JPS6245420Y2 - - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to a sample device for an electron microscope or the like that uses an electrostrictive or magnetostrictive element to apply tension or fatigue to a sample.

When performing dynamic observation of a metal sample using an electron microscope, tensile force or repeated stretching force (hereinafter abbreviated as fatigue) is applied to the sample. Conventional devices that apply tension or fatigue to samples are mechanical, which are cumbersome to operate and require a long time to observe. Furthermore, there are only independent devices for applying tension and fatigue, which has forced irrational operations.

The present invention was developed with the aim of eliminating such problems, and provides a new sample device that utilizes electrostrictive or magnetostrictive elements and has both tensile and fatigue application functions. be.

FIG. 1 shows an apparatus showing an embodiment of the present invention. In the figure, 2 is a lens barrel wall, and 3 is a holder installed in the lens barrel via the lens barrel wall 2 so that the sample 4 is located on the optical axis 5. Note that 6 is an O-ring. Although not shown, an electron gun, a focusing lens, and other lens systems are arranged above the holder 3, and an objective lens, a projection lens, a fluorescent screen, etc. are arranged below. sample 4 is irradiated. The holder is constructed as follows. The sample 4 is in the form of a thin film, and is deposited on a substrate 8 having a hole 7 in the center, as shown in FIG. (Although only sample 4 is shown in FIG. 1 for convenience, this is actually a substrate on which a thin film sample is attached.) One end of the substrate is attached to a sample 4 fixed to holder 3. 1 attached to the sample stage 9,
The other end is attached to a second sample stage 10 that is horizontally movable within the holder. The second sample stage 1
0 is connected to a connecting rod 11, and the end of the connecting rod opposite to the second sample stage 10 is connected to a first electrostrictive element 12. The first electrostrictive element expands and contracts in the optical axis direction, and when the applied voltage is on, it contracts, and when it is off, it stretches and returns to its original length, hitting the inner wall of the holder, and is caused by frictional force. Fixed. As a result, the connecting rod 11 and the like do not move in the horizontal direction. A third electrostrictive element 14 is arranged at an appropriate distance from the first electrostrictive element in the horizontal direction, and expands and contracts in the optical axis direction similarly to the first electrostrictive element 12. As shown in FIG. 3, when a voltage is applied between the first electrostrictive element and the third electrostrictive element, it expands in the horizontal direction (direction perpendicular to the optical axis), and when cut, it contracts and returns to its original state. The second electrostrictive element 13, which returns to its length, is arranged so as to be integrated with both. Reference numeral 15 denotes a voltage control device, which connects the input terminal AA' of the first electrostrictive element 12, the input terminal BB' of the second electrostrictive element 13, and the third electrostrictive element 1.
An appropriate voltage is applied to both ends of the first to third electrostrictive elements through the input terminal CC' of No. 4. Note that these electrostrictive elements are actually composed of a plurality of piezoelectric elements stacked one on top of the other, so a voltage must be applied to both ends of each of the plurality of stacked elements; however, for the sake of explanation, the first ~A voltage was applied only to both ends of the third electrostrictive element.

