JPS6246802B2 - - Google Patents

Info

Publication number
JPS6246802B2
JPS6246802B2 JP10128180A JP10128180A JPS6246802B2 JP S6246802 B2 JPS6246802 B2 JP S6246802B2 JP 10128180 A JP10128180 A JP 10128180A JP 10128180 A JP10128180 A JP 10128180A JP S6246802 B2 JPS6246802 B2 JP S6246802B2
Authority
JP
Japan
Prior art keywords
light
detection means
dimensional shape
measuring device
aperture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10128180A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5726704A (en
Inventor
Yoshisada Oshida
Yoichi Kawada
Shinobu Watanabe
Noboru Umehara
Kenichi Isoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10128180A priority Critical patent/JPS5726704A/ja
Priority to US06/286,512 priority patent/US4473750A/en
Publication of JPS5726704A publication Critical patent/JPS5726704A/ja
Publication of JPS6246802B2 publication Critical patent/JPS6246802B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP10128180A 1980-07-25 1980-07-25 Measuring instrument for three-dimensional shape Granted JPS5726704A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10128180A JPS5726704A (en) 1980-07-25 1980-07-25 Measuring instrument for three-dimensional shape
US06/286,512 US4473750A (en) 1980-07-25 1981-07-24 Three-dimensional shape measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10128180A JPS5726704A (en) 1980-07-25 1980-07-25 Measuring instrument for three-dimensional shape

Publications (2)

Publication Number Publication Date
JPS5726704A JPS5726704A (en) 1982-02-12
JPS6246802B2 true JPS6246802B2 (forum.php) 1987-10-05

Family

ID=14296475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10128180A Granted JPS5726704A (en) 1980-07-25 1980-07-25 Measuring instrument for three-dimensional shape

Country Status (1)

Country Link
JP (1) JPS5726704A (forum.php)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01156253U (forum.php) * 1988-04-13 1989-10-26
JPH0384402U (forum.php) * 1989-12-19 1991-08-27
CN100400260C (zh) * 2003-03-27 2008-07-09 株式会社日本制钢所 直列螺杆式可塑化射出装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58142210A (ja) * 1982-02-18 1983-08-24 Hitachi Ltd 三次元曲面を有する被測定物体の形状測定方法
US5030008A (en) * 1988-10-11 1991-07-09 Kla Instruments, Corporation Method and apparatus for the automated analysis of three-dimensional objects

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01156253U (forum.php) * 1988-04-13 1989-10-26
JPH0384402U (forum.php) * 1989-12-19 1991-08-27
CN100400260C (zh) * 2003-03-27 2008-07-09 株式会社日本制钢所 直列螺杆式可塑化射出装置

Also Published As

Publication number Publication date
JPS5726704A (en) 1982-02-12

Similar Documents

Publication Publication Date Title
US4473750A (en) Three-dimensional shape measuring device
US4775236A (en) Laser based roundness and diameter gaging system and method of using same
US4748322A (en) Apparatus for determining the distance between a measuring surface and a reference surface
US4678337A (en) Laser based gaging system and method of using same
JPS6246802B2 (forum.php)
UST102104I4 (en) Scanning optical system adapted for linewidth measurement in semiconductor devices
JPS5979805A (ja) 距離センサ
US4952816A (en) Focus detection system with zero crossing detection for use in optical measuring systems
JPH04208515A (ja) 電子線描画装置及び方法、及びその試料面高さ測定装置
JPH0479522B2 (forum.php)
JPS5979122A (ja) レ−ザパワ−測定装置
US6317200B1 (en) Positional measurement with normalized signal processing
JPS5616806A (en) Surface roughness measuring unit
JPS6117016A (ja) 平均化回折モアレ位置検出器
JPH0955051A (ja) 磁気ヘッドの浮上特性計測方法およびその装置
JPH0815148B2 (ja) 食刻深さ測定方法
JPH0516548B2 (forum.php)
JPS5999216A (ja) 物体の表面高さ測定装置
JP3071907B2 (ja) 非接触タッチプローブ
RU2148790C1 (ru) Способ и устройство для высокоточного бесконтактного измерения расстояний поверхностей
JPS5826325Y2 (ja) 位置検出装置
JPH0452401B2 (forum.php)
JPS61151466A (ja) 物体の移動速度測定方法
JPS59211811A (ja) 表面あらさ測定装置
JPS61155759A (ja) スペツクル速度計測装置