JPS6247542U - - Google Patents

Info

Publication number
JPS6247542U
JPS6247542U JP13846585U JP13846585U JPS6247542U JP S6247542 U JPS6247542 U JP S6247542U JP 13846585 U JP13846585 U JP 13846585U JP 13846585 U JP13846585 U JP 13846585U JP S6247542 U JPS6247542 U JP S6247542U
Authority
JP
Japan
Prior art keywords
plate
gripper
wafer
holding part
spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13846585U
Other languages
English (en)
Other versions
JPH0318435Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985138465U priority Critical patent/JPH0318435Y2/ja
Publication of JPS6247542U publication Critical patent/JPS6247542U/ja
Application granted granted Critical
Publication of JPH0318435Y2 publication Critical patent/JPH0318435Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)

Description

【図面の簡単な説明】
第１図は本考案の保持装置の垂直断面図、第２
図は一部の水平断面図、第３図はグリツパーの取
り付け部分の拡大断面図である。 １……保持装置、２，３……グリツパー、４…
…グリツパーボツクス、５……プツシユロツド、
７……第１の押え部、９……第１の押え部、１４
……回り止め板、１５……スライダー、２０……
ガイドバー、２１……スプリング、２２……駆動
源としてのシリンダ、３１……板体としてのウエ
ハー。

Claims (1)

    【実用新案登録請求の範囲】
  1. ウエハー等の板体周面と当たる第１の押え部を
    グリツパーの定位置に支持し、駆動源によりスプ
    リングを介して進退する第２の押え部をグリツパ
    ーに設けて、第１、第２の押え部で板体周面を挟
    むことを特徴とするウエハー等の板体の保持装置
    。
JP1985138465U 1985-09-10 1985-09-10 Expired JPH0318435Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985138465U JPH0318435Y2 (ja) 1985-09-10 1985-09-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985138465U JPH0318435Y2 (ja) 1985-09-10 1985-09-10

Publications (2)

Publication Number Publication Date
JPS6247542U true JPS6247542U (ja) 1987-03-24
JPH0318435Y2 JPH0318435Y2 (ja) 1991-04-18

Family

ID=31043472

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985138465U Expired JPH0318435Y2 (ja) 1985-09-10 1985-09-10

Country Status (1)

Country Link
JP (1) JPH0318435Y2 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63241948A (ja) * 1987-03-30 1988-10-07 Hitachi Ltd ウエハ搬送方法
JP2007021691A (ja) * 2005-07-20 2007-02-01 Yaskawa Electric Corp リング搬送用ハンドとそれを用いた搬送装置
CN103009385A (zh) * 2011-09-26 2013-04-03 株式会社安川电机 机器人手和机器人
JP2022091676A (ja) * 2020-12-09 2022-06-21 田中精密工業株式会社 積層鉄心の加熱装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003024673A1 (fr) * 2001-09-12 2003-03-27 Takehide Hayashi Main de robot a fonction de positionnement pour tranche en semiconducteur et substrat de verre a cristaux liquides

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4938345A (ja) * 1972-08-25 1974-04-10
JPS59201782A (ja) * 1983-04-23 1984-11-15 大日本スクリ−ン製造株式会社 ウエハ等の薄板物搬送装置
JPS6079742U (ja) * 1983-11-09 1985-06-03 日立電子エンジニアリング株式会社 角マスクチヤツク機構
JPS61142450U (ja) * 1985-02-25 1986-09-03
JPS61267622A (ja) * 1985-05-20 1986-11-27 Canon Inc ウエハ搬送装置
JPS61199049U (ja) * 1985-06-04 1986-12-12

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4938345A (ja) * 1972-08-25 1974-04-10
JPS59201782A (ja) * 1983-04-23 1984-11-15 大日本スクリ−ン製造株式会社 ウエハ等の薄板物搬送装置
JPS6079742U (ja) * 1983-11-09 1985-06-03 日立電子エンジニアリング株式会社 角マスクチヤツク機構
JPS61142450U (ja) * 1985-02-25 1986-09-03
JPS61267622A (ja) * 1985-05-20 1986-11-27 Canon Inc ウエハ搬送装置
JPS61199049U (ja) * 1985-06-04 1986-12-12

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63241948A (ja) * 1987-03-30 1988-10-07 Hitachi Ltd ウエハ搬送方法
JP2007021691A (ja) * 2005-07-20 2007-02-01 Yaskawa Electric Corp リング搬送用ハンドとそれを用いた搬送装置
JP4600193B2 (ja) * 2005-07-20 2010-12-15 株式会社安川電機 リング搬送システム
CN103009385A (zh) * 2011-09-26 2013-04-03 株式会社安川电机 机器人手和机器人
JP2013071186A (ja) * 2011-09-26 2013-04-22 Yaskawa Electric Corp ハンドおよびロボット
JP2022091676A (ja) * 2020-12-09 2022-06-21 田中精密工業株式会社 積層鉄心の加熱装置

Also Published As

Publication number Publication date
JPH0318435Y2 (ja) 1991-04-18

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