JPS6246063B2 - - Google Patents

Info

Publication number
JPS6246063B2
JPS6246063B2 JP19023281A JP19023281A JPS6246063B2 JP S6246063 B2 JPS6246063 B2 JP S6246063B2 JP 19023281 A JP19023281 A JP 19023281A JP 19023281 A JP19023281 A JP 19023281A JP S6246063 B2 JPS6246063 B2 JP S6246063B2
Authority
JP
Japan
Prior art keywords
film
oxide
wiring
electrode
electrode metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP19023281A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5891659A (ja
Inventor
Shigeo Uotani
Hirozo Takano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP19023281A priority Critical patent/JPS5891659A/ja
Publication of JPS5891659A publication Critical patent/JPS5891659A/ja
Publication of JPS6246063B2 publication Critical patent/JPS6246063B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP19023281A 1981-11-26 1981-11-26 電極配線形成法 Granted JPS5891659A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19023281A JPS5891659A (ja) 1981-11-26 1981-11-26 電極配線形成法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19023281A JPS5891659A (ja) 1981-11-26 1981-11-26 電極配線形成法

Publications (2)

Publication Number Publication Date
JPS5891659A JPS5891659A (ja) 1983-05-31
JPS6246063B2 true JPS6246063B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-09-30

Family

ID=16254683

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19023281A Granted JPS5891659A (ja) 1981-11-26 1981-11-26 電極配線形成法

Country Status (1)

Country Link
JP (1) JPS5891659A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6451472U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1987-09-29 1989-03-30

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6451472U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1987-09-29 1989-03-30

Also Published As

Publication number Publication date
JPS5891659A (ja) 1983-05-31

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