JPH07249802A - Sealing type ultraprecise fine adjustment device - Google Patents
Sealing type ultraprecise fine adjustment deviceInfo
- Publication number
- JPH07249802A JPH07249802A JP6037171A JP3717194A JPH07249802A JP H07249802 A JPH07249802 A JP H07249802A JP 6037171 A JP6037171 A JP 6037171A JP 3717194 A JP3717194 A JP 3717194A JP H07249802 A JPH07249802 A JP H07249802A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- preload
- support plate
- movement device
- fine movement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、光ファイバ用接合装
置、磁気ヘッド加工用ダイシング装置、半導体用露光装
置などのＸＹステージに装着され、微小移動させるため
の密封式超精密微動装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hermetically-sealed ultra-precision fine movement device mounted on an XY stage such as an optical fiber joining device, a magnetic head processing dicing device, and a semiconductor exposure device for finely moving it. is there.
【０００２】[0002]
【従来の技術】近年、光通信の高度化に伴い長距離伝送
しても損失が低い光ファイバが要求されるが、この様な
光ファイバを作るためには、光ファイバのコア同士を接
合する時にサブミクロン領域（１μｍ以下）の位置決め
精度が必要となる。2. Description of the Related Art In recent years, with the advancement of optical communication, an optical fiber having a low loss is required even if it is transmitted over a long distance. To make such an optical fiber, the cores of the optical fibers are joined together. Sometimes, positioning accuracy in the submicron region (1 μm or less) is required.
【０００３】そこで、この要求を満たすために次のよう
な精密位置決め装置が用いられている。即ち、有底筒体
内に圧電素子を収納し、その先端に出力軸を固着すると
ともに、該出力軸を前記筒体先端に被せたキャップから
摺動自在に突出させ、該キャップと出力軸のばね係止部
との間にコイルばねを介在せしめた精密位置決め装置。
（特開平４ー１６５６８３号参照）Therefore, in order to meet this demand, the following precision positioning device is used. That is, the piezoelectric element is housed in a bottomed cylinder, the output shaft is fixed to the tip thereof, and the output shaft is slidably protruded from a cap covering the tip of the cylinder, and the spring of the cap and the output shaft is fixed. A precision positioning device with a coil spring interposed between the locking part.
(See JP-A-4-165683)
【０００４】従来の位置決め装置では、圧電素子の出力
部材がキャップを貫通する構造となっているので、軸摺
動部の密封が完全でなく長期間の高湿環境では空気中の
水蒸気の侵入を遮断できない。そのため、圧電素子がシ
ョートすることがある。In the conventional positioning device, since the output member of the piezoelectric element penetrates the cap, the shaft sliding portion is not completely sealed, and in the high humidity environment for a long period of time, water vapor in the air is prevented from entering. I can't shut it off. Therefore, the piezoelectric element may be short-circuited.
【０００５】そこで、圧電素子が金属ケースと金属部材
及びガラス端子によって封止された圧電アクチュエータ
が用いられている（特開平２ー１９６４７９号参照）。Therefore, a piezoelectric actuator in which a piezoelectric element is sealed by a metal case, a metal member and a glass terminal is used (see Japanese Patent Application Laid-Open No. 2-196479).
【０００６】[0006]
【発明が解決しようとする課題】従来例の圧電アクチュ
エータは出力軸方向に伸縮できる構造にするため金属ケ
ースの一部をへら加工などにより硬いばね性を持たせて
いる。しかし、この金属ケースを正確に所定のばね定数
に加工するのは困難であるため、圧電素子に加えられる
予圧力が設定値にならないことがある。又、予圧力が設
定値となったとしても、圧電素子を圧縮もしくは伸長し
ながら、ばね力を調整することができないので、所定の
ばね定数に設定することが極めて難しい。In the conventional piezoelectric actuator, a part of the metal case has a hard spring property by a spatula process or the like in order to have a structure capable of expanding and contracting in the output shaft direction. However, since it is difficult to accurately process this metal case to a predetermined spring constant, the preload applied to the piezoelectric element may not reach the set value. Further, even if the preload reaches the set value, the spring force cannot be adjusted while compressing or expanding the piezoelectric element, so it is extremely difficult to set the spring constant to a predetermined value.
【０００７】更に、この装置では、大きな変位量をとる
ため細長い構造の金属ケースになるとともに、出力軸が
圧電素子と全面で直接接着されているため、次のような
問題がある。 （1）この装置をステージに装着して、重量物駆動や高
速駆動をしようとすると、出力軸に引っ張り力が加わ
り、圧電素子が引っ張り力を受けて破損する。Further, in this device, since a large displacement amount is obtained and the metal case has an elongated structure, and the output shaft is directly adhered to the piezoelectric element over the entire surface, there are the following problems. (1) When this device is mounted on a stage to drive a heavy object or drive at high speed, a tensile force is applied to the output shaft, and the piezoelectric element receives the tensile force and is damaged.
