JPS6248185B2 - - Google Patents

Info

Publication number
JPS6248185B2
JPS6248185B2 JP1384778A JP1384778A JPS6248185B2 JP S6248185 B2 JPS6248185 B2 JP S6248185B2 JP 1384778 A JP1384778 A JP 1384778A JP 1384778 A JP1384778 A JP 1384778A JP S6248185 B2 JPS6248185 B2 JP S6248185B2
Authority
JP
Japan
Prior art keywords
grit
film
shutter
slit
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1384778A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54107390A (en
Inventor
Hidecho Kashihara
Hideya Matsushima
Kenzo Maeda
Masamichi Tomizaki
Osamu Sakakibara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Doryokuro Kakunenryo Kaihatsu Jigyodan
Mitsubishi Electric Corp
Original Assignee
Doryokuro Kakunenryo Kaihatsu Jigyodan
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Doryokuro Kakunenryo Kaihatsu Jigyodan, Mitsubishi Electric Corp filed Critical Doryokuro Kakunenryo Kaihatsu Jigyodan
Priority to JP1384778A priority Critical patent/JPS54107390A/ja
Publication of JPS54107390A publication Critical patent/JPS54107390A/ja
Publication of JPS6248185B2 publication Critical patent/JPS6248185B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP1384778A 1978-02-09 1978-02-09 Rotary grid device Granted JPS54107390A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1384778A JPS54107390A (en) 1978-02-09 1978-02-09 Rotary grid device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1384778A JPS54107390A (en) 1978-02-09 1978-02-09 Rotary grid device

Publications (2)

Publication Number Publication Date
JPS54107390A JPS54107390A (en) 1979-08-23
JPS6248185B2 true JPS6248185B2 (Direct) 1987-10-13

Family

ID=11844659

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1384778A Granted JPS54107390A (en) 1978-02-09 1978-02-09 Rotary grid device

Country Status (1)

Country Link
JP (1) JPS54107390A (Direct)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107367522B (zh) * 2017-09-11 2020-05-15 江苏天瑞仪器股份有限公司 一种用于x荧光光谱仪多准直器的转动结构

Also Published As

Publication number Publication date
JPS54107390A (en) 1979-08-23

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