JPS6251249U - - Google Patents
Info
- Publication number
- JPS6251249U JPS6251249U JP14195085U JP14195085U JPS6251249U JP S6251249 U JPS6251249 U JP S6251249U JP 14195085 U JP14195085 U JP 14195085U JP 14195085 U JP14195085 U JP 14195085U JP S6251249 U JPS6251249 U JP S6251249U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- pressure
- transmission hole
- package
- hole formed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 claims description 5
- 238000009792 diffusion process Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 230000000007 visual effect Effects 0.000 claims 1
- 239000011521 glass Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14195085U JPS6251249U (de) | 1985-09-19 | 1985-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14195085U JPS6251249U (de) | 1985-09-19 | 1985-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6251249U true JPS6251249U (de) | 1987-03-30 |
Family
ID=31050214
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14195085U Pending JPS6251249U (de) | 1985-09-19 | 1985-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6251249U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014002150A1 (ja) * | 2012-06-29 | 2014-01-03 | 株式会社デンソー | 圧力センサ |
-
1985
- 1985-09-19 JP JP14195085U patent/JPS6251249U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014002150A1 (ja) * | 2012-06-29 | 2014-01-03 | 株式会社デンソー | 圧力センサ |
| JP2014010086A (ja) * | 2012-06-29 | 2014-01-20 | Denso Corp | 圧力センサ |
| US9513182B2 (en) | 2012-06-29 | 2016-12-06 | Denso Corporation | Pressure sensor having multiple piezoresistive elements |