JPS6251171U - - Google Patents

Info

Publication number
JPS6251171U
JPS6251171U JP14026585U JP14026585U JPS6251171U JP S6251171 U JPS6251171 U JP S6251171U JP 14026585 U JP14026585 U JP 14026585U JP 14026585 U JP14026585 U JP 14026585U JP S6251171 U JPS6251171 U JP S6251171U
Authority
JP
Japan
Prior art keywords
chamber
evacuated
introduction
adjacent
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14026585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14026585U priority Critical patent/JPS6251171U/ja
Publication of JPS6251171U publication Critical patent/JPS6251171U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP14026585U 1985-09-12 1985-09-12 Pending JPS6251171U (US20080293856A1-20081127-C00150.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14026585U JPS6251171U (US20080293856A1-20081127-C00150.png) 1985-09-12 1985-09-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14026585U JPS6251171U (US20080293856A1-20081127-C00150.png) 1985-09-12 1985-09-12

Publications (1)

Publication Number Publication Date
JPS6251171U true JPS6251171U (US20080293856A1-20081127-C00150.png) 1987-03-30

Family

ID=31046951

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14026585U Pending JPS6251171U (US20080293856A1-20081127-C00150.png) 1985-09-12 1985-09-12

Country Status (1)

Country Link
JP (1) JPS6251171U (US20080293856A1-20081127-C00150.png)

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