JPS624665B2 - - Google Patents

Info

Publication number
JPS624665B2
JPS624665B2 JP55039490A JP3949080A JPS624665B2 JP S624665 B2 JPS624665 B2 JP S624665B2 JP 55039490 A JP55039490 A JP 55039490A JP 3949080 A JP3949080 A JP 3949080A JP S624665 B2 JPS624665 B2 JP S624665B2
Authority
JP
Japan
Prior art keywords
sensor
casing
gas
flow path
gas rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55039490A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56135162A (en
Inventor
Fumitaka Takahashi
Hiroshi Goto
Keiichi Mitobe
Yasuo Oohashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honda Motor Co Ltd
Original Assignee
Honda Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honda Motor Co Ltd filed Critical Honda Motor Co Ltd
Priority to JP3949080A priority Critical patent/JPS56135162A/ja
Publication of JPS56135162A publication Critical patent/JPS56135162A/ja
Publication of JPS624665B2 publication Critical patent/JPS624665B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/58—Turn-sensitive devices without moving masses

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)
JP3949080A 1980-03-27 1980-03-27 Assembly method for gas rate sensor Granted JPS56135162A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3949080A JPS56135162A (en) 1980-03-27 1980-03-27 Assembly method for gas rate sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3949080A JPS56135162A (en) 1980-03-27 1980-03-27 Assembly method for gas rate sensor

Publications (2)

Publication Number Publication Date
JPS56135162A JPS56135162A (en) 1981-10-22
JPS624665B2 true JPS624665B2 (enrdf_load_stackoverflow) 1987-01-31

Family

ID=12554486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3949080A Granted JPS56135162A (en) 1980-03-27 1980-03-27 Assembly method for gas rate sensor

Country Status (1)

Country Link
JP (1) JPS56135162A (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3581578A (en) * 1969-06-05 1971-06-01 Hercules Inc Jet adjustment means for fluid jet deflection type instruments

Also Published As

Publication number Publication date
JPS56135162A (en) 1981-10-22

Similar Documents

Publication Publication Date Title
US20020100333A1 (en) Sensor with fluid isolation barrier
JP4838871B2 (ja) ガスセンサ
US4348900A (en) Angular velocity sensor
KR102128855B1 (ko) 전자 유량계의 전위 검출용 전극
JPS6197562A (ja) 酸素センサ
US10065853B2 (en) Optimized epoxy die attach geometry for MEMS die
JP2020067349A (ja) 温度センサ装置
US5925826A (en) Integrated pressure sensor unit and solenoid valve unit
KR20050079215A (ko) 압력반응 금속다이아프램을 구비한 압력센서
JP5519618B2 (ja) ガスセンサおよびガスセンサの製造方法
JPS624665B2 (enrdf_load_stackoverflow)
US4930349A (en) Gas rate sensor
JP2017187383A (ja) 温度センサ複合型半導体圧力センサ装置
JP5753818B2 (ja) ガスセンサ
JPH0623964Y2 (ja) 酸素センサ
JP6890061B2 (ja) ガスセンサ
JP5698187B2 (ja) ガスセンサ
JPS5837564A (ja) ガスレ−トセンサ
CN218474068U (zh) 底盖结构及气雾发生器
JPH0584869B2 (enrdf_load_stackoverflow)
US4403513A (en) Capacitive differential pressure transducer
US20240423269A1 (en) Aerosol-generating device
EP4235132A1 (en) Pressure and temperature sensor
JP2002039901A (ja) 圧力センサ
JPH0134089Y2 (enrdf_load_stackoverflow)