【０００８】（2）出力軸の先端とステージをネジ等で
螺着する際に出力軸に回転力が加わり、圧電素子が曲げ
力を受けるので、圧電素子は破損する。 （3）重量物を載せ、ｘｙ軸方向に高速駆動すると、出
力軸に対して平行でない曲げ力が加わるため圧電素子が
破損する。(2) When the tip of the output shaft and the stage are screwed together with a screw or the like, a rotational force is applied to the output shaft and the piezoelectric element receives a bending force, so that the piezoelectric element is damaged. (3) When a heavy object is placed and driven at high speed in the xy axis direction, a bending force that is not parallel to the output shaft is applied, and the piezoelectric element is damaged.
【０００９】この発明は前記事情に鑑み、予圧力の調整
ができるようにすることを目的とする。他の目的は圧電
素子の破損を防止することである。In view of the above circumstances, an object of the present invention is to enable adjustment of preload. Another purpose is to prevent damage to the piezoelectric element.
【００１０】[0010]
【課題を解決するための手段】この発明は、圧電素子の
両端にそれぞれ支持板を設け、該両支持板間にベローズ
を張設して前記圧電素子を密封した超精密微動装置であ
って；前記圧電素子とベローズとの間に設けられ、か
つ、前記両支持板により保持されている予圧支柱と；該
予圧支柱に設けられた予圧力調整手段と；前記支持板と
前記圧電素子の少なくても一端との間に設けられ、か
つ、半球と受部とからなるボールジョイントと；を備え
ること、により前記目的を達成しようとするものであ
る。SUMMARY OF THE INVENTION The present invention is an ultraprecision fine movement apparatus in which a support plate is provided at each end of a piezoelectric element, and a bellows is stretched between the support plates to seal the piezoelectric element. A preload strut provided between the piezoelectric element and the bellows and held by the support plates; a preload adjusting means provided on the preload strut; and at least the support plate and the piezoelectric element. And a ball joint including a hemisphere and a receiving portion, the ball joint being provided between the one end and the other end.
【００１１】[0011]
【作用】予圧力調整手段により予圧力を所定値にセット
する。その後、圧電素子に電圧を印加すると、該圧電素
子が急激に伸びボールジョイントを介して圧電素子の先
端側の支持板を移動させる。その後、電圧をゼロにする
と該圧電素子はゆっくりと元の状態に戻る。Operation: The preload adjusting means sets the preload to a predetermined value. Then, when a voltage is applied to the piezoelectric element, the piezoelectric element rapidly expands and moves the support plate on the tip side of the piezoelectric element via the ball joint. After that, when the voltage is set to zero, the piezoelectric element slowly returns to its original state.
【００１２】この時、該支持板に引っ張り応力が加わっ
ても、圧電素子には予圧力が加えられているので破損す
ることがない。又、該支持板に予圧力以上の引っ張り力
が加わると、ボールジョイントの半球と受部とが離れる
ので、その引っ張り力は圧電素子に伝達されない。At this time, even if tensile stress is applied to the supporting plate, the piezoelectric element is not damaged because it is preloaded. Further, when a tensile force equal to or greater than the preload is applied to the support plate, the hemisphere of the ball joint and the receiving portion are separated from each other, so that the tensile force is not transmitted to the piezoelectric element.
【００１３】更に、該支持板に変位方向と異なる方向の
力が加わってもボールジョイントの球部と受部とによ
り、その力は吸収され圧電素子には伝達されない。Further, even if a force in a direction different from the displacement direction is applied to the support plate, the force is absorbed by the ball portion and the receiving portion of the ball joint and is not transmitted to the piezoelectric element.
【００１４】[0014]
【実施例】この発明の第１実施例を図１〜図４により説
明する。圧電素子１の両端に支持板２、３を設ける。該
圧電素子１は、圧電、電歪、磁歪などの素子を指称し、
変位方向Ａ１に直列に接続されている。この圧電素子１
の個数は必要に応じて適宜選択される。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described with reference to FIGS. Support plates 2 and 3 are provided at both ends of the piezoelectric element 1. The piezoelectric element 1 refers to a piezoelectric, electrostrictive, magnetostrictive element or the like,
They are connected in series in the displacement direction A1. This piezoelectric element 1
The number of is properly selected according to need.
【００１５】この圧電素子１として、例えば、プラスと
マイナスの内部電極が交互に積層し、圧電セラミック電
極が一体焼成され、圧電素子端面の外部電極で直列につ
ないだ積層型圧電素子が用いられ、予め高い直流電圧、
例えば、３ｋｖ／ｍｍで分極処理されている。As the piezoelectric element 1, for example, a laminated piezoelectric element in which positive and negative internal electrodes are alternately laminated, piezoelectric ceramic electrodes are integrally fired, and external electrodes on the end faces of the piezoelectric element are connected in series, are used. High DC voltage in advance,
For example, it is polarized at 3 kv / mm.
