JPS6249233U - - Google Patents

Info

Publication number
JPS6249233U
JPS6249233U JP14127085U JP14127085U JPS6249233U JP S6249233 U JPS6249233 U JP S6249233U JP 14127085 U JP14127085 U JP 14127085U JP 14127085 U JP14127085 U JP 14127085U JP S6249233 U JPS6249233 U JP S6249233U
Authority
JP
Japan
Prior art keywords
light
end point
time
light intensity
detection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14127085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14127085U priority Critical patent/JPS6249233U/ja
Publication of JPS6249233U publication Critical patent/JPS6249233U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP14127085U 1985-09-13 1985-09-13 Pending JPS6249233U (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14127085U JPS6249233U (en, 2012) 1985-09-13 1985-09-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14127085U JPS6249233U (en, 2012) 1985-09-13 1985-09-13

Publications (1)

Publication Number Publication Date
JPS6249233U true JPS6249233U (en, 2012) 1987-03-26

Family

ID=31048890

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14127085U Pending JPS6249233U (en, 2012) 1985-09-13 1985-09-13

Country Status (1)

Country Link
JP (1) JPS6249233U (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6412529A (en) * 1987-07-07 1989-01-17 Sumitomo Gca Kk Development of wafer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5317078A (en) * 1976-07-30 1978-02-16 Toshiba Corp Etching end point detection circuit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5317078A (en) * 1976-07-30 1978-02-16 Toshiba Corp Etching end point detection circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6412529A (en) * 1987-07-07 1989-01-17 Sumitomo Gca Kk Development of wafer

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