JPS6253042B2 - - Google Patents

Info

Publication number
JPS6253042B2
JPS6253042B2 JP56194455A JP19445581A JPS6253042B2 JP S6253042 B2 JPS6253042 B2 JP S6253042B2 JP 56194455 A JP56194455 A JP 56194455A JP 19445581 A JP19445581 A JP 19445581A JP S6253042 B2 JPS6253042 B2 JP S6253042B2
Authority
JP
Japan
Prior art keywords
reflected light
light
sample
surface roughness
photodetector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56194455A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5896206A (ja
Inventor
Shoji Madokoro
Shiro Hagiwara
Shintaro Ushijima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP19445581A priority Critical patent/JPS5896206A/ja
Publication of JPS5896206A publication Critical patent/JPS5896206A/ja
Publication of JPS6253042B2 publication Critical patent/JPS6253042B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP19445581A 1981-12-04 1981-12-04 表面荒さの評価装置 Granted JPS5896206A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19445581A JPS5896206A (ja) 1981-12-04 1981-12-04 表面荒さの評価装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19445581A JPS5896206A (ja) 1981-12-04 1981-12-04 表面荒さの評価装置

Publications (2)

Publication Number Publication Date
JPS5896206A JPS5896206A (ja) 1983-06-08
JPS6253042B2 true JPS6253042B2 (en, 2012) 1987-11-09

Family

ID=16324847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19445581A Granted JPS5896206A (ja) 1981-12-04 1981-12-04 表面荒さの評価装置

Country Status (1)

Country Link
JP (1) JPS5896206A (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01103118U (en, 2012) * 1987-12-26 1989-07-12

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5754291A (en) * 1996-09-19 1998-05-19 Molecular Dynamics, Inc. Micro-imaging system

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5830608A (ja) * 1981-08-18 1983-02-23 Oki Electric Ind Co Ltd 表面荒さ評価装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01103118U (en, 2012) * 1987-12-26 1989-07-12

Also Published As

Publication number Publication date
JPS5896206A (ja) 1983-06-08

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