JPS6247806B2 - - Google Patents
Info
- Publication number
- JPS6247806B2 JPS6247806B2 JP1782782A JP1782782A JPS6247806B2 JP S6247806 B2 JPS6247806 B2 JP S6247806B2 JP 1782782 A JP1782782 A JP 1782782A JP 1782782 A JP1782782 A JP 1782782A JP S6247806 B2 JPS6247806 B2 JP S6247806B2
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- electrodes
- ozone
- voltage
- generated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 15
- 238000004140 cleaning Methods 0.000 description 6
- 239000010419 fine particle Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Oxygen, Ozone, And Oxides In General (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1782782A JPS58135107A (ja) | 1982-02-05 | 1982-02-05 | オゾン発生装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1782782A JPS58135107A (ja) | 1982-02-05 | 1982-02-05 | オゾン発生装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58135107A JPS58135107A (ja) | 1983-08-11 |
JPS6247806B2 true JPS6247806B2 (enrdf_load_stackoverflow) | 1987-10-09 |
Family
ID=11954545
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1782782A Granted JPS58135107A (ja) | 1982-02-05 | 1982-02-05 | オゾン発生装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58135107A (enrdf_load_stackoverflow) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6355106A (ja) * | 1986-08-26 | 1988-03-09 | Ishikawajima Harima Heavy Ind Co Ltd | オゾン発生装置 |
JPS6355105A (ja) * | 1986-08-26 | 1988-03-09 | Ishikawajima Harima Heavy Ind Co Ltd | オゾン発生装置 |
JP4754196B2 (ja) | 2003-08-25 | 2011-08-24 | 東京エレクトロン株式会社 | 減圧処理室内の部材清浄化方法および基板処理装置 |
CZ303615B6 (cs) * | 2011-11-14 | 2013-01-09 | Ceské vysoké ucení technické v Praze Fakulta elektrotechnická | Akustický rezonátor kombinovaný s elektrickými výboji |
CA2885572C (en) * | 2012-09-21 | 2021-11-02 | Smiths Detection-Watford Limited | Cleaning of corona dischage ion source |
CN115031487A (zh) * | 2022-06-16 | 2022-09-09 | 珠海格力电器股份有限公司 | 一种冰箱、除味器的控制方法、装置及系统 |
-
1982
- 1982-02-05 JP JP1782782A patent/JPS58135107A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS58135107A (ja) | 1983-08-11 |
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