【００１６】圧電素子１の先端１ａと第１支持板２はボ
ールジョイント４を介して接続されている。このボール
ジョイント４は圧電素子１の先端１ａに接続された半球
５と第１支持板２に形成された断面Ｖ字状の受部６とか
ら構成されている。この半球５が小さい時には、別途補
助部材を設け、この補助部材の表面に該半球５を固着
し、該補助部材の裏面を圧電素子１の先端に固着しても
よい。The tip 1a of the piezoelectric element 1 and the first support plate 2 are connected via a ball joint 4. The ball joint 4 is composed of a hemisphere 5 connected to the tip 1 a of the piezoelectric element 1 and a receiving portion 6 formed on the first support plate 2 and having a V-shaped cross section. When the hemisphere 5 is small, an auxiliary member may be separately provided, the hemisphere 5 may be fixed to the front surface of the auxiliary member, and the back surface of the auxiliary member may be fixed to the tip of the piezoelectric element 1.
【００１７】この第１支持板２の先端には出力部材７が
接着剤等により固定されている。この出力部材７の内側
中央には第１支持板２の位置合せ穴２ａに嵌着されるセ
ンタピン７ａが設けられ、又、その外側にはテーブル等
が螺着されるタップ１０が設けられている。An output member 7 is fixed to the tip of the first support plate 2 with an adhesive or the like. A center pin 7a fitted into the alignment hole 2a of the first support plate 2 is provided at the center of the inside of the output member 7, and a tap 10 to which a table or the like is screwed is provided on the outside thereof. .
【００１８】第２支持板３は、取付フランジ１１の凹部
１１ａの段部１１ｂに載置され、その上面を取付部材１
２により押圧されている。この凹部１１ａの底面には回
り止め孔１１ｃが形成されている。The second support plate 3 is placed on the stepped portion 11b of the recess 11a of the mounting flange 11, and the upper surface thereof is attached to the mounting member 1.
Pressed by 2. A rotation stop hole 11c is formed on the bottom surface of the recess 11a.
【００１９】出力部材７と取付部材１２との間には圧電
素子１を密封する金属ベローズ１５が張設されている。
これらの部材７、１２と金属ベローズ１５との接続は電
子ビームやプラズマ溶接等により行われる。この金属ベ
ローズ１５の下部側に蛇行ばね部１５ａが設けられてい
るが、この蛇行ばね部１５ａの長さ、位置及びばね定数
は必要に応じて適宜選択される。この金属ベローズ１５
のばね定数は、例えば、１ｋｇ／ｍｍ以下に設定され
る。A metal bellows 15 for sealing the piezoelectric element 1 is stretched between the output member 7 and the mounting member 12.
The connection between these members 7 and 12 and the metal bellows 15 is performed by electron beam, plasma welding or the like. A meandering spring portion 15a is provided on the lower side of the metal bellows 15. The length, position and spring constant of the meandering spring portion 15a are appropriately selected as needed. This metal bellows 15
The spring constant of is set to, for example, 1 kg / mm or less.
【００２０】金属ベローズ１５と圧電素子１との間に
は、燐青銅、ステンレス、真鍮等のばね材で形成された
予圧支柱２０が配設されている。この支柱２０は図２、
図３に示す様に、上端部２０ａ、及び下端部２０ｂにね
じ部２１を有し、その中央部に蛇行ばね部２２を備えて
いるが、このばね部２２の位置、ばね定数及びその長さ
Ｍは必要に応じて適宜選択される。Between the metal bellows 15 and the piezoelectric element 1, a preload column 20 made of a spring material such as phosphor bronze, stainless steel or brass is arranged. This pillar 20 is shown in FIG.
As shown in FIG. 3, the upper end portion 20a and the lower end portion 20b have a threaded portion 21 and a meandering spring portion 22 at the center thereof. The position, spring constant and length of the spring portion 22 are provided. M is appropriately selected as needed.
【００２１】この予圧支柱２０は、例えば、断面円形状
であり、その全長Ｌは直径Ｄの５倍以上に形成され、例
えば、径Ｄ＝２、０ｍｍ、長さＬ＝５３、９ｍｍ、蛇行
ばね部２２ａの長さＭ＝２４ｍｍが選ばれる。この予圧
支柱２０の断面は必ずしも円形である必要はなく、例え
ば、角形であってもよい。又、蛇行ばね２２の代わり
に、図１１に示すように予圧支柱２０の中間部に、中空
部２２ｂを有する節部２２ａを形成してもよい。The preload column 20 has, for example, a circular cross section, and the total length L is formed to be 5 times or more the diameter D. For example, the diameter D = 2,0 mm, the length L = 53,9 mm, and the meandering spring. A length M = 24 mm of the portion 22a is selected. The cross section of the preload column 20 does not necessarily have to be circular, and may be rectangular, for example. Further, instead of the meandering spring 22, a node portion 22a having a hollow portion 22b may be formed in an intermediate portion of the preloading column 20, as shown in FIG.
【００２２】この予圧支柱２０の先端２０ａは第１支柱
板２に固定されている固定ナット２５に螺着され、又、
その後端２０ｂは第２支柱板３から突出している。この
後端２０ｂのねじ部２１には予圧力を調整するための調
圧ナット２６が螺着されている。この後端２０ｂは自由
に回転するのを防止するため回り止め孔１１ｃに嵌め込
まれる。The front end 20a of the preload column 20 is screwed into a fixing nut 25 fixed to the first column plate 2, and
The rear end 20b projects from the second support plate 3. A pressure adjusting nut 26 for adjusting the preload is screwed onto the threaded portion 21 of the rear end 20b. The rear end 20b is fitted into the rotation stop hole 11c to prevent the rear end 20b from freely rotating.