In such a device, when performing a fatigue test by applying stretching force to the sample 4, a voltage as shown in Figure 4a is applied from the voltage control device 15 to terminal AA', and a voltage as shown in Figure 4b is applied between terminal BB'. Connect the voltage to the terminals as shown in
A voltage as shown in FIG. 4c is applied between CC'. This causes the first electrostrictive element 12 to contract and the third
The electrostrictive element 14 remains immobile in contact with the inner wall of the holder 3, and the second electrostrictive element 13 expands and contracts a number of times depending on the number of pulses of the applied voltage (see FIG. 4b). Therefore, the connecting rod 11 and the second sample stage 10 reciprocate in the horizontal direction in synchronization with the expansion and contraction of the second electrostrictive element 13, and fatigue is applied to the sample 4 on the substrate 8. The degree of fatigue is controlled by the number of voltage pulses applied to the second electrostrictive element 13. After applying a predetermined fatigue, an electron beam 5 is irradiated onto the sample, and the transmitted image is observed on a fluorescent screen (not shown). When performing a tensile test by applying a tensile force to the sample 4, a voltage as shown in FIG. 5a is applied between the voltage control device 15 and the terminal AA', and a voltage as shown in FIG. and voltages as shown in FIG. 5c are applied between terminals CC'. Then, since the first electrostrictive element 12 extends to its original length at the voltage "0" level from o to _t3 , it remains in contact with the inner wall of the holder 3 and remains immobile in the horizontal direction. Third electrostrictive element 14
is contracted at the voltage "1" level from o to t ₂ (t ₂ <t ₃ ), and becomes movable in the horizontal direction. Second electrostrictive element 1
3 extends in the horizontal direction at the voltage "1" level between t ₁ and _{t 4} (0<t ₁ <t ₂ <t ₃ <t ₄ ). Accordingly, the third electrostrictive element 14 ( (between t ₁ and t ₂ ) move to the right. Next, the third electrostrictive element 14 stretches at the voltage "0" level between t ₂ and _{t 6} and returns to its original length, so that it remains immobile in the horizontal direction. Moreover, the first electrostrictive element 1
2 contracts at the voltage "1" level between _t3 and _t5 ( _t2 < _t3 < _t5 < _t6 ) and becomes horizontally movable. At this time (t ₄ ~
t ₇ ), since the second electrostrictive element 13 contracts at the voltage "0" level, the first electrostrictive element 12
moves to the right (between t ₄ and t ₅ ). Therefore, since the connecting rod 11 and the second sample stage 10 also move in the right direction in synchronization, the sample 4 is pulled together with the substrate 8. The degree of this tension can be controlled by the height or number of pulses of the voltage applied to the first to third electrostrictive elements.

In this example, the first element 12, the second element 13, and the third element 14 for applying tension and fatigue to the sample 4 were constructed with electrostrictive elements, but each of these elements was constructed with an electrostrictive element. Alternatively, a driving electric signal may be applied to the electrostrictive element, or
Only some of these elements may be replaced with electrostrictive elements.

As described above, according to the present invention, an electrostrictive or electrostrictive element is used to apply tension or fatigue to a sample, and by simply applying an appropriate electric signal to the electrostrictive or electrostrictive element, either tensile or fatigue can be easily applied. can be applied to the sample, which greatly simplifies the operation.

[Brief explanation of drawings]

Fig. 1 is a schematic diagram of a sample device showing an embodiment of the present invention, Figs. 2 and 3 are partially detailed views thereof, and Figs. 4 and 5 supplement the explanation of the operation of the present invention. This is a signal diagram for 3: Holder, 4: Sample, 9: First sample stage, 1
0: second sample stage, 11: connecting rod, 12: first electrostrictive element, 13: second electrostrictive element, 14: third electrostrictive element.

Claims (1)

[Scope of utility model registration request] A first sample stage 9 supporting one end of the sample 4
, a second sample stand 10 that supported the other end of the sample 4, a connecting rod 11 connected to the second sample stand and arranged along a direction perpendicular to the electron beam optical axis, and the connecting rod. a first electrostrictive or magnetostrictive element 12 that is connected to the connecting rod 11 and is expandable and contractible in the optical axis direction; a possible second electrostrictive or magnetostrictive element 13; and a third electrostrictive or magnetostrictive element 1 connected to the second electrostrictive or magnetostrictive element 13 and expandable and contractible in the optical axis direction.
4, and a control power source 15 for applying electric signals to each of the electrostrictive or magnetostrictive elements to control expansion and contraction of each element.
The electrostrictive or magnetostrictive elements are both arranged in the holder 3, and the first electrostrictive or magnetostrictive element 12
The third electrostrictive or magnetostrictive element 14 is configured to be fixed in contact with the inner wall of the holder 3 when expanded based on an electric signal from the control power source, and the third electrostrictive or magnetostrictive element 14 is configured such that it is fixed in contact with the inner wall of the holder 3, and the sample is on the optical axis. 1. A sample device for an electron microscope, etc., characterized in that the tip of the holder 3 is disposed within an electron microscope cylinder so that the tip of the holder 3 is located within the electron microscope cylinder.