and an appropriate distance in the Y direction (both are integral multiples of the deflection element array pitch P). You can get @3o.

In this embodiment, nP in the X direction and m in the Y direction.
In order to shift by -P, the same image information light flux is nX
The deflection element may be operated m times.

FIG. 8 is a schematic perspective view showing a fourth embodiment of the device of the present invention.

The device of this embodiment is the device 20a of the third embodiment.

20b and a two-dimensional light-receiving means 32 having a light-receiving element arrangement corresponding to the arrangement of the deflection elements of the device to perform optical calculation processing.

The devices 20m and 20bii are driven by the X-Y shift control circuit 3'4, and thus the input image information 36 is two-dimensionally shifted by an appropriate distance and enters the light receiving means 32.

The output of the light receiving means 32 is inputted to an arithmetic processing circuit 38, and the output of the light receiving means 32 is inputted to the arithmetic processing circuit 38 in the same manner by changing the shift amount. Thus, by multiple exposure, the output corresponding to each light receiving element is Gain competence. 40 is a monitor for displaying the output image information thus obtained.

Various types of processing such as edge line extraction processing, La Plataan processing, and averaging processing can be performed by multiple exposure using such image shifting.

In the above embodiments, the axis of rotation of the deflection element is located at one edge of the deflection element, and the pattern deflection element can be rotated only in one direction. In the present invention, for example, a column is connected to the center of the upper electrode constituting the deflection element, and a plurality of lower electrodes are arranged around the column, and a voltage is selectively applied to each of the lower electrodes. By doing so, the deflection element can be rotated around an axis in an appropriate direction, and a two-dimensional image shift similar to that of the third embodiment can be realized with one two-dimensional array of deflection elements. can.

Furthermore, in the above embodiment, electrostatic force is used as the driving force for rotating the deflection element, but in the present invention, other magnetic force or mechanical force is used as the driving force for rotating the deflection element. A driving force or the like may also be used.

〔Effect of the invention〕

According to the image shifting device of the present invention as described above, since image shifting is performed by driving a plurality of relatively small deflection elements, a large space is not required for driving, and the means for driving is also large. I don't need anything,
Therefore, miniaturization of the device and high-speed response can be realized.

Furthermore, since the device of the present invention has a planar structure, two-dimensional image shifting can be realized with a simple configuration.

[Brief explanation of drawings]

FIG. 1 is a physical plan view of the apparatus of the present invention, and FIG. 2 is a sectional view taken along the line 1--2. 3, 4 and 5 are partial cross-sectional views of the apparatus of the present invention. 6, 7 and 8 are perspective views of the apparatus of the present invention. 9 and 11 are block diagrams of a conventional image shift device, and FIG. 10 is an explanatory diagram of the operation of the device shown in FIG. 9. 2: Upper electrode, 4: Hinge part, 6: Conductive wire, 8: Support layer, 10: Cavity, 12: Substrate, 14: Through hole, 16: Lower electrode, 20&~20d: Deflection element. Fig. 1 groan, -, i Fig. 6/4ri 4 A to 28 28-shioichig22b Fig. 8 A/36 0a

Claims (2)

[Claims] (1) A deflection element that is rotatable in at least one direction based on a drive signal and that at least a portion of both surfaces are formed as reflective surfaces that are substantially parallel to each other is arranged to be substantially perpendicular to the axis of rotation. An image shifting device characterized by being arranged regularly in a direction. (2) The image shifting device according to claim 1, wherein the deflection elements are regularly arranged in the direction of the axis of rotation thereof.