【００２３】予圧支柱２０は図４に示す様に、圧電素子
１の中心軸１ｃを挟んで左右対称に配設されているが、
必ずしもこれに限定されるものではなく、例えば、中心
軸１ｃを中心とする円上に９０度づつ間隔をおいて４本
配設しても良い。As shown in FIG. 4, the preload struts 20 are symmetrically arranged with the central axis 1c of the piezoelectric element 1 interposed therebetween.
The present invention is not necessarily limited to this, and for example, four lines may be arranged at intervals of 90 degrees on a circle centered on the central axis 1c.
【００２４】取付フランジ１１には、絶縁ガラスで覆わ
れた電流導入端子３０が設けられており、該電流導入端
子３０は取付フランジ１１とガラス融着されている。The mounting flange 11 is provided with a current introducing terminal 30 covered with insulating glass, and the current introducing terminal 30 is glass-welded to the mounting flange 11.
【００２５】取付フランジ１１の凹部１１ａ内に突出す
る電流導入端子３０の先端は、圧電素子１のプラスとマ
イナスの各リード線３１に半田接合され、熱収縮チュー
ブで被覆され、又、取付フランジ１１の外方に突出する
電流導入端子３０の後端は、破水性の樹脂を埋め込み高
温環境下で結露しないように被覆されている。The tip of the current introducing terminal 30 projecting into the recess 11a of the mounting flange 11 is soldered to the positive and negative lead wires 31 of the piezoelectric element 1 and is covered with a heat-shrinkable tube. The rear end of the current-introducing terminal 30 protruding to the outside is embedded with a water-breaking resin so as to prevent condensation in a high temperature environment.
【００２６】この装置は密封構造となっている。即ち、
金属ベローズ１５と出力部材７及び取付部材１２が電子
ビーム又はプラズマ溶接されており、取付フランジ１１
の電流導入端子３０はガラス融着処理されており、取付
部材１２と取付フランジ１１はＯリング３２又はメタル
シールにより完全に密封されている。なお、図におい
て、３５は取付部材１２と取付フランジ１１とを固定す
るボルトである。This device has a sealed structure. That is,
The metal bellows 15, the output member 7, and the mounting member 12 are electron-beam or plasma-welded, and the mounting flange 11
The current-introducing terminal 30 is subjected to glass fusion treatment, and the mounting member 12 and the mounting flange 11 are completely sealed by an O-ring 32 or a metal seal. In the figure, 35 is a bolt for fixing the mounting member 12 and the mounting flange 11.
【００２７】次に、この実施例の作動について説明す
る。回転ピッチの調整できる締め付具を用いて調圧ナッ
ト２６を回して予圧支柱２０の引っ張り力を調整し、圧
電素子１に所定の予圧（圧縮力）を加える。Next, the operation of this embodiment will be described. The tension nut of the preload column 20 is adjusted by using the tightening tool whose rotation pitch can be adjusted, and a predetermined preload (compressive force) is applied to the piezoelectric element 1.
【００２８】この予圧支柱２０のばね定数は、例えば、
圧電素子形状が長さ５ｍｍ、幅７ｍｍ、の場合、複数本
で２０〜１５０ｋｇ／ｍｍになる様に調整されており、
圧電素子１には、例えば、１０〜１２０ｋｇｆの圧縮力
が加えられる。なお、圧電素子１に加わる圧縮力が変位
量に及ぼす影響、即ち、効率＝圧縮後の変位量／無負荷
の変位量、を実験したところ、図８の結果を得た。この
実験では、長さ５ｍｍ、幅７ｍｍ、高さ９ｍｍの圧電素
子を用いたが、この場合２００ｋｇｆの圧縮力まで効率
１００％であることがわかった。The spring constant of the preload support 20 is, for example,
When the piezoelectric element has a length of 5 mm and a width of 7 mm, it is adjusted so that a plurality of piezoelectric elements have a weight of 20 to 150 kg / mm.
A compressive force of, for example, 10 to 120 kgf is applied to the piezoelectric element 1. When the effect of the compressive force applied to the piezoelectric element 1 on the displacement amount, that is, efficiency = displacement amount after compression / displacement amount without load, was tested, the result of FIG. 8 was obtained. In this experiment, a piezoelectric element having a length of 5 mm, a width of 7 mm, and a height of 9 mm was used. In this case, it was found that the efficiency was 100% up to a compressive force of 200 kgf.
【００２９】出力部材７のタップ１０に図示しないテー
ブルを螺着し、該テーブルに被移動物を載置する。この
時、出力部材７に固着されている第１支持板２に回転力
が加わるが、その回転力はボールジョイント４の半球５
と受部６とにより吸収され、圧電素子１に伝達されるこ
とはない。A table (not shown) is screwed onto the tap 10 of the output member 7, and the object to be moved is placed on the table. At this time, a rotational force is applied to the first support plate 2 fixed to the output member 7, and the rotational force is the hemisphere 5 of the ball joint 4.
