Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin-Etsu Chemical Co Ltd
Azbil Corp
Original Assignee
Shin-Etsu Chemical Co Ltd
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin-Etsu Chemical Co Ltd, Azbil CorpfiledCriticalShin-Etsu Chemical Co Ltd
Priority to JP11761681ApriorityCriticalpatent/JPS5820201A/ja
Publication of JPS5820201ApublicationCriticalpatent/JPS5820201A/ja
Publication of JPS6247406B2publicationCriticalpatent/JPS6247406B2/ja