JPS6253042B2 - - Google Patents
Info
- Publication number
- JPS6253042B2 JPS6253042B2 JP56194455A JP19445581A JPS6253042B2 JP S6253042 B2 JPS6253042 B2 JP S6253042B2 JP 56194455 A JP56194455 A JP 56194455A JP 19445581 A JP19445581 A JP 19445581A JP S6253042 B2 JPS6253042 B2 JP S6253042B2
- Authority
- JP
- Japan
- Prior art keywords
- reflected light
- light
- sample
- surface roughness
- photodetector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003746 surface roughness Effects 0.000 claims description 15
- 238000011156 evaluation Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 102100027340 Slit homolog 2 protein Human genes 0.000 description 2
- 101710133576 Slit homolog 2 protein Proteins 0.000 description 2
- 238000010835 comparative analysis Methods 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19445581A JPS5896206A (ja) | 1981-12-04 | 1981-12-04 | 表面荒さの評価装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19445581A JPS5896206A (ja) | 1981-12-04 | 1981-12-04 | 表面荒さの評価装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5896206A JPS5896206A (ja) | 1983-06-08 |
| JPS6253042B2 true JPS6253042B2 (de) | 1987-11-09 |
Family
ID=16324847
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19445581A Granted JPS5896206A (ja) | 1981-12-04 | 1981-12-04 | 表面荒さの評価装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5896206A (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01103118U (de) * | 1987-12-26 | 1989-07-12 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5754291A (en) * | 1996-09-19 | 1998-05-19 | Molecular Dynamics, Inc. | Micro-imaging system |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5830608A (ja) * | 1981-08-18 | 1983-02-23 | Oki Electric Ind Co Ltd | 表面荒さ評価装置 |
-
1981
- 1981-12-04 JP JP19445581A patent/JPS5896206A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5830608A (ja) * | 1981-08-18 | 1983-02-23 | Oki Electric Ind Co Ltd | 表面荒さ評価装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01103118U (de) * | 1987-12-26 | 1989-07-12 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5896206A (ja) | 1983-06-08 |
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