It is absorbed by the receiving portion 6 and is not transmitted to the piezoelectric element 1.
【００３０】又、予圧支柱２０の下方の後端２０ｂは、
回り止め孔１１ｃに嵌着されているので、該予圧支柱２
０が自在に回転することはない。The rear end 20b below the preload column 20 is
Since it is fitted in the rotation stop hole 11c, the preload support column 2
Zero does not rotate freely.
【００３１】圧電素子１に所定の電圧、例えば、１４０
Ｖを印加すると、該圧電素子１は、予圧支柱２０の圧縮
力に打ち勝ちながら矢印Ａ方向に伸長する。この時の伸
び量は、例えば、４０μｍである。A predetermined voltage is applied to the piezoelectric element 1, for example, 140
When V is applied, the piezoelectric element 1 expands in the direction of arrow A while overcoming the compressive force of the preload strut 20. The amount of elongation at this time is 40 μm, for example.
【００３２】この圧電素子１の伸長により第１支持板２
及び出力部材７が矢印Ａ方向に移動し、被移動物を同方
向に微動させる。この出力部材７の移動に伴い金属ベロ
ーズ１５は伸びるが、予圧支柱２０より軟らかいばね定
数（１ｋｇ／ｍｍ以下）に設定されているので、出力部
材７の円滑な移動を阻害する程度の大きな抵抗となるこ
とはない。By the extension of the piezoelectric element 1, the first support plate 2
Also, the output member 7 moves in the direction of arrow A, and the moving object is slightly moved in the same direction. Although the metal bellows 15 expands with the movement of the output member 7, since the spring constant (1 kg / mm or less) is set to be softer than the preload strut 20, a large resistance that hinders the smooth movement of the output member 7 is obtained. It never happens.
【００３３】圧電素子１の印加電圧をゼロにすると、該
圧電素子１はゆっくりと元の長さに戻る。この時、圧電
素子１は支柱板２、３により圧縮力、即ち予圧を受けて
いるので、出力部材７に該圧縮力より小さな引っ張り力
が加わっても圧電素子１は両支柱板２、３から離れるこ
とはない。即ち、これら１、２、３、７はあたかも一体
物の如き状態で変位するのである。そのため、圧電素子
１がこの引っ張り力の影響を受けることはない。When the applied voltage to the piezoelectric element 1 is set to zero, the piezoelectric element 1 slowly returns to its original length. At this time, since the piezoelectric element 1 is subjected to a compressive force, that is, a preload by the support plates 2 and 3, even if a pulling force smaller than the compressive force is applied to the output member 7, the piezoelectric element 1 is removed from both support plates 2 and 3. Never leave. That is, these 1, 2, 3, and 7 are displaced as if they were one piece. Therefore, the piezoelectric element 1 is not affected by this tensile force.
【００３４】出力部材７に加わる引っ張り力が前記圧縮
力より大きな場合は、第１支持板２に形成されている受
部６と圧電素子１に固着されている半球５とが離れる。
そのため、圧電素子１に引っ張り力が加わることはな
い。When the tensile force applied to the output member 7 is larger than the compressive force, the receiving portion 6 formed on the first support plate 2 and the hemisphere 5 fixed to the piezoelectric element 1 are separated from each other.
Therefore, no tensile force is applied to the piezoelectric element 1.
【００３５】該装置に圧電素子１の変位方向Ａ１と異な
る方向、例えば矢印Ａ２方向からの力が加わると、該力
は金属ベローズ１５を変位させるが、ボールジョイント
４の半球５と受部６とにより吸収されるので圧電素子１
に伝達されることはない。When a force is applied to the device from a direction different from the displacement direction A1 of the piezoelectric element 1, for example, the direction of arrow A2, the force displaces the metal bellows 15, but the hemisphere 5 of the ball joint 4 and the receiving portion 6 Is absorbed by the piezoelectric element 1
Will not be transmitted to.
【００３６】尚、この装置は、前述のように密封構造に
し、空気中の水蒸気、粉塵等を完全に遮断するようにし
たことも特徴の一つである。One of the features of this apparatus is that it has a hermetically sealed structure as described above so that water vapor, dust, etc. in the air are completely blocked.
【００３７】上記実施例のボールジョイント４は、図
５、図６の様に構成しても良い。図５は、第１支持板２
に半球１０５を接着剤で固着し、半球状凹部１０６を有
する受部部材１０７を圧電素子１の先端１ａに接着剤で
固着したものである。The ball joint 4 of the above embodiment may be constructed as shown in FIGS. FIG. 5 shows the first support plate 2
The hemisphere 105 is fixed by an adhesive, and the receiving member 107 having the hemispherical recess 106 is fixed by the adhesive to the tip 1a of the piezoelectric element 1.
【００３８】図６は、両支持板２、３にそれぞれ半球状
凹部２０６を形成し、圧電素子１の両端１ａ、１ｂにそ
れぞれ半球２０５を接着剤で固着したものである。In FIG. 6, hemispherical recesses 206 are formed in both support plates 2 and 3, and hemispheres 205 are fixed to both ends 1a and 1b of the piezoelectric element 1 with an adhesive.
