JPS624882U - - Google Patents

Info

Publication number
JPS624882U
JPS624882U JP9514885U JP9514885U JPS624882U JP S624882 U JPS624882 U JP S624882U JP 9514885 U JP9514885 U JP 9514885U JP 9514885 U JP9514885 U JP 9514885U JP S624882 U JPS624882 U JP S624882U
Authority
JP
Japan
Prior art keywords
vacuum
outside
movable element
body member
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9514885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0312057Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9514885U priority Critical patent/JPH0312057Y2/ja
Publication of JPS624882U publication Critical patent/JPS624882U/ja
Application granted granted Critical
Publication of JPH0312057Y2 publication Critical patent/JPH0312057Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Linear Motors (AREA)
JP9514885U 1985-06-25 1985-06-25 Expired JPH0312057Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9514885U JPH0312057Y2 (enrdf_load_stackoverflow) 1985-06-25 1985-06-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9514885U JPH0312057Y2 (enrdf_load_stackoverflow) 1985-06-25 1985-06-25

Publications (2)

Publication Number Publication Date
JPS624882U true JPS624882U (enrdf_load_stackoverflow) 1987-01-13
JPH0312057Y2 JPH0312057Y2 (enrdf_load_stackoverflow) 1991-03-22

Family

ID=30959363

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9514885U Expired JPH0312057Y2 (enrdf_load_stackoverflow) 1985-06-25 1985-06-25

Country Status (1)

Country Link
JP (1) JPH0312057Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004040089A (ja) * 2002-05-21 2004-02-05 Otb Group Bv 基板処理装置
KR20140085346A (ko) * 2012-12-27 2014-07-07 신포니아 테크놀로지 가부시끼가이샤 반송 장치

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004040089A (ja) * 2002-05-21 2004-02-05 Otb Group Bv 基板処理装置
KR20140085346A (ko) * 2012-12-27 2014-07-07 신포니아 테크놀로지 가부시끼가이샤 반송 장치
JP2014128177A (ja) * 2012-12-27 2014-07-07 Sinfonia Technology Co Ltd 搬送装置
TWI574899B (zh) * 2012-12-27 2017-03-21 Sinfonia Technology Co Ltd Handling device

Also Published As

Publication number Publication date
JPH0312057Y2 (enrdf_load_stackoverflow) 1991-03-22

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