JPS6253595B2 - - Google Patents
Info
- Publication number
- JPS6253595B2 JPS6253595B2 JP14514580A JP14514580A JPS6253595B2 JP S6253595 B2 JPS6253595 B2 JP S6253595B2 JP 14514580 A JP14514580 A JP 14514580A JP 14514580 A JP14514580 A JP 14514580A JP S6253595 B2 JPS6253595 B2 JP S6253595B2
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- tantalum
- oxide film
- counter electrode
- capacitors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 17
- 239000003792 electrolyte Substances 0.000 claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 6
- 238000007743 anodising Methods 0.000 claims description 5
- 235000011149 sulphuric acid Nutrition 0.000 claims description 3
- 239000003990 capacitor Substances 0.000 description 14
- 239000010408 film Substances 0.000 description 11
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 9
- 239000000203 mixture Substances 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 7
- 239000008151 electrolyte solution Substances 0.000 description 5
- 235000011007 phosphoric acid Nutrition 0.000 description 5
- 229910052715 tantalum Inorganic materials 0.000 description 5
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 4
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000002048 anodisation reaction Methods 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- DLYUQMMRRRQYAE-UHFFFAOYSA-N tetraphosphorus decaoxide Chemical compound O1P(O2)(=O)OP3(=O)OP1(=O)OP2(=O)O3 DLYUQMMRRRQYAE-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000010407 anodic oxide Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- JZBDKSGOOLLKIO-UHFFFAOYSA-N nitric acid sulfuric acid hydrofluoride Chemical compound S(O)(O)(=O)=O.F.[N+](=O)(O)[O-] JZBDKSGOOLLKIO-UHFFFAOYSA-N 0.000 description 1
- YXJYBPXSEKMEEJ-UHFFFAOYSA-N phosphoric acid;sulfuric acid Chemical compound OP(O)(O)=O.OS(O)(=O)=O YXJYBPXSEKMEEJ-UHFFFAOYSA-N 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Landscapes
- Electrochemical Coating By Surface Reaction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14514580A JPS5770294A (en) | 1980-10-16 | 1980-10-16 | Anodic oxidation of tantalum metal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14514580A JPS5770294A (en) | 1980-10-16 | 1980-10-16 | Anodic oxidation of tantalum metal |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5770294A JPS5770294A (en) | 1982-04-30 |
| JPS6253595B2 true JPS6253595B2 (enrdf_load_stackoverflow) | 1987-11-11 |
Family
ID=15378452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14514580A Granted JPS5770294A (en) | 1980-10-16 | 1980-10-16 | Anodic oxidation of tantalum metal |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5770294A (enrdf_load_stackoverflow) |
-
1980
- 1980-10-16 JP JP14514580A patent/JPS5770294A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5770294A (en) | 1982-04-30 |
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