JPS5896206A - 表面荒さの評価装置 - Google Patents

表面荒さの評価装置

Info

Publication number
JPS5896206A
JPS5896206A JP19445581A JP19445581A JPS5896206A JP S5896206 A JPS5896206 A JP S5896206A JP 19445581 A JP19445581 A JP 19445581A JP 19445581 A JP19445581 A JP 19445581A JP S5896206 A JPS5896206 A JP S5896206A
Authority
JP
Japan
Prior art keywords
surface roughness
reflected light
sample
light
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19445581A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6253042B2 (en, 2012
Inventor
Shoji Madokoro
間所　昭次
Shiro Hagiwara
萩原　梓郎
Shintaro Ushijima
牛島　真太郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP19445581A priority Critical patent/JPS5896206A/ja
Publication of JPS5896206A publication Critical patent/JPS5896206A/ja
Publication of JPS6253042B2 publication Critical patent/JPS6253042B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP19445581A 1981-12-04 1981-12-04 表面荒さの評価装置 Granted JPS5896206A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19445581A JPS5896206A (ja) 1981-12-04 1981-12-04 表面荒さの評価装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19445581A JPS5896206A (ja) 1981-12-04 1981-12-04 表面荒さの評価装置

Publications (2)

Publication Number Publication Date
JPS5896206A true JPS5896206A (ja) 1983-06-08
JPS6253042B2 JPS6253042B2 (en, 2012) 1987-11-09

Family

ID=16324847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19445581A Granted JPS5896206A (ja) 1981-12-04 1981-12-04 表面荒さの評価装置

Country Status (1)

Country Link
JP (1) JPS5896206A (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1015869A4 (en) * 1996-09-19 2000-07-05 Molecular Dynamics Inc MICRO IMAGING SYSTEM

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01103118U (en, 2012) * 1987-12-26 1989-07-12

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5830608A (ja) * 1981-08-18 1983-02-23 Oki Electric Ind Co Ltd 表面荒さ評価装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5830608A (ja) * 1981-08-18 1983-02-23 Oki Electric Ind Co Ltd 表面荒さ評価装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1015869A4 (en) * 1996-09-19 2000-07-05 Molecular Dynamics Inc MICRO IMAGING SYSTEM

Also Published As

Publication number Publication date
JPS6253042B2 (en, 2012) 1987-11-09

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