【００３９】この発明の第２実施例を図７により説明す
るが、第１実施例と同一図面符号はその名称も機能も同
一である。この実施例と第１実施例との相違点は次の通
りであるが、第一実施例と同様の効果を得られることは
勿論である。 （1）予圧支柱１２０は円柱体で蛇行ばね部が設けられ
ておらず、第２支柱板３と調圧ナット２６との間に皿ば
ね２００が介在していること。A second embodiment of the present invention will be described with reference to FIG. 7. The same reference numerals as those in the first embodiment have the same names and functions. The difference between this embodiment and the first embodiment is as follows, but it is needless to say that the same effect as the first embodiment can be obtained. (1) The preload column 120 is a columnar body and is not provided with a meandering spring portion, and the disc spring 200 is interposed between the second column plate 3 and the pressure adjusting nut 26.
【００４０】（2）ボールジョイントが、圧電素子１の
先端１ａに接着剤で固着された半球５と、第１支柱板２
に形成された半球状凹部１０６とから構成されているこ
と。 （3）金属ベローズ１１５はその全長にわたって蛇行ば
ね部１１５ａが形成されていること。(2) The ball joint has a hemisphere 5 fixed to the tip 1a of the piezoelectric element 1 with an adhesive, and the first support plate 2
And a hemispherical concave portion 106 formed in. (3) The metal bellows 115 has a meandering spring portion 115a formed over its entire length.
【００４１】[0041]
【発明の効果】この発明は以上の様に構成したので、次
の如き顕著な効果を奏する。 （1）圧電素子とベローズとの間に予圧支柱を設け、該
予圧支柱を前記両支持板により保持するとともに、該予
圧支柱に予圧力調整手段を設けたので、従来例と異なり
圧電素子に加える予圧力を任意に調整することができ
る。そのため、圧電素子に加えられる圧縮力を設計通り
にすることができる。Since the present invention is constructed as described above, it has the following remarkable effects. (1) A preload strut is provided between the piezoelectric element and the bellows, and the preload strut is held by both the support plates, and the preload adjustment means is provided on the preload strut. The preload can be adjusted arbitrarily. Therefore, the compressive force applied to the piezoelectric element can be as designed.
【００４２】又、支持板に固定された出力部材に引っ張
り力が加わっても、予圧力の範囲内では圧電素子に引っ
張り力が加わらない。そのため、圧電素子の破損を防止
することができる。Further, even if a tensile force is applied to the output member fixed to the support plate, the tensile force is not applied to the piezoelectric element within the range of the preload. Therefore, damage to the piezoelectric element can be prevented.
【００４３】（2）圧電素子の一端を半球と受部とから
なるボールジョイントを介して支持板に接続したので、
支持板に固定された出力部材に予圧力を超える引っ張り
力が加わった場合には、半球と受部とが離れる。そのた
め、圧電素子に引っ張り力が伝達されることがないの
で、圧電素子の破損事故を防止できる。(2) Since one end of the piezoelectric element is connected to the support plate via a ball joint consisting of a hemisphere and a receiving portion,
When a tensile force exceeding a preload is applied to the output member fixed to the support plate, the hemisphere and the receiving portion are separated from each other. Therefore, since the tensile force is not transmitted to the piezoelectric element, it is possible to prevent damage to the piezoelectric element.
【００４４】ちなみに、図１０に示す耐久性試験装置を
用いて、本発明の装置Ｅとベローズに硬いばね性を持た
せた従来例の装置ｅとを比較したところ、図９の如き結
果を得た。この実験は長さ５ｍｍ、幅７ｍｍ、高さ６３
ｍｍ、の圧電素子を使い、本発明の装置Ｅの先端のタッ
プ１０と廻りを囲うようにして作った５００ｇの重りＷ
を直径３ｍｍのボルトＶで直接繋ぎ、圧電素子の変位方
向Ａ１と垂直に置き、室温、９０％湿度環境下におい
て、サイン波４０ＨＺで０〜１４０Ｖの電圧を印加し、
１０8回の試験を行った後の破損不良を調べたものであ
る。なお、図９において、３００は本発明の装置Ｅを固
定する基台である。By the way, the durability test apparatus shown in FIG. 10 was used to compare the apparatus E of the present invention with the apparatus e of the conventional example in which the bellows has a hard spring property, and the results shown in FIG. 9 were obtained. It was This experiment is 5 mm long, 7 mm wide, and 63 high.
A weight W of 500 g made by surrounding the tap 10 at the tip of the device E of the present invention by using a piezoelectric element of mm.
Is directly connected with a bolt V having a diameter of 3 mm, placed perpendicular to the displacement direction A1 of the piezoelectric element, and a voltage of 0 to 140 V is applied with a sine wave of 40 HZ under room temperature and 90% humidity environment.
This is an examination of breakage defects after conducting a test of 10 8 times. In FIG. 9, 300 is a base for fixing the device E of the present invention.
