JPS6246267A - 振動センサ - Google Patents

振動センサ

Info

Publication number
JPS6246267A
JPS6246267A JP18610985A JP18610985A JPS6246267A JP S6246267 A JPS6246267 A JP S6246267A JP 18610985 A JP18610985 A JP 18610985A JP 18610985 A JP18610985 A JP 18610985A JP S6246267 A JPS6246267 A JP S6246267A
Authority
JP
Japan
Prior art keywords
oscillator
piezoelectric element
electric circuit
bonded
vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18610985A
Other languages
English (en)
Japanese (ja)
Other versions
JPH052173B2 (enrdf_load_html_response
Inventor
Tetsuji Fukada
深田 哲司
Masayuki Wakamiya
若宮 正行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP18610985A priority Critical patent/JPS6246267A/ja
Publication of JPS6246267A publication Critical patent/JPS6246267A/ja
Publication of JPH052173B2 publication Critical patent/JPH052173B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
JP18610985A 1985-08-24 1985-08-24 振動センサ Granted JPS6246267A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18610985A JPS6246267A (ja) 1985-08-24 1985-08-24 振動センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18610985A JPS6246267A (ja) 1985-08-24 1985-08-24 振動センサ

Publications (2)

Publication Number Publication Date
JPS6246267A true JPS6246267A (ja) 1987-02-28
JPH052173B2 JPH052173B2 (enrdf_load_html_response) 1993-01-11

Family

ID=16182516

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18610985A Granted JPS6246267A (ja) 1985-08-24 1985-08-24 振動センサ

Country Status (1)

Country Link
JP (1) JPS6246267A (enrdf_load_html_response)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4995592A (en) * 1988-12-22 1991-02-26 Foseco International Limited Purifying molten metal
JP2009053087A (ja) * 2007-08-28 2009-03-12 Yamaha Corp モーションセンサおよびモーションセンサの製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4995592A (en) * 1988-12-22 1991-02-26 Foseco International Limited Purifying molten metal
JP2009053087A (ja) * 2007-08-28 2009-03-12 Yamaha Corp モーションセンサおよびモーションセンサの製造方法

Also Published As

Publication number Publication date
JPH052173B2 (enrdf_load_html_response) 1993-01-11

Similar Documents

Publication Publication Date Title
JP3091766B2 (ja) 表面取付け型圧電セラミツク式加速度計及びその製造方法
CN1081791C (zh) 振动检测传感器
JP3985609B2 (ja) コンデンサーマイクロホン
JP4757026B2 (ja) 加速度センサの特性調整方法
KR20010013748A (ko) 가속도 센서 및 이 가속도 센서를 이용한 가속도 장치
US5864066A (en) Vibration detecting sensor with temperature compensating piezoelectric element
WO2005012921A1 (ja) 加速度センサ
US10408619B2 (en) Composite sensor
US6803698B2 (en) Acceleration sensor
US6786095B2 (en) Acceleration sensor
WO1989005445A1 (en) An acoustic emission transducer and an electrical oscillator
JP2002107373A (ja) 加速度センサ
JPS6246267A (ja) 振動センサ
US5872506A (en) Piezoelectric transducer having directly mounted electrical components and noise making device utilizing same
WO2001020258A1 (en) Angular velocity sensor
JPS60186725A (ja) 圧力センサ
JP2001074767A (ja) 加速度センサおよびその製造方法
JPS6246266A (ja) 振動センサ
JPH0682131B2 (ja) 振動加速度センサ
JPS6321518A (ja) 振動センサ
JP2623643B2 (ja) 超音波セラミックマイクロホン
JP2689799B2 (ja) 加速度センサ
JPH0257252B2 (enrdf_load_html_response)
JPS61259175A (ja) 圧電型力学量センサ
JPH01107161A (ja) 振動加速度センサ