【００４５】図９から明らかな様に、本発明の装置Ｅで
は１０8回でも不良品は発生しないのに対し、従来例の
装置ｅでは、１０4回から不良品が発生し始め、１０8回
では６０％の不良率となる。このように本発明の装置Ｅ
は従来例の装置ｅに比べ大幅に不良率を減少させること
ができる。[0045] As is apparent from FIG. 9, device defective in E in 10 eight present invention whereas not occur in conventional apparatus e, begins defective products generated from 10 4 times, 10 8 In the number of times, the defect rate is 60%. Thus, the device E of the present invention
Can significantly reduce the defect rate as compared with the conventional device e.
【図１】本発明の第１実施例を示す縦断面図である。FIG. 1 is a vertical cross-sectional view showing a first embodiment of the present invention.
【図２】図１の予圧支柱の平面図である。2 is a plan view of the preload strut of FIG. 1. FIG.
【図３】図１の予圧支柱の側面図である。3 is a side view of the preload strut of FIG. 1. FIG.
【図４】図１のIV-IV線断面図である。4 is a sectional view taken along line IV-IV in FIG.
【図５】他のボールジョイントを示す縦断面図である。FIG. 5 is a vertical cross-sectional view showing another ball joint.
【図６】更に他のボールジョイントを示す縦断面図であ
る。FIG. 6 is a vertical sectional view showing still another ball joint.
【図７】本発明の第２実施例を示す縦断面図である。FIG. 7 is a vertical sectional view showing a second embodiment of the present invention.
【図８】圧電素子の圧縮力と効率との関係を示す図であ
る。FIG. 8 is a diagram showing a relationship between compression force and efficiency of a piezoelectric element.
【図９】本発明と従来例との不良率の比較図である。FIG. 9 is a comparison diagram of a defect rate between the present invention and a conventional example.
【図１０】耐久実験装置を示す図である。FIG. 10 is a view showing an endurance test device.
【図１１】他の実施例を示す図で、図３に相当する図で
ある。FIG. 11 is a view showing another embodiment and is a view corresponding to FIG. 3.
１ 圧電素子 ２ 第１支持板 ３ 第２支持板 ４ ボールジョイント ５ 半球 ６ 受部 ７ 出力部材 １１ 取付フランジ １２ 取付部材 １５ 金属ベローズ １５ａ 蛇行ばね部 ２０ 予圧支柱 ２６ 調圧ナット DESCRIPTION OF SYMBOLS 1 Piezoelectric element 2 1st support plate 3 2nd support plate 4 Ball joint 5 Hemisphere 6 Receiving part 7 Output member 11 Mounting flange 12 Mounting member 15 Metal bellows 15a Meandering spring part 20 Preload strut 26 Pressure adjusting nut
───────────────────────────────────────────────────── フロントページの続き (72)発明者 小野 昭一 千葉県佐倉市大作２丁目４番２号 小野田 セメント株式会社中央研究社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shoichi Ono 2-4-2 Daisaku Sakura, Chiba Prefecture Onoda Cement Co., Ltd.
Claims (13)
該両支持板間にベローズを張設して前記圧電素子を密封
した超精密微動装置であって；前記圧電素子とベローズ
との間に設けられ、かつ、前記両支持板により保持され
る予圧支柱と；該予圧支柱に設けられた予圧力調整手段
と；を備えていることを特徴とする密封式超精密微動装
置。1. A support plate is provided on each end of a piezoelectric element,
An ultra-precision micro-movement device in which a bellows is stretched between the both support plates to seal the piezoelectric element; a preload strut provided between the piezoelectric element and the bellows and held by the both support plates. And; a preload adjusting means provided on the preload support;
該両支持板間にベローズを張設して前記圧電素子を密封
した超精密微動装置であって；前記圧電素子とベローズ
との間に設けられ、かつ、前記両支持板により保持され
ている予圧支柱と；該予圧支柱に設けられた予圧力調整
手段と；前記支持板と前記圧電素子の少なくても一端と
の間に設けられ、かつ、半球と受部とからなるボールジ
ョイントと；を備えていることを特徴とする密封式超精
密微動装置。2. A support plate is provided on each end of the piezoelectric element,
What is claimed is: 1. An ultraprecision fine movement device in which a bellows is stretched between the both support plates to seal the piezoelectric element; a preload provided between the piezoelectric element and the bellows and held by the both support plates. A column; a preload adjusting means provided on the preload column; a ball joint provided between the support plate and at least one end of the piezoelectric element, the ball joint including a hemisphere and a receiving portion. A sealed ultra-precision micro-motion device characterized by
端に固定され、その受部が支持板に設けられていること
を特徴とする請求項２記載の密封式超精密微動装置。3. The hermetically sealed micro-fine movement device according to claim 2, wherein the hemisphere of the ball joint is fixed to the tip of the piezoelectric element, and the receiving portion is provided on the support plate.
され、その受部が圧電素子の先端に設けられていること
を特徴とする請求項２記載の密封式超精密微動装置。4. The hermetically sealed micro-fine movement device according to claim 2, wherein the hemisphere of the ball joint is fixed to the support plate, and the receiving portion is provided at the tip of the piezoelectric element.
持板との間にそれぞれ設けられていることを特徴とする
請求項２記載の密封式超精密微動装置。5. The hermetically sealed micro-fine movement device according to claim 2, wherein the ball joints are provided between both ends of the piezoelectric element and the support plate, respectively.
あることを特徴とする請求項２、３、４、又は、５記載
の密封式超精密微動装置。6. The sealed ultra-precision fine movement device according to claim 2, wherein the receiving portion of the ball joint is a hemispherical concave portion.
形成されていることを特徴とする請求項２、３、４、又
は、５記載の密封式超精密微動装置。7. The sealed ultra-precision fine movement device according to claim 2, wherein the receiving portion of the ball joint is formed in a V-shaped cross section.
蛇行ばね部と、支持板から突出する該予圧支柱のねじ端
部と、該ねじ端部に螺着される調圧ナットと、からなる
ことを特徴とする請求項１、又は２記載の密封式超精密
微動装置。8. The preload adjusting means comprises a meandering spring portion formed on the preload post, a screw end of the preload post projecting from the support plate, and a pressure adjusting nut screwed to the screw end. The sealed ultra-precision fine movement device according to claim 1 or 2, comprising:
圧支柱のねじ端部と、該ねじ端部に螺着される調圧ナッ
トと、該支持板と該調圧ナットとの間に介在する皿ばね
と、からなることを特徴とする請求項１、又は２記載の
密封式超精密微動装置。9. A preload adjusting means is provided between a screw end of a preload strut protruding from the support plate, a pressure adjusting nut screwed to the screw end, and between the support plate and the pressure adjusting nut. 3. The sealed ultra-precision fine movement device according to claim 1, further comprising an intervening disc spring.
方の支持部材が取付部材と取付フランジとにより挟持さ
れていることを特徴とする請求項１、又は２記載の密封
式超精密微動装置。10. The sealed ultra-precision micromotion according to claim 1, wherein the output member is fixed to one of the support plates, and the other support member is sandwiched between the mounting member and the mounting flange. apparatus.
するセンターピンを備えていることを特徴とする請求項
１０記載の密封式超精密微動装置。11. The hermetically sealed micro-fine movement device according to claim 10, wherein the output member is provided with a center pin that fits into the alignment hole of the support plate.
せしめる回り止め孔を備えていることを特徴とする請求
項１０記載の密封式超精密微動装置。12. The hermetically sealed micro-fine movement device according to claim 10, wherein the mounting flange is provided with a detent hole into which the end of the preload column is inserted.
着されており、電流導入端子の外側は破水性及び耐湿性
樹脂で覆い、その内側は圧電素子のリード線と半田結合
して接合部を熱収縮チューブで覆ったことを特徴とする
請求項１３記載の密封式超精密微動装置。13. A current-introducing terminal is fused to the mounting flange with glass, the outer side of the current-introducing terminal is covered with a water-repellent and moisture-resistant resin, and the inside is soldered to a lead wire of a piezoelectric element to form a joint. The sealed ultra-precision micro-movement device according to claim 13, wherein the heat-shrinkable tube is covered.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP03717194A JP3367003B2 (en) | 1994-03-08 | 1994-03-08 | Sealed ultra-precision fine movement device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP03717194A JP3367003B2 (en) | 1994-03-08 | 1994-03-08 | Sealed ultra-precision fine movement device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07249802A true JPH07249802A (en) | 1995-09-26 |
| JP3367003B2 JP3367003B2 (en) | 2003-01-14 |
Family
ID=12490157
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP03717194A Expired - Fee Related JP3367003B2 (en) | 1994-03-08 | 1994-03-08 | Sealed ultra-precision fine movement device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3367003B2 (en) |
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| NL1010366C2 (en) * | 1998-10-21 | 2000-04-25 | Hoogovens Corporate Services B | Device for precise position control of a power transmission system. |
| WO2000023204A1 (en) * | 1998-10-21 | 2000-04-27 | Corus Technology Bv | Device for accurate position control of a force-transmitting system |
| US6373171B1 (en) | 1998-10-21 | 2002-04-16 | Corus Technology Bv | Device for accurate position control of a force-transmitting system |
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| JP2008190617A (en) * | 2007-02-05 | 2008-08-21 | Toda Constr Co Ltd | Active damping device |
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| JPWO2012026564A1 (en) * | 2010-08-26 | 2013-10-28 | 京セラ株式会社 | Piezoelectric actuator |
| JP5496341B2 (en) * | 2010-08-26 | 2014-05-21 | 京セラ株式会社 | Piezoelectric actuator |
| US9130149B2 (en) | 2010-08-26 | 2015-09-08 | Kyocera Corporation | Piezoelectric actuator for suppressing disconnection |
| JP2013219567A (en) * | 2012-04-10 | 2013-10-24 | Yamaha Corp | Giant magnetostriction exciter |
| JP2015060982A (en) * | 2013-09-19 | 2015-03-30 | 太平洋セメント株式会社 | Piezoelectric actuator |
| JP2016001957A (en) * | 2014-06-12 | 2016-01-07 | 富士電機株式会社 | Vibration power generator |
| JP2016136134A (en) * | 2015-01-19 | 2016-07-28 | 日本精機株式会社 | Display device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3367003B2 (en) | 2003-01